Process for preparing organotin compounds

Patent metadata

Field	Value
Publication number	US-11358975-B2
Application number	US-202117366470-A
Country	US
Kind code	B2
Filing date	Jul 2, 2021
Priority date	Jul 3, 2020
Publication date	Jun 14, 2022
Grant date	Jun 14, 2022

Abstract

Provided is an efficient and effective process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides the organotin compounds in a highly pure crystalline form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.

First claim

What is claimed is:

1. A process for preparing a monoalkyl tris(dialkylamido) tin compound of Formula (I):

wherein each R is the same or different and is a C 1 -C 4 alkyl group and R 1 is a substituted or unsubstituted saturated or unsaturated linear, branched, or cyclic C 1 -C 5 group; wherein the process comprises:
contacting a compound of Formula (A)

with a compound of Formula R 1 —X, wherein X is bromo, iodo, or chloro.

2. The process of claim 1 , wherein each R is independently a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, or sec-butyl group.

3. The process of claim 1 , wherein each R is a methyl group.

4. The process of claim 1 , wherein R 1 is a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, sec-butyl, n-pentyl, iso-pentyl, or neopentyl group.

5. The process of claim 1 , wherein R 1 is a cyclic C 1 -C 5 group.

6. The process of claim 1 , wherein R 1 is a vinyl group or an acetylenyl group.

7. The process of claim 1 , wherein R 1 is substituted with one or more halogen groups.

8. The process of claim 1 , wherein R 1 is an alkylether group.

9. The process of claim 1 , wherein each R is a methyl group and R 1 is an isopropyl group.

10. The process of claim 1 , wherein X is iodo.

11. The process of claim 1 , wherein the process is conducted in a non-polar aprotic solvent.

12. The process of claim 1 , wherein the process further comprises preparing the compound of Formula (A) by reacting tin(II) chloride with a compound of Formula M-N(R) 2 , wherein M is sodium, lithium, and potassium.

13. The process of claim 12 , wherein the compound of Formula M-N(R) 2 is Li—N(CH 3 ) 2 .

14. The process of claim 12 , wherein the process is conducted in one reaction vessel.

15. A compound of the Formula (II):

wherein each R is the same or different and is a C 1 -C 4 alkyl group and X is iodo, bromo, and chloro, provided that wherein X is chloro, R is other than a methyl group.

16. The compound of claim 15 , wherein each R is the same or different and is a C 1 -C 4 alkyl and X is iodo and bromo.

17. The compound of claim 15 , wherein each R is a methyl group and X is iodo.

18. The compound of claim 17 in crystalline form and having the structure as set forth in FIG. 1 .

Assignees

• Entegris Inc

Inventors

• Ermert David M
• Cameron Thomas M
• Kuiper David
• Baum Thomas H

Classifications

• C07B2200/13

  Crystalline forms, e.g. polymorphs · CPC title

• C07F7/2284 Primary

  Compounds with one or more Sn-N linkages · CPC title