Full beam metrology for x-ray scatterometry systems

Patent metadata

Field	Value
Publication number	US-11313816-B2
Application number	US-202016894401-A
Country	US
Kind code	B2
Filing date	Jun 5, 2020
Priority date	Oct 18, 2016
Publication date	Apr 26, 2022
Grant date	Apr 26, 2022

Abstract

Methods and systems for characterizing dimensions and material properties of semiconductor devices by full beam x-ray scatterometry are described herein. A full beam x-ray scatterometry measurement involves illuminating a sample with an X-ray beam and detecting the intensities of the resulting zero diffraction order and higher diffraction orders simultaneously for one or more angles of incidence relative to the sample. The simultaneous measurement of the direct beam and the scattered orders enables high throughput measurements with improved accuracy. The full beam x-ray scatterometry system includes one or more photon counting detectors with high dynamic range and thick, highly absorptive crystal substrates that absorb the direct beam with minimal parasitic backscattering. In other aspects, model based measurements are performed based on the zero diffraction order beam, and measurement performance of the full beam x-ray scatterometry system is estimated and controlled based on properties of the measured zero order beam.

First claim

What is claimed is:

1. A metrology system comprising:
an x-ray illumination source configured to generate an amount of x-ray radiation;
an x-ray illumination optics subsystem configured to illuminate a measurement target formed on a wafer surface with an amount of x-ray radiation at a plurality of orientations with respect to the measurement target;
an x-ray detector configured to simultaneously detect an intensity associated with a zero diffraction order and an intensity associated with a higher diffraction order of an amount of radiation scattered from the measurement target in response to the incident x-ray radiation at each orientation, wherein the zero diffraction order and the higher diffraction order overlap at the x-ray detector for at least one of the plurality of orientations; and
a computing system configured to determine a value of a parameter of interest associated with a model of the measurement target based on the detected intensities of the diffraction orders at the plurality of different orientations.

2. The metrology system of claim 1 , wherein the model of the measurement target includes a value of divergence of the x-ray radiation from the x-ray illumination source to the x-ray detector.

3. The metrology system of claim 1 , the computing system further configured to:
determine an indication of measurement quality and performance based on a property of the detected zero diffraction order.

4. The metrology system of claim 3 , wherein the indication of measurement quality and performance is any of an alignment of the x-ray detector to an axis of the incident x-ray radiation, a brightness of the x-ray illumination source, an alignment of the x-ray illumination source, an element of the x-ray illumination optics subsystem, or both.

5. The metrology system of claim 3 , wherein the computing system is further configured to:
communicate a command signal to an element of the metrology system to adjust the metrology system based on the indication of measurement quality and performance.

6. The metrology system of claim 1 , wherein the computing system is further configured to:
determine a model of a beam profile of the higher diffraction order based on a measured beam profile of the zero diffraction order.

7. The metrology system of claim 1 , wherein the computing system is further configured to:
estimate an intensity of the higher diffraction order relative to the measured intensity of the zero diffraction order by dividing the measured intensity of the higher diffraction order by the measured intensity of the zero diffraction order.

8. The metrology system of claim 1 , wherein a photo-sensitive volume of the x-ray detector includes Cadmium Telluride, Germanium, Gallium Arsenide, or any combination thereof.

9. The metrology system of claim 1 , wherein the measurement target includes one or more high aspect ratio structures.

10. The metrology system of claim 9 , wherein the one or more high aspect ratio structures is any of a spin transfer torque random access memory (STT-RAM), a three dimensional NAND memory (3D-NAND), a dynamic random access memory (DRAM), a three dimensional FLASH memory (3D-FLASH), resistive random access memory (Re-RAMPC), and a phase change random access memory (PC-RAM).

11. A metrology system comprising:
an x-ray illumination source configured to generate an amount of x-ray radiation;
an x-ray illumination optics subsystem configured to illuminate a measurement target formed on a wafer surface with an amount of x-ray radiation at a plurality of orientations with respect to the measurement target;
an x-ray detector configured to simultaneously detect an intensity associated with a zero diffraction order and an intensity associated with a higher diffraction order of an amount of radiation scattered from the measurement target in response to the incident x-ray radiation at each orientation; and
a computing system configured to determine a value of a parameter of interest associated with a model of the measurement target based on a regression of the model of the measurement target with the detected intensity of the zero diffraction order and the detected intensity of the higher diffraction order at the plurality of different orientations.

12. The metrology system of claim 11 , wherein the zero diffraction order and the higher diffraction order overlap at the x-ray detector.

13. The metrology system of claim 11 , wherein the model of the measurement target includes a value of divergence of the x-ray radiation from the x-ray illumination source to the x-ray detector.

14. The metrology system of claim 11 , the computing system further configured to:
determine an indication of measurement quality and performance based on a property of the detected zero diffraction order.

15. The metrology system of claim 11 , wherein the computing system is further configured to:
determine a model of a beam profile of the higher diffraction order based on a measured beam profile of the zero diffraction order.

16. The metrology system of claim 11 , wherein the computing system is further configured to:
estimate an intensity of the higher diffraction order relative to the measured intensity of the zero diffraction order by dividing the measured intensity of the higher diffraction order by the measured intensity of the zero diffraction order.

17. The metrology system of claim 11 , wherein the measurement target includes one or more high aspect ratio structures.

18. The metrology system of claim 17 , wherein the one or more high aspect ratio structures is any of a spin transfer torque random access memory (STT-RAM), a three dimensional NAND memory (3D-NAND), a dynamic random access memory (DRAM), a three dimensional FLASH memory (3D-FLASH), resistive random access memory (Re-RAMPC), and a phase change random access memory (PC-RAM).

19. The metrology system of claim 11 , wherein the computer subsystem is further configured to determine a multi-dimensional image of the measurement target based on the detected intensities of the diffraction orders at the plurality of different orientations by matching a full beam x-ray scatterometry response function model generalized as a generic electron density mesh to the detected intensities of the diffraction orders at the plurality of different orientations.

Assignees

• Kla Corp

Inventors

• Gellineau Antonio Arion
• Dziura Thaddeus Gerard
• Hench John J
• Veldman Andrei
• Zalubovsky Sergey

Classifications

• G01N23/20025

  Sample holders or supports therefor · CPC title

• G01N2223/056

  diffraction · CPC title

• G01N23/2055 Primary

  Analysing diffraction patterns · CPC title

• G01N23/20066

  Measuring inelastic scatter of gamma rays, e.g. Compton effect · CPC title

• G01N2223/302

  comparative arrangements · CPC title