Selective deposition of silicon nitride

Patent metadata

Field	Value
Publication number	US-11380539-B2
Application number	US-202016789106-A
Country	US
Kind code	B2
Filing date	Feb 12, 2020
Priority date	Feb 14, 2019
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

Certain embodiments of the invention utilize low temperature atomic layer deposition methodology to form material containing silicon and nitrogen (e.g., silicon nitride). The atomic layer deposition uses silicon tetraiodide (SiI4) or disilicon hexaiodide (Si2I6) as one precursor and uses a nitrogen-containing material such as ammonia as another precursor. In circumstances where a selective deposition of silicon nitride is desired to be deposited over silicon dioxide, the substrate surface is first treated with ammonia plasma.

First claim

The invention claimed is:

1. A process for selectively depositing silicon nitride on a microelectronic device substrate having a plurality of surfaces of differing composition, which comprises contacting said substrate with sequentially pulsed silicon tetraiodide or disilicon hexaiodide, and nitrogen-containing co-reactants, at a temperature of about 150° C. to about 400° C., and at a pressure below about 15 Torr, under atomic layer deposition conditions, wherein the Si source is heated above the melting point and vaporized with a carrier gas.

2. The process of claim 1 , wherein the temperature is about 175° C. to about 350° C.

3. The process of claim 1 , wherein the temperature is about 200° C. to about 250° C.

4. The process of claim 1 , further comprising the step of pre-treating said substrate with ammonia plasma, and wherein the surface to be deposited thereon is chosen from silicon dioxide, germanium dioxide, SiCO, and low-k substrates.

5. The process of claim 4 , wherein said device substrate comprises some surfaces chosen from silicon nitride, silicon dioxide, germanium dioxide, SiCO, and low-k substrates which have enhanced deposition of silicon nitride compared to other surfaces on the same substrate chosen from titanium nitride, tantalum nitride, aluminum nitride, hafnium oxide, zirconium oxide, and aluminum oxide, and combinations thereof.

6. The process of claim 4 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one aluminum oxide surface, whereby said silicon nitride is selectively deposited on said at least one silicon dioxide surface.

7. The process of claim 4 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one zirconium dioxide surface, whereby said silicon nitride is selectively deposited on said at least one silicon dioxide surface.

8. The process of claim 4 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one hafnium dioxide surface, whereby said silicon nitride is selectively deposited on said at least one silicon dioxide surface.

9. The process of claim 1 , wherein the temperature is from about 200° C. to about 250° C., and the substrate to be deposited thereon is other than silicon dioxide.

10. The process of claim 1 , wherein said device substrate comprises some surfaces chosen from silicon nitride, titanium nitride, tantalum nitride, and aluminum nitride, hafnium oxide, zirconium oxide, aluminum oxide and combinations thereof, which have enhanced deposition of silicon nitride compared to other surfaces on the same substrate chosen from silicon dioxide, germanium dioxide, SiCO, and low-k substrates which have suppressed deposition of Silicon nitride.

11. The process of claim 1 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one aluminum oxide surface, whereby said silicon nitride is selectively deposited on said at least one aluminum oxide surface.

12. The process of claim 1 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one zirconium dioxide surface, whereby said silicon nitride is selectively deposited on said at least one zirconium dioxide surface.

13. The process of claim 1 , wherein the nitrogen-containing precursor compound is chosen from ammonia, dimethyl hydrazine, t-butyl hydrazine, methylhydrazine, or a mixture thereof.

14. The process of claim 1 , wherein the Si source is heated for vaporization in a ProE-Vap ampoule.

15. A process for selectively depositing silicon nitride on a microelectronic device substrate having a plurality of surfaces of differing composition, which comprises contacting said substrate with sequentially pulsed silicon tetraiodide or disilicon hexaiodide, and nitrogen-containing co-reactants, at a temperature of about 150° C. to about 400° C., and at a pressure below about 15 Torr, under atomic layer deposition conditions and further comprising the step of pre-treating said substrate with ammonia plasma, and wherein the surface to be deposited thereon is chosen from silicon dioxide, germanium dioxide, SiCO, and low-k substrates.

16. The process of claim 15 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one aluminum oxide surface, whereby said silicon nitride is selectively deposited on said at least one silicon dioxide surface.

17. The process of claim 15 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one zirconium dioxide surface, whereby said silicon nitride is selectively deposited on said at least one silicon dioxide surface.

18. The process of claim 15 , wherein said device substrate is comprised of at least one silicon dioxide surface and at least one hafnium dioxide surface, whereby said silicon nitride is selectively deposited on said at least one silicon dioxide surface.

19. A process for selectively depositing silicon nitride on a microelectronic device substrate having a plurality of surfaces of differing composition, which comprises contacting said substrate with sequentially pulsed silicon tetraiodide or disilicon hexaiodide, and nitrogen-containing co-reactants, at a temperature of about 150° C. to about 400° C., and at a pressure below about 15 Torr, under atomic layer deposition conditions, wherein said device substrate comprises some surfaces chosen from silicon nitride, titanium nitride, tantalum nitride, and aluminum nitride, hafnium oxide, zirconium oxide, aluminum oxide and combinations thereof, which have enhanced deposition of silicon nitride compared to other surfaces on the same substrate chosen from silicon dioxide, germanium dioxide, SiCO, and low-k substrates which have suppressed deposition of silicon nitride.

Assignees

• Entegris Inc

Inventors

• Wang Han
• Hendrix Bryan C
• Condo Eric
• Baum Thomas H

Classifications

• H10P14/6681

  the precursor containing a compound comprising Si · CPC title

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/668

  the materials being characterised by the deposition precursor materials · CPC title

• H10P14/69433 Primary

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/6514

  by exposure to a plasma · CPC title