Methods for depositing coatings on aerospace components

Patent metadata

Field	Value
Publication number	US-11384648-B2
Application number	US-202016843358-A
Country	US
Kind code	B2
Filing date	Apr 8, 2020
Priority date	Mar 19, 2018
Publication date	Jul 12, 2022
Grant date	Jul 12, 2022

Abstract

Protective coatings on an aerospace component are provided. An aerospace component includes a surface containing nickel, nickel superalloy, aluminum, chromium, iron, titanium, hafnium, alloys thereof, or any combination thereof, and a coating disposed on the surface, where the coating contains a nanolaminate film stack having two or more pairs of a first deposited layer and a second deposited layer. The first deposited layer contains chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof, the second deposited layer contains aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof, and the first deposited layer and the second deposited layer have different compositions from each other.

First claim

What is claimed is:

1. An aerospace component, comprising:
a surface comprising nickel, nickel superalloy, aluminum, chromium, iron, titanium, hafnium, alloys thereof, or any combination thereof; and
a coating disposed on the surface, wherein the coating comprises a nanolaminate film stack comprising two or more pairs of a first deposited layer and a second deposited layer;
wherein the first deposited layer comprises chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof;
wherein the second deposited layer comprises aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof;
wherein the first deposited layer and the second deposited layer have different compositions from each other; and
wherein the nanolaminate film stack has a thickness of about 1 nm to about 5,000 nm.

2. The aerospace component of claim 1 , wherein the coating is a coalesced film disposed on the surface, the coalesced film is formed by annealing the nanolaminate film stack.

3. The aerospace component of claim 1 , wherein the nanolaminate film stack comprises from 3 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer.

4. The aerospace component of claim 1 , wherein the coating has a uniformity of less than 50% of the thickness of the coating.

5. The aerospace component of claim 4 , wherein the coating has a uniformity of about 1% to about 30%.

6. The aerospace component of claim 1 , wherein the surface of the aerospace component is an interior surface within a cavity of the aerospace component.

7. The aerospace component of claim 6 , wherein the cavity has an aspect ratio of greater than 2.

8. The aerospace component of claim 7 , wherein the cavity has an aspect ratio of greater than 5 to 1,000.

9. The aerospace component of claim 1 , wherein the aerospace component is a turbine blade, a turbine vane, a support member, a frame, a rib, a fin, a pin fin, a combustor fuel nozzle, a combustor shield, an internal cooling channel, or any combination thereof.

10. The aerospace component of claim 9 , wherein the aerospace component is a turbine blade.

11. The aerospace component of claim 1 , wherein the surface of the aerospace component comprises nickel or a nickel superalloy.

12. The aerospace component of claim 1 , wherein each of the first deposited layer and the second deposited layer independently has a thickness of about 0.1 nm to about 150 nm.

13. The aerospace component of claim 1 , wherein the first deposited layer comprises aluminum oxide and the second deposited layer comprises hafnium oxide, and wherein a concentration of hafnium is about 0.01 at % to about 10 at % within the nanolaminate film stack.

14. The aerospace component of claim 1 , wherein the nanolaminate film stack has a thickness of about 1 nm to about 5,000 nm.

15. An aerospace component, comprising:
a surface comprising nickel or nickel superalloy; and
a coating disposed on the surface, wherein the coating comprises a coalesced film formed by annealing a nanolaminate film stack which comprises two or more alternating layers of a first deposited layer and a second deposited layer;
wherein the first deposited layer comprises chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof;
wherein the second deposited layer comprises aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof;
wherein the first deposited layer and the second deposited layer have different compositions from each other; and
wherein the nanolaminate film stack has a thickness of about 1 nm to about 5,000 nm.

16. The aerospace component of claim 15 , wherein the nanolaminate film stack comprises from 3 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer.

17. The aerospace component of claim 15 , wherein the coating has a uniformity of less than 50% of the thickness of the coating.

18. The aerospace component of claim 15 , wherein the surface of the aerospace component is an interior surface within a cavity of the aerospace component, and wherein the cavity has an aspect ratio of greater than 2.

19. The aerospace component of claim 18 , wherein the cavity has an aspect ratio of greater than 5 to 1,000.

20. A turbine blade, comprising:
a surface comprising nickel or nickel superalloy; and
a coating disposed on the surface, wherein the coating comprises a coalesced film formed by annealing a nanolaminate film stack which comprises two or more alternating layers of a first deposited layer and a second deposited layer;
wherein the first deposited layer comprises chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof;
wherein the second deposited layer comprises aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof;
wherein the first deposited layer and the second deposited layer have different compositions from each other; and
wherein the nanolaminate film stack has a thickness of about 1 nm to about 5,000 nm.

Assignees

• Applied Materials Inc

Inventors

• Melnik Yuriy
• Chatterjee Sukti
• Gangakhedkar Kaushal
• Frankel Jonathan
• Scudder Lance A
• Narwankar Pravin K
• Britz David Alexander
• Knisley Thomas
• Saly Mark
• Thompson David

Classifications

• C23C16/045

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• F01D25/007

  Preventing corrosion · CPC title

• C23C16/405

  of refractory metals or yttrium · CPC title

• F05D2300/228

  Nitrides · CPC title

• C23C16/45555

  applied in non-semiconductor technology · CPC title