Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation
US-9588190-B2 · Mar 7, 2017 · US
US11415642B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11415642-B2 |
| Application number | US-202117231297-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 15, 2021 |
| Priority date | Apr 15, 2020 |
| Publication date | Aug 16, 2022 |
| Grant date | Aug 16, 2022 |
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A device for sensing a magnetic field, comprising a closed superconducting loop configured to collect a magnetic field to be sensed, hereinafter external magnetic field, the closed superconducting loop having a path width (wp) and being provided with a constriction having a width (wc) narrower than the path width, the constriction generating a non-uniform magnetic field, hereinafter internal magnetic field, in response to the external magnetic field, a vibrating mechanical oscillator coupled to, or formed by the constriction and responsive to the internal magnetic field, and a detector configured to detect deflection or vibration of the mechanical oscillator and providing a signal indicative of the deflection or vibration.
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The invention claimed is: 1. A device for sensing a magnetic field, comprising a closed superconducting loop configured to collect a magnetic field to be sensed, hereinafter external magnetic field, said closed superconducting loop having a path width (w p ) and being provided with a constriction having a width (w c ) narrower than said path width, said constriction producing a non-uniform magnetic field on its surroundings, hereinafter internal magnetic field, in response to said external magnetic field, a vibrating mechanical oscillator coupled to, or formed by said constriction and responsive to the internal magnetic field, and a detector configured to detect deflection or vibration of said mechanical oscillator and providing a signal indicative of said deflection or vibration. 2. A device according to claim 1 , wherein said vibrating mechanical oscillator is configured to change its mechanical resonance frequency in response to said internal magnetic field. 3. A device according to claim 1 , wherein said mechanical oscillator is coupled to said constriction through the internal magnetic field, a first order spatial derivative of the internal magnetic field or a second order spatial derivative of the internal magnetic field. 4. A device according to claim 1 , wherein at least one portion of the mechanical oscillator is made of magnetic material and is positioned close to said constriction. 5. A device according to claim 4 , wherein the said magnetic material comprises nanostructured ferromagnetic elements. 6. A device according to claim 1 , wherein at least one portion of the mechanical oscillator is made of magnetostrictive material and is positioned close to said constriction. 7. A device according to claim 1 , wherein at least one portion of the mechanical oscillator is made of superconducting material and is positioned close to said constriction. 8. A device according to claim 1 , wherein said mechanical oscillator comprises at least one fixed anchor point and a vibrating structure connected to said anchor point. 9. A device according to claim 1 , wherein said constriction is formed as a straight or meander-wise or spiral-type stripline, or wherein the closed superconducting loop is spiral-type. 10. A device according to claim 1 , wherein said constriction is formed as a bridge and is configured to form said vibrating mechanical oscillator, a fixed permanent magnet being positioned close to said constriction. 11. A device according to claim 1 , wherein said detector is an optical detector based on laser beam deflection or optical interferometry by a laser beam coupled to said mechanical oscillator. 12. A device according to claim 1 , further comprising a containing structure (OS, IS, 230 ) in which a vacuum chamber is formed, said vacuum chamber receiving the closed superconducting loop and the mechanical oscillator. 13. A device according to claim 12 , wherein said detector comprises an optical fiber at least partially received in said vacuum chamber, wherein the closed superconducting loop and the mechanical oscillator are carried by an holder, wherein the optical fiber is carried by a ferrule movable relative to said holder, adjustment means being interposed between the holder and the ferrule to enable adjustment of position of a tip of the optical fiber relative to the mechanical oscillator. 14. A device according to claim 12 , wherein said optical fiber is run to the mechanical oscillator through a vacuum feedthrough for feeding vacuum to said vacuum chamber, said vacuum feedthrough being formed through said containing structure. 15. A device according to claim 12 , wherein said containing structure is configured to be placed at least partially in thermal contact with a cooling bath to cool the device to a temperature not more than a superconductor critical temperature. 16. Apparatus for sensing a magnetic field, said apparatus comprising a plurality of channels wherein each of said channels comprises a device according to claim 12 .
SQUIDS · CPC title
comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor · CPC title
comprising microelectromechanical systems [MEMS] (MEMS devices in general B81B) · CPC title
with application of magnetostriction · CPC title
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