Quasi-single-crystal film and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11346019-B2
Application number	US-202016939566-A
Country	US
Kind code	B2
Filing date	Jul 27, 2020
Priority date	Jul 30, 2019
Publication date	May 31, 2022
Grant date	May 31, 2022

Abstract

A quasi-single-crystal film and its manufacturing method thereof are provided, in which a metal film having a preferred orientation of <111> on its surface is subjected to a mechanical stretching force, such that the crystal grains thereof are able to form in a much more orderly arrangement, and a quasi-single-crystal film having preferred orientations on three axes can be obtained. The proposed quasi-single-crystal film has preferred orientations of <211> and <110> on its stretching direction and a direction that is perpendicular to the stretching direction, respectively, and retains a preferred orientation of <111> on its surface. By employing the present invention, it is advantageous of manufacturing large-area quasi single crystal films having high anisotropy as well as growing two dimensional materials or developing of other anisotropic feature structures.

First claim

What is claimed is:

1. A quasi-single-crystal film, comprising a plurality of crystal grains which are arranged closely, wherein said crystal grains on more than 50 percent of an area of a surface of said quasi-single-crystal film have a preferred orientation of <111>, and after a mechanical stretching force is applied to a nano-twins copper film along a stretching direction such that the nano-twins copper film is plastically deformed to obtain said quasi-single-crystal film, said crystal grains on more than 50 percent of an area of said quasi-single-crystal film have a preferred orientation of <211> along said stretching direction, said crystal grains on more than 50 percent of an area of said quasi-single-crystal film have a preferred orientation of <110> along a direction that is perpendicular to said stretching direction, and said crystal grains on more than 50 percent of an area of a surface of said quasi-single-crystal film still have a preferred orientation of <111>.

2. The quasi-single-crystal film according to claim 1 , wherein said crystal grains have a diameter of 1 to 5000 μm.

3. The quasi-single-crystal film according to claim 1 , wherein said surface is a (111) crystal plane.

4. The quasi-single-crystal film according to claim 1 , wherein said quasi-single-crystal film comprises a plurality of columnar crystal structures.

5. The quasi-single-crystal film according to claim 1 , wherein said quasi-single-crystal film is a single layer structure or a multilayer composite structure.

6. The quasi-single-crystal film according to claim 5 , wherein a cover layer is additionally formed upon at least one surface of said multilayer composite structure.

7. A manufacturing method for fabricating a quasi-single-crystal film, comprising:
providing a metal film, comprising a plurality of crystal grains which are arranged closely, wherein said crystal grains on more than 50 percent of an area of a surface of said metal film have a preferred orientation of <111>; and
applying a mechanical stretching force to said metal film along a stretching direction, such that said metal film is plastically deformed to obtain a quasi-single-crystal film, wherein said crystal grains on more than 50 percent of said area of said quasi-single-crystal film have a preferred orientation of <211> along said stretching direction, and said crystal grains on more than 50 percent of said area of said quasi-single-crystal film have a preferred orientation of <110> along a direction that is perpendicular to said stretching direction.

8. The manufacturing method for fabricating a quasi-single-crystal film according to claim 7 , wherein said crystal grains of said quasi-single-crystal film have a diameter of 1 to 5000 μm.

9. The manufacturing method for fabricating a quasi-single-crystal film according to claim 7 , wherein said surface is a (111) crystal plane.

10. The manufacturing method for fabricating a quasi-single-crystal film according to claim 7 , wherein said metal film comprises a plurality of columnar crystal structures.

11. The manufacturing method for fabricating a quasi-single-crystal film according to claim 7 , wherein a material of said metal film is selected from a group consisting of silver, copper, nickel, aluminum, palladium and magnesium.

12. The manufacturing method for fabricating a quasi-single-crystal film according to claim 7 , wherein said mechanical stretching force is applied to make said metal film generate more than 10% plastic deformation.

Assignees

• Univ National Chiao Tung

Inventors

• Chen Chih
• Li yu-jin

Classifications

• C30B29/68

  Crystals with laminate structure, e.g. "superlattices" · CPC title

• C30B1/00

  Single-crystal growth directly from the solid state (unidirectional demixing of eutectoid materials C30B3/00; under a protective fluid C30B27/00) · CPC title

• C30B29/66 Primary

  Crystals of complex geometrical shape, e.g. tubes, cylinders · CPC title

• C30B29/02

  Elements · CPC title

• C22F1/00

  Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working (apparatus for mechanical working of metal B21, B23, B24) · CPC title