Sensor for electron detection

Patent metadata

Field	Value
Publication number	US-11355309-B2
Application number	US-201917265187-A
Country	US
Kind code	B2
Filing date	Aug 1, 2019
Priority date	Aug 2, 2018
Publication date	Jun 7, 2022
Grant date	Jun 7, 2022

Abstract

The present invention relates to a sensor for electron detection emitted from an object to be used with a charged particle beam column being operated at a certain column and wafer voltage. The sensor is configured and operable to at least reduce interaction of negative ions with the active area of the sensor while minimizing electrons energy loss. The sensor is also configured and operable to minimize both gradual degradation of a cathodoluminescence efficiency of the active area and dynamic change of cathodoluminescence generated during operation of the sensor and evolving throughout the scintillator's lifetime.

First claim

What is claimed is:

1. A sensor for electron detection emitted from an object; said sensor comprising:
a scintillator structure having an active area and a certain lifetime; said scintillator structure comprising a fast scintillator material being configured and operable to emit photons at a certain wavelength range by cathodoluminescence and upon impact of electrons at a certain impact energy; and
a coating structure interfacing said scintillator structure and being exposed to the electrons emitted from the object; said coating structure being configured and operable to maintain a uniform potential across the interface between the active area and the coating structure; wherein said coating structure has a certain material composition being selected to reflect back photons emitted by the active area towards said active area and a certain thickness being selected to at least reduce interaction of negative ions with said active area while minimizing electrons energy loss when impacting with the coating structure.

2. The sensor of claim 1 , wherein said scintillator structure comprises a semiconductor III-V multiple quantum wells structure.

3. The sensor of claim 1 , wherein, said sensor is used with a charged particle beam column being operated at a certain column and wafer voltage, and the certain thickness is determined by energy at which the negative ions interact with said active area according to the certain column and wafer voltage.

4. The sensor of claim 3 , wherein the thickness is selected according to the type of negative ions damaging said active area.

5. The sensor of claim 1 , wherein said coating structure has a thickness of at least 200 nm.

6. The sensor of claim 1 , wherein the certain material composition comprises a conductive material such that said coating structure is configured and operable as an electrode applying an electrical potential to accelerate secondary and back scattered electrons towards said sensor.

7. The sensor of claim 1 , wherein said coating structure comprises a multi-coating structure having different physical and chemical properties along its depth.

8. The sensor of claim 7 , wherein said multi-coating structure comprises at least two different coating materials have different reflection coefficients at the certain wavelength range of the emitted photons.

9. The sensor of claim 7 , wherein said multi-coating structure is made of at least two layers.

10. The sensor of claim 9 , wherein said two layers have different thicknesses.

11. The sensor of claim 7 , wherein said multi-coating structure comprises a first reflective material interfacing said active area, and a second reflective material interfacing an electron emission from the object; said first reflective material having a reflection coefficient lower than the second reflective material.

12. The sensor of claim 11 , wherein said first reflective material interfacing said active area is selected to enable good Ohmic contact to mitigate the effect of at least one of surface states, defects and electronic traps.

13. The sensor of claim 7 , wherein said multi-coating structure has a certain material composition and a certain thickness being selected to minimize both gradual degradation of a cathodoluminescence efficiency of said active area and a dynamic change of cathodoluminescence generated during operation of the sensor and evolving throughout the scintillator's lifetime.

14. The sensor of claim 7 , wherein said multi-coating structure comprises at least a first reflective material and a second reflective material, wherein the first reflective material has a thickness between 3 nanometers (nm) and 20 nm.

15. The sensor of claim 14 , wherein the first reflective material and the second reflective material are metallic.

Assignees

• Applied Materials Israel Ltd

Inventors

• Assulin Itay
• Levin Jacob
• Eytan Guy

Classifications

• H10H20/851

  Wavelength conversion means · CPC title

• H10H20/8512

  Wavelength conversion materials · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J2237/2443

  Scintillation detectors · CPC title

• H01J2237/2803

  characterised by the imaging method · CPC title