Method of producing periodic polarization inversion structures

Patent metadata

Field	Value
Publication number	US-11332849-B2
Application number	US-201916366292-A
Country	US
Kind code	B2
Filing date	Mar 27, 2019
Priority date	Oct 10, 2017
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

A method of producing periodic polarization inversion structures requires the provision of first electrode piece part-arrays, each having electrode piece parts on a first main face of a ferroelectric crystal substrate. A voltage is applied on the first electrode piece part-arrays to form first periodic polarization inversion structures. Second electrode piece part-arrays are provided, each having electrode piece parts between the adjacent plural first periodic polarization inversion structures. A voltage is applied on the second electrode piece part-arrays to form second polarization inversion structures.

First claim

The invention claimed is:

1. A method of producing periodic polarization inversion structures in a ferroelectric crystal substrate having a first main face, a second main face, a first side face and a second side face opposing said first side face in a lengthwise direction, the method comprising the steps of:
providing first electrode piece part-arrays each comprising a plurality of electrode piece parts on said first main face of said ferroelectric crystal substrate;
forming first periodic polarization inversion structures by applying a voltage on said first electrode piece part-arrays, each of said first periodic polarization structures including a first end nearest to said first side face and a second end nearest to said second side face;
providing second electrode piece part-arrays each comprising a plurality of electrode piece parts, each of said second electrode piece part-arrays being present between said first periodic polarization inversion structures adjacent to each other and including a first end nearest to said first side face and a second end nearest to said second side face; and
forming second periodic polarization inversion structures by applying a voltage on said second electrode piece part-arrays,
wherein said first end of each of said first periodic polarization inversion structures is set apart from said first end of each of said second electrode piece part-arrays by a distance of 1-5 mm in the lengthwise direction.

2. The method of claim 1 , further comprising the steps of:
forming insulating films between said electrode piece parts, respectively, on said first main face of said ferroelectric crystal substrate;
providing a uniform electrode on said second main face of said ferroelectric crystal substrate; and
applying said voltage between said electrode piece parts and said uniform electrode.

Assignees

• Ngk Insulators Ltd

Inventors

• Hattori Ryosuke
• Yamaguchi Shoichiro
• Shimokata Hidetsugu

Classifications

• G02F1/37

  for second-harmonic generation {(G02F1/3532 takes precedence)} · CPC title

• C30B33/04 Primary

  using electric or magnetic fields or particle radiation · CPC title

• C30B29/30

  Niobates; Vanadates; Tantalates · CPC title

• G02F1/3551

  Crystals · CPC title

• G02F1/3558 Primary

  Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM] · CPC title