Package substrate and semiconductor package including the same
US-2024429153-A1 · Dec 26, 2024 · US
US11315910B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11315910-B2 |
| Application number | US-202016875995-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 16, 2020 |
| Priority date | Oct 31, 2014 |
| Publication date | Apr 26, 2022 |
| Grant date | Apr 26, 2022 |
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A method is provided for the selective harvest of microLED devices from a carrier substrate. Defect regions are predetermined that include a plurality of adjacent defective microLED devices on a carrier substrate. A solvent-resistant binding material is formed overlying the predetermined defect regions and exposed adhesive is dissolved with an adhesive dissolving solvent. Non-defective microLED devices located outside the predetermined defect regions are separated from the carrier substrate while adhesive attachment is maintained between the microLED devices inside the predetermined defect regions and the carrier substrate. Methods are also provided for the dispersal of microLED devices on an emissive display panel by initially optically measuring a suspension of microLEDs to determine suspension homogeneity and calculate the number of microLEDs per unit volume. If the number of harvested microLED devices in the suspension is known, a calculation can be made of the number of microLED devices per unit of suspension volume.
Opening claim text (preview).
We claim: 1. A method for the dispersal of micro light emitting diode (microLED) devices on an emissive display panel, the method comprising: adding a suspension of harvested microLED devices to a transparent first container; agitating the suspension; optically measuring the suspension opacity at a plurality of first container heights; and, determining suspension homogeneity in response to the optical measurements. 2. The method of claim 1 further comprising: in response to determining a homogeneity greater than a homogeneity minimum threshold, dispersing the suspension on a top surface of an emissive display panel. 3. The method of claim 2 further comprising: determining a number of harvested microLED devices; calculating the number of microLED devices per unit of suspension volume; and, wherein dispersing the suspension on the top surface of the emissive display panel includes depositing a known first number of microLED devices in response to dispersing a first volume of suspension. 4. The method of claim 2 wherein dispersing the suspension on the emissive display panel includes using a dispersion process selected from the group consisting of single-step mass decantation, multi-step pipette translation, nozzle limited container translation, and translating tube. 5. The method of claim 4 wherein the multi-step pipette transversal dispersal process includes: maintaining the suspension homogeneity greater than the homogeneity minimum threshold in the first container; using a pipette, repeatedly drawing a predetermined aliquot volume from the first container; after each aliquot draw, translating the pipette a predetermined distance with respect to the emissive panel top surface; and, releasing a predetermined amount of aliquot per second during the translation. 6. The method of claim 4 wherein the first container is pressure controlled and includes a nozzle; wherein the nozzle limited container translation dispersal process includes: maintaining the suspension homogeneity greater than the homogeneity minimum threshold in the first container; translating the first container a predetermined distance with respect to the emissive panel top surface; and, releasing a predetermined amount of suspension per second from the nozzle during the translation. 7. The method of claim 4 wherein the first container is pressure controlled and includes an output port connected to a dispersal device selected from the group consisting of a single delivery tube or an array of delivery tubes; wherein the translating tube dispersal process includes: maintaining the suspension homogeneity greater than the homogeneity minimum threshold in the first container; translating the dispersal device a predetermined distance with respect to the emissive panel top surface; and, releasing a predetermined amount of suspension per second from the dispersal device during the translation. 8. The method of claim 4 wherein the single-step mass decantation dispersal process includes: maintaining the suspension homogeneity greater than the homogeneity minimum threshold in the first container; and, releasing the suspension from the first container onto an emissive panel top surface region using a method selected from the group consisting of a fixed position center region release and a region translation release. 9. The method of claim 2 further comprising: determining a number of assembly sites in a first region of the emissive display panel top surface; wherein dispersing the suspension on the top surface of the emissive display panel includes depositing a first number of microLED devices at least equal to the number of assembly sites in the first region. 10. The method of claim 2 further comprising: determining a number of translating path iterations for a first region of the emissive display panel; determining a translation speed; wherein dispersing the suspension on the top surface of the emissive display panel includes calculating the rate at which the first volume of suspension is dispersed in response to the number of path iterations and translation speed, creating a uniform density of suspension over the emissive display panel first region. 11. The method of claim 1 wherein optically measuring the suspension opacity at the plurality of first container heights includes: arranging a plurality of light emitting devices having predetermined output light intensity, directed towards a center axis of the first container and spaced a first predetermined distance from each other along a first vertical axis; arranging a plurality of light detection devices spaced the first predetermined distance from each other along a second vertical axis, with each light detection device having an input directed towards a corresponding light emitting device output; and, comparing the intensities of light received by the light detection devices. 12. The method of claim 1 further comprising: in response to determining suspension homogeneity, calculating a first number of microLED devices per unit of suspension volume; changing the proportion of fluid-to-LED devices in the suspension; and, optically measuring the suspension opacity to calculate a second number of microLED devices per unit of suspension volume. 13. The method of claim 1 wherein agitating the suspension includes using an agitation process selected from the group consisting of external vibration of the first container, creating a fluid flow in the suspension, and flowing a gas through the first container. 14. A method for the dispersal of micro light emitting diode (microLED) devices on an emissive display panel, the method comprising: adding a suspension of harvested microLED devices to a transparent first container; agitating the suspension; optically measuring the suspension density at a plurality of first container heights; calculating a first number of microLED devices per unit of suspension volume in response to the optical measurements; dispersing an aliquot volume of suspension onto an emissive display panel top surface; repeating the optical measurement; and, calculating a second number of microLED devices per unit of suspension volume. 15. The method of claim 14 further comprising: transferring a known aliquot volume of suspension to a second container; modifying the fluid in the second container by a predetermined amount; and, calculating a third number of microLED devices per unit of suspension in the second container. 16. The method of claim 15 further comprising: dispersing the suspension in the second container onto an emissive display panel top surface. 17. The method of claim 14 further comprising: modifying the suspension fluid in the first container; and, subsequent to agitating the suspension, optically measuring the suspension density to calculate a fourth number of microLED devices per unit of suspension volume.
batch processes · CPC title
located on the periphery of wafers, e.g. orientation notches or lot numbers · CPC title
for alignment · CPC title
Located in scribe lines · CPC title
for identification or tracking · CPC title
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