Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices

Patent metadata

Field	Value
Publication number	US-11397226-B2
Application number	US-202017008228-A
Country	US
Kind code	B2
Filing date	Aug 31, 2020
Priority date	Jan 19, 2018
Publication date	Jul 26, 2022
Grant date	Jul 26, 2022

Abstract

A scanning ferromagnetic resonance (FMR) measurement system is disclosed with a radio frequency (RF) probe and one or two magnetic poles mounted on a holder plate and enable a perpendicular-to-plane or in-plane magnetic field, respectively, at test locations. While the RF probe tip contacts a magnetic film on a whole wafer under test (WUT), a plurality of microwave frequencies (fR) is sequentially transmitted through the probe tip. Simultaneously, a magnetic field (HR) is applied to the contacted region thereby causing a FMR condition in the magnetic film for each pair of (HR, fR) values. RF output signals are transmitted through or reflected from the magnetic film to a RF diode and converted to voltage signals which a controller uses to determine effective anisotropy field, linewidth, damping coefficient, and/or inhomogeneous broadening for a sub-mm area. The WUT is moved to preprogrammed locations to enable multiple FMR measurements at each test location.

First claim

What is claimed is:

1. A scanning ferromagnetic resonance (FMR) measurement system for determining magnetic properties in a magnetic film or in a plurality of device structures that are formed on a wafer under test (WUT), comprising:
a RF probe linked to a microwave (RF) generator and having at least a probe tip wherein at least one signal pathway contacts the magnetic film or plurality of device structures during a FMR measurement;
a magnetic assembly comprised of at least one magnetic field source that provides a magnetic field proximate to the RF probe tip which together with a simultaneous application of a microwave frequency from the RF generator is configured to induce a first FMR condition in the magnetic film or plurality of device structures;
a detection system for monitoring microwave absorbance and a corresponding power loss by the magnetic film or plurality of device structures when the first FMR condition therein is established wherein the WUT is configured to move laterally and vertically relative to the RF probe such that the probe tip contacts the magnetic film or plurality of devices at one or more predetermined locations during a FMR measurement sequence; and
a controller to manage the simultaneous application of the microwave frequency and magnetic field, the WUT movement, and to receive a signal from the detection system, wherein the signal is converted to an output comprised of one or more magnetic properties.

2. The scanning FMR measurement system of claim 1 wherein the RF probe and magnetic assembly are attached to a holder plate, and are held stationary while the WUT is moved during the FMR measurement sequence.

3. The scanning FMR measurement system of claim 1 wherein the RF probe and magnetic assembly are attached to a holder plate, and are moved while the WUT is stationary during the FMR measurement sequence.

4. The scanning FMR measurement system of claim 1 that is configured in a transmission mode wherein a RF input signal from the RF generator passes through a first signal pathway in the RF probe tip to the magnetic film or plurality of magnetic devices, and a second signal pathway in the RF probe transmits a RF output signal from the magnetic film or plurality of magnetic devices to a RF diode in the detection system.

5. The scanning FMR measurement system of claim 1 that is configured in a reflectance mode wherein a RF input signal from the RF generator passes through a first signal pathway in the RF probe to the magnetic film or plurality of magnetic devices, and the first signal pathway also transmits a RF output signal from the magnetic film or plurality of magnetic devices to a RF diode in the detection system.

6. The scanning FMR measurement system of claim 1 wherein the detection system comprises a RF diode that converts the RF output signal to a voltage signal, and an analog-to-digital converter between the RF diode and the controller.

7. The scanning FMR measurement system of claim 1 wherein the magnetic assembly has a single magnetic pole that is aligned above the RF probe tip, and applies the magnetic field in a perpendicular-to-plane direction at each of the one or more predetermined locations during the FMR measurement sequence.

8. The scanning FMR measurement system of claim 7 wherein the applied microwave frequency is in a range of 1 to 100 GHz.

9. The scanning FMR measurement system of claim 1 wherein the magnetic assembly has two magnetic poles that are positioned on opposite sides of the RF probe tip, and apply the magnetic field in an in-plane direction at each of the one or more predetermined locations during the FMR measurement sequence.

10. The scanning FMR measurement system of claim 9 wherein the applied microwave frequency is in a range of 0.01 to 100 GHz.

11. The scanning FMR measurement system of claim 5 further comprised of a directional coupler that directs the RF input signal to the RF probe, and is employed to isolate the RF output signal from the RF probe, which is transmitted to the RF diode and then to the controller.

12. The scanning FMR measurement system of claim 1 wherein the RF probe and magnetic assembly are installed in an electrical probe station.

13. The scanning FMR measurement system of claim 1 wherein the controller is programmed to repeat the simultaneous application of a microwave frequency and a magnetic field at each of the one or more predetermined locations thereby inducing at least a second FMR condition, wherein at least one of the microwave frequency and magnetic field is different from the microwave frequency and magnetic field used to induce the first FMR condition.

14. A system comprising:
a probe configured to apply one or more microwave frequency values to one or more locations on a magnetic material;
a magnetic field source configured to apply one or more magnetic field values to the one or more locations on the magnetic material which together with the application of the one or more microwave frequency values from the probe establishes one or more ferromagnetic resonance conditions at the one or more locations on the magnetic material thereby resulting in a RF output signal for each pair of an applied microwave frequency value and an applied magnetic field value;
a RF diode configured to receive RF output signals and convert each RF output signal to a voltage signal; and
a controller configured to receive each voltage signal from the RF diode and determine one or more properties of the magnetic material based on each received voltage signal.

15. The system of claim 14 , wherein the magnetic field source includes a magnetic pole that is aligned above a tip of the probe and is configured to apply the one or more magnetic fields in a perpendicular-to-plane direction at each of the one or more locations on the magnetic material.

16. The system of claim 14 , wherein the magnetic field source includes at least two magnetic poles that are positioned on opposite sides of a tip of the probe and are configured to apply the one or more magnetic fields in an in-plane direction at each of the one or more locations on the magnetic material.

17. The system of claim 14 , wherein the one or more microwave frequency values are in a range of about 0.01 to about 100 GHz, and wherein the magnitude of the one or more magnetic field values is up to 3 Tesla.

18. A system comprising:
a RF probe configured to apply one or more microwave frequencies to one or more locations on a magnetic material;
a magnetic field source configured to provide a magnetic field proximate to the RF probe which together with an application of a microwave frequency from the RF probe is configured to induce a first ferromagnetic resonance condition in the magnetic material;
a detection system for monitoring microwave absorbance and a corresponding power loss by the magnetic material when the first FMR condition therein is established and thereby output a voltage signal based on the microwave absorbance and the corresponding power loss by the magnetic material when the first FMR condition therein is established; and
a controller configured to manage the application of the microwave frequency and magnetic field and to receive the voltage signal from the detection system, the controller further configured to determine one or more properties of the magnetic material based on the received voltage signal.

19. The system of claim 18 , wherein the detection system includes a Schottky diode.

20. The system of claim 18 , wherein the magnetic field source has two magnetic pol

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Jan Guenole
• Le Son
• Thomas Luc
• Guisan Santiago Serrano

Classifications

• G01R33/60

  using electron paramagnetic resonance (G01R33/24, G01R33/62 take precedence) · CPC title

• G01N24/10 Primary

  by using electron paramagnetic resonance (G01N24/12 takes precedence) · CPC title

• G01N24/00

  Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects · CPC title

• G01R33/24 Primary

  for measuring direction or magnitude of magnetic fields or magnetic flux · CPC title