Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-11380562-B2
Application number	US-202016879178-A
Country	US
Kind code	B2
Filing date	May 20, 2020
Priority date	Jun 18, 2015
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A substrate processing apparatus includes a substrate holder, a rotating mechanism, a processing liquid discharge unit, and a gas discharge unit. The processing liquid discharge unit discharges a liquid flow of a processing liquid such that the liquid flow comes into contact with a landing position in a rotation path of a peripheral portion of an upper surface of the substrate being rotated. The gas discharge unit discharges a first gas flow of an inert gas from above toward a first position upstream from the landing position in a direction of rotation of the substrate in the rotation path, and discharges a second gas flow of the inert gas from above toward a second position upstream from the first position in the direction of rotation of the substrate in the rotation path. The kinetic energy of the second gas flow is lower than the kinetic energy of the first gas flow.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a substrate holder rotatably disposed about a predetermined rotation axis and holding a substrate substantially horizontally;
a rotating mechanism that rotates said substrate holder about said rotation axis;
a chemical solution discharge nozzle that discharges a chemical solution such that said chemical solution comes into contact with a first position in a first rotation path of a peripheral portion of a to-be-processed surface of said substrate; and
a rinse liquid discharge nozzle that discharges a rinse liquid such that said rinse liquid comes into contact with a second position in a second rotation path of a peripheral portion of a to-be-protected surface of said substrate opposite to the to-be-processed surface,
wherein said second position is a position upstream from said first position in a direction of rotation of said substrate.

2. The substrate processing apparatus according to claim 1 , further comprising a gas discharge nozzle for to-be-processed surface that discharges an inert gas such that said inert gas comes into contact with a third position in said first rotation path,
wherein said third position is located between said first position and said second position along a periphery of said substrate.

3. The substrate processing apparatus according to claim 1 , further comprising a gas discharge nozzle for to-be-protected surface that discharges an inert gas such that said inert gas comes into contact with a fourth position in said second rotation path,
wherein said fourth position is located adjacent to said second position upstream from said second position in the direction of rotation of said substrate.

4. The substrate processing apparatus according to claim 1 , further comprising a heater annularly disposed along the peripheral portion of said to-be-protected surface of said substrate and including an opposed surface opposed to said to-be-protected surface in a contactless manner, said heater heating the peripheral portion of said substrate,
wherein
said heater includes a recess including an opposed-surface opening, said opposed-surface opening being opposed to a portion adjacent to said second position in said second rotation path of said substrate and being open to said opposed surface,
at least an outlet portion of said rinse liquid discharge nozzle is accommodated in said recess, and
an outlet of said rinse liquid discharge nozzle is disposed in said opposed-surface opening when said recess is viewed from said opposed-surface opening side.

5. The substrate processing apparatus according to claim 4 , wherein said recess of said heater passes through said heater vertically.

6. The substrate processing apparatus according to claim 4 , wherein
said recess of said heater further includes an outer-peripheral-surface opening open to an outer peripheral surface of said heater, and
said opposed-surface opening and said outer-peripheral-surface opening are continuous with each other.

7. The substrate processing apparatus according to claim 5 , wherein
said recess of said heater further includes an outer-peripheral-surface opening open to an outer peripheral surface of said heater and an opening open to an opposite surface opposed said opposite surface, and
said opening open to said opposite surface, said outer-peripheral-surface opening, and said opposed-surface opening are sequentially continuous with each other.

Assignees

• Screen Holdings Co Ltd

Inventors

• Takeaki Rei
• Ando Koji
• Maegawa Tadashi
• YASUTAKE Yosuke

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P70/54

  Cleaning of wafer edges · CPC title