Addressable vertical nanowire probe arrays and fabrication methods

Patent metadata

Field	Value
Publication number	US-11363979-B2
Application number	US-201716069783-A
Country	US
Kind code	B2
Filing date	Jan 19, 2017
Priority date	Jan 19, 2016
Publication date	Jun 21, 2022
Grant date	Jun 21, 2022

Abstract

A nanowire probe sensor array including a substrate with a metal pattern thereon. An array of semiconductor vertical nanowire probes extends away from the substrate, and at least some of probes, and preferably all, are individually electrically addressed through the metal pattern. The metal pattern is insulated with dielectric, and base and stem portions of the nanowires are also preferably insulated. A fabrication process patterns metal connections on a substrate. A semiconductor substrate is bonded to the metal pattern. The semiconductor substrate is etched to form the neural nanowire probes that are bonded to the metal pattern. Dielectric is then deposited to insulate the metal pattern.

First claim

The invention claimed is:

1. A neural probe sensor array comprising:
a substrate;
a metal pattern comprising a plurality of electrically isolated metal contacts disposed on the substrate;
a plurality of semiconductor vertical nanowire probes, wherein each of the plurality of semiconductor vertical nanowire probes are disposed on a corresponding electrically isolated metal contact of the plurality of electrically isolated metal contacts; and
a dielectric coating covering the metal pattern and lower portions of the plurality of semiconductor vertical nanowire probes while leaving tip portions of the vertical nanowire probes exposed such that each of the plurality of semiconductor vertical nanowire probes is individually electrically addressable.

2. The neural probe sensor array of claim 1 , wherein said plurality of semiconductor vertical nanowire probes each have a diameter of about 10 nm-200 nm, and a height of about 5 μm -10 μm.

3. The neural probe sensor array of claim 2 , wherein said dielectric coating covers base and stem portions of each of said plurality of semiconductor vertical nanowire probes leaving the tip portions exposed, and the tip portions are approximately ⅓ the length of said plurality of semiconductor vertical nanowire probes.

4. The neural probe sensor array of claim 1 , wherein the tip portions are formed from a metal.

5. The neural probe sensor array of claim 1 , comprising a semiconductor-metal alloy interfacing said plurality of semiconductor vertical nanowire probes to said plurality of electrically isolated metal contacts of said metal pattern.

6. The neural probe sensor array of claim 1 , wherein said electrically isolated metal contacts are connected to corresponding individual metal leads extending from the individual electrically isolated metal contacts, and corresponding peripheral metal pads for connection to a measurement circuit.

7. The neural probe sensor array of claim 1 , wherein the center-to-center distance between individual ones of said plurality of semiconductor vertical nanowire probes is in a range of less than one micron to tens of microns.

8. The neural probe sensor array of claim 7 , wherein the center-to-center distance is about 750 nm.

9. The neural probe sensor array of claim 1 , wherein said plurality of semiconductor vertical nanowire probes have a packing density of 6.25Million/cm2 at a pitch of 4 μm.

10. The neural probe sensor array of claim 1 , wherein said plurality of semiconductor vertical nanowire probes comprises tens to thousands of individual semiconductor vertical nanowire probes all isolated from each other.

11. The neural probe sensor array of claim 1 , wherein said plurality of semiconductor vertical nanowire probes are arranged in one of a linear pattern, a rectangular pattern, or a network pattern.

12. The neural probe sensor array of claim 1 , wherein said substrate comprises one of glass, sapphire, an integrated circuit and SiO2/Si.

13. The neural probe sensor array of claim 1 , wherein said plurality of semiconductor vertical nanowire probes consist of crystalline Si.

14. The neural probe sensor array of claim 1 , further comprising packaging for sealing fluid and cells into contact with the sensor array.

15. The neural probe sensor array of claim 1 , wherein said plurality of semiconductor vertical nanowire probes comprises at least hundreds of individual semiconductor vertical nanowire probes all isolated from each other.

16. The neural probe sensor array of claim 15 , wherein said plurality of semiconductor vertical nanowire probes comprises at least thousands of individual semiconductor vertical nanowire probes all isolated from each other.

17. The neural probe sensor array of claim 16 , wherein said plurality of semiconductor vertical nanowire probes comprises at least tens of thousands of individual semiconductor vertical nanowire probes all isolated from each other.

18. The neural probe sensor array of claim 11 , wherein said plurality of semiconductor vertical nanowire probes are arranged in a rectangular pattern.

19. The neural probe sensor array of claim 11 , wherein said plurality of semiconductor vertical nanowire probes are arranged in a network pattern.

20. The neural probe sensor array of claim 1 , wherein said substrate comprises an integrated circuit.

Assignees

• Univ California

Inventors

• Dayeh Shadi A
• Chen Renjie
• Lee Sang Heon
• Liu Ren
• Ro Yun Goo
• Tanaka Atsunori
• Hwang Yoontae

Classifications

• A61B5/388

  Nerve conduction study, e.g. detecting action potential of peripheral nerves · CPC title

• B81C1/00111 Primary

  Tips, pillars, i.e. raised structures (microneedles A61M37/0015) · CPC title

• B81C2201/016

  Passivation · CPC title

• A61B2562/0209

  Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053 · CPC title

• B82Y15/00

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title