Pressure sensor having unevenness and manufacturing method therefor

Patent metadata

Field	Value
Publication number	US-11287343-B2
Application number	US-201816616685-A
Country	US
Kind code	B2
Filing date	Feb 6, 2018
Priority date	Sep 20, 2017
Publication date	Mar 29, 2022
Grant date	Mar 29, 2022

Abstract

A pressure sensor having unevenness and a manufacturing method therefor are disclosed. The disclosed pressure sensor senses pressure in a vertical direction and includes a first pressure sensor unit and a second pressure sensor unit, wherein the first pressure sensor unit and the second pressure sensor unit are stacked, and unevenness is formed on the upper surface of the first pressure sensor unit and on the lower surface of the second pressure sensor unit.

First claim

What is claimed is:

1. A pressure sensor for sensing a pressure in a vertical direction, the pressure sensor comprising:
a first pressure sensor unit configured to detect a first pressure; and
a second pressure sensor unit configured to detect a second pressure independently from the first pressure sensor unit,
wherein
the first pressure sensor unit and the second pressure sensor unit are stacked,
an upper surface of the first pressure sensor unit and a lower surface of the second pressure sensor unit have unevenness formed therein,
at least one of an elastic coefficient and an amount of conductive particles per unit area is different between the first pressure sensor unit and the second pressure sensor unit,
an unevenness formed on the upper surface of the first pressure sensor unit includes at least one first convex area and at least one first concave area, and an unevenness formed on the lower surface of the second pressure sensor unit includes at least one second convex area and at least one second concave area, and
each of the at least one first convex area is inserted into a corresponding one of the at least one second concave area, and each of the at least one second convex area is inserted into a corresponding one of the at least one first concave area.

2. The pressure sensor of claim 1 , wherein the at least one first convex area and the at least one second convex area have different sizes from each other.

3. The pressure sensor of claim 1 , wherein an elastic coefficient of the second pressure sensor unit is lower than an elastic coefficient of the first pressure sensor unit, and an amount of conductive particles per unit area of the second pressure sensor unit is greater than an amount of conductive particles per unit area of the first pressure sensor unit.

4. The pressure sensor of claim 1 , wherein each of the first pressure sensor unit and the pressure sensor unit is of a conductive rubber material.

5. A pressure sensor for sensing a pressure in a vertical direction, the pressure sensor comprising:
an N (integer greater than or equal to 3) number of pressure sensor units stacked in N or more layers, the pressure sensor units each configured to detect a pressure independently,
wherein an upper surface of a pressure sensor unit at a lowermost layer, a lower surface of a pressure sensor unit at an uppermost layer, and an upper surface and a lower surface of remaining pressure sensor units other than the pressure sensor unit at the lowermost layer and the pressure sensor unit at the uppermost layer, from among the N number of pressure sensor units, have unevenness formed therein, and
wherein the unevenness comprises a convex area and a concave area, pressure sensor unit A and pressure sensor unit B from among the plurality of pressure sensor units are adjacent, a convex area of said pressure sensor unit A is inserted into a corresponding concave area of said pressure sensor unit B, and a convex area of said pressure sensor unit B is inserted into a corresponding concave area of said pressure sensor unit A.

6. The pressure sensor of claim 5 , wherein the N number of pressure sensor units have different elastic coefficients, a stacking order is determined with respect to a value of the elastic coefficients, and the plurality of pressure sensor units are stacked in order of largest to smallest value of the elastic coefficients of the N number of pressure sensor units.

7. A method for manufacturing a pressure sensor configured to sense a pressure in a vertical direction, the method comprising:
forming unevenness in at least one of an upper surface and a lower surface of a plurality of pressure sensor units, the pressure sensor units each configured to detect a pressure independently; and
stacking the plurality of pressure sensor units having the unevenness formed therein,
wherein the unevenness comprises a convex area and a concave area, pressure sensor unit A and pressure sensor unit B from among the plurality of pressure sensor units are adjacent, a convex area of said pressure sensor unit A is inserted into a corresponding concave area of said pressure sensor unit B, and a convex area of said pressure sensor unit B is inserted into a corresponding concave area of said pressure sensor unit A.

Assignees

• Foundation Soongsil Univ Industry Cooperation

Inventors

• Kim Joo Yong
• Choi Min Ki

Classifications

• G01L1/205

  using distributed sensing elements · CPC title

• G01L13/02 Primary

  using elastically-deformable members or pistons as sensing elements · CPC title

• G01L1/18 Primary

  using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material · CPC title

• H01L41/1132

  Electricity · mapped topic

• H10N30/302

  Sensors · CPC title