Integrated semiconductor die parceling platforms

Patent metadata

Field	Value
Publication number	US-11299302-B2
Application number	US-201916442235-A
Country	US
Kind code	B2
Filing date	Jun 14, 2019
Priority date	Oct 26, 2018
Publication date	Apr 12, 2022
Grant date	Apr 12, 2022

Abstract

In certain embodiments, a system includes: an inspection station configured to receive a die vessel, wherein the inspection station is configured to inspect the die vessel for defects; a desiccant station configured to receive the die vessel from the inspection station, wherein the desiccant station is configured to add a desiccant to the die vessel; a bundle station configured to receive the die vessel from the desiccant station, wherein the bundle station is configured to combine the die vessel with another die vessel as a die bundle; and a bagging station configured to receive the die bundle from the bundle station, wherein the bagging station is configured to dispose the die bundle in a die bag and to heat seal the die bag with the die bundle inside.

First claim

What is claimed is:

1. A system, comprising:
an inspection station configured to receive a die vessel, wherein the inspection station is configured to inspect the die vessel for defects utilizing an image sensor arranged over part of a conveyor system;
a desiccant station configured to receive the die vessel from the inspection station, wherein the desiccant station comprises at least one desiccant loader that is configured to add a desiccant to the die vessel;
a bundle station configured to receive the die vessel from the desiccant station, wherein the bundle station comprises a plurality of die vessels stacked on top of one another and configured to be secured together via a harness;
a bagging station configured to receive the die bundle from the bundle station, wherein the bagging station is configured to dispose the die bundle in a die bag and to heat seal the die bag with the die bundle inside, wherein the bagging station comprises a suction conduit configured to remove a gas from the die bag; and
a folding station configured to receive the die bag from the bagging station, wherein the folding station comprises a robotic arm configured to fold the die bag and deposit the folded die bag onto one of a plurality of shelves of an outport car, wherein the outport car transports the folded die bag from the system.

2. The system of claim 1 , wherein the inspection station, the desiccant station, the bundle station, and the bagging station are connected via the conveyor system that moves the die vessel in an automated manner.

3. The system of claim 2 , wherein the conveyor system comprises a conveyor belt.

4. The system of claim 1 , wherein the bagging station is configured to print a bar code on the die bag.

5. The system of claim 1 , wherein the outport car comprises wheels and is configured to be wheeled from the folding station.

6. The system of claim 1 , further comprising:
a buffer station configured to store die vessels received at a load port on buffer shelves, wherein the inspection station is configured to receive the die vessel from the buffer station.

7. The system of claim 1 , wherein the inspection station is configured to inspect the die vessel for a number of die and die quality.

8. The system of claim 1 , wherein the bagging station is configured to:
create a vacuum within the die bag; and
heat seal the die bag with the die bundle in a vacuum environment inside.

9. The system of claim 1 , wherein the one or more die vessels are a predetermined number of die vessels.

10. The system of claim 1 , wherein the bundle station is further configured to move the harness over the stacked one or more die vessels and then tightened the harness over the stacked one or more die vessels to cause the die vessels to adhere together.

11. The system of claim 1 , wherein each die bag is folded at the folding station so that each die bag fits within one of the respective shelves of the outport car and are separated vertically from each other.

12. The system of claim 1 , wherein if the inspection station detects a defect in the one or more die vessels, the inspection station is configured to move the one or more die vessels with the defect to a remediation location for remediation.

13. An integrated semiconductor die parceling platform comprising:
an inspection station configured to receive a die vessel, wherein the inspection station is configured to inspect the die vessel for defects utilizing an image sensor arranged over part of a conveyor system;
a desiccant station configured to receive the die vessel from the inspection station, wherein the desiccant station comprises at least one desiccant loader that is configured to add a desiccant to the die vessel;
a bundle station configured to receive the die vessel from the desiccant station, wherein the bundle station comprises a plurality of die vessels stacked on top of one another and configured to be secured together via a harness;
a bagging station configured to receive the die bundle from the bundle station, wherein the bagging station is configured to dispose the die bundle in a die bag and to heat seal the die bag with the die bundle inside, wherein the bagging station comprises a suction conduit configured to remove a gas from the die bag; and
a folding station configured to receive the die bag from the bagging station, wherein the folding station comprises a robotic arm configured to fold the die bag and deposit the folded die bag onto one of a plurality of shelves of an outport car, wherein the outport car transports the folded die bag from the integrated semiconductor die parceling platform,
wherein each station is a stationary point for processing the one or more die vessels.

14. The integrated semiconductor die parceling platform of claim 13 , wherein the die bundle is secured via a harness, and wherein the bundle station is configured to move the harness over the stacked one or more die vessels and then tightened the harness over the stacked one or more die vessels to cause the stacked one or more die vessels to adhere together.

15. The integrated semiconductor die parceling platform of claim 13 , wherein the inspection station, the desiccant station, the bundle station, and the bagging station are connected via the conveyor system that moves the die vessel in an automated manner.

16. The integrated semiconductor die parceling platform of claim 13 , wherein the conveyor system comprises a conveyor belt.

17. The integrated semiconductor die parceling platform of claim 13 , wherein the bagging station is configured to print a bar code on the die bag.

18. The integrated semiconductor die parceling platform of claim 13 , wherein if the inspection station detects a defect in the one or more die vessels, the inspection station is configured to move the one or more die vessels with the defect to a remediation location for remediation.

19. An outport car processing manipulator system of a die parceling platform, the system comprising:
a folding station configured to receive one or more die bags from a bagging station via a conveyer system, wherein the folding station comprises at least one robotic arm configured to:
fold each of the one or more die bags to reduce a size of the die bag in order that the die bag fits one of a number of respective shelves of an outport car; and
place each of the one or more folded die bags onto the one of the number of the respective shelves of the outport car,
wherein the outport car transports the one or more folded die bags from the die parceling platform.

20. The outport car processing manipulator system of claim 19 , wherein each of the one or more die bags are separated vertically from each other.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Kuo Tsung-Sheng
• Liu Hsu-Shui
• Pai Jiun-Rong
• Chu Yang-Ann
• Lin Chieh-Chun
• Chen Shine

Classifications

• H10P72/16

  Trays for chips · CPC title

• H10P72/0456

  in-line arrangement · CPC title

• H10P72/0611 Primary

  Sorting devices · CPC title

• B65B31/06

  the nozzle being arranged for insertion into, and withdrawal from, the mouth of a filled container and operating in conjunction with means for sealing the container mouth · CPC title

• B65B5/045 Primary

  in bags · CPC title