Nanopowders, nanoceramic materials and methods of making and use thereof

Patent metadata

Field	Value
Publication number	US-11279656-B2
Application number	US-201816168003-A
Country	US
Kind code	B2
Filing date	Oct 23, 2018
Priority date	Oct 27, 2017
Publication date	Mar 22, 2022
Grant date	Mar 22, 2022

Abstract

Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.

First claim

What is claimed is:

1. A nanopowder comprising a plurality of nanoparticles, wherein at least a portion of the plurality of nanoparticles comprises:
a core particle comprising a first material selected from a group consisting of a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride and combinations thereof; and
a thin film coating over the core particle, the thin film coating comprising a second material selected from a group consisting of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride and combinations thereof,
wherein the portion of the plurality of nanoparticles have a donut-shape comprising a spherical form with indentations on opposite sides.

2. The nanopowder of claim 1 , wherein the first material is selected from a group consisting of yttrium fluoride (YF 3 ), yttrium oxyfluoride (Y x O y F z ), erbium fluoride (ErF 3 ), erbium oxyfluoride (Er x O y F z ), dysprosium fluoride (DyF 3 ), dysprosium oxyfluoride (Dy x O y F z ), gadolinium fluoride (GdF 3 ), gadolinium oxyfluoride (Gd x O y F z ), scandium fluoride (ScF 3 ), scandium oxyfluoride (Sc x O y F z ) and combinations thereof, and
wherein the second material is selected from a group consisting of yittria (Y 2 O 3 ), yttrium fluoride (YF 3 ), yttrium oxyfluoride (Y x O y F z ), erbium oxide (Er 2 O 3 ), erbium fluoride (ErF 3 ), erbium oxyfluoride (Er x O y F z ), dysprosium oxide (Dy 2 O 3 ), dysprosium fluoride (DyF 3 ), dysprosium oxyfluoride (Dy x O y F z ), gadolinium oxide (Gd 2 O 3 ), gadolinium fluoride (GdF 3 ), gadolinium oxyfluoride (Gd x O y F z ), scandium oxide (Sc 2 O 3 ), scandium fluoride (ScF 3 ), scandium oxyfluoride (Sc x O y F z ) and combinations thereof.

3. The nanopowder of claim 1 , wherein the plurality of nanoparticles comprise 30 mol % to about 40 mol % of zirconium oxide.

4. The nanopowder of claim 1 , wherein the thin film coating comprises zirconium oxide.

5. The nanopowder of claim 1 , wherein the core particle further comprises zirconium oxide and the thin film coating comprises yttrium oxide.

6. The nanopowder of claim 1 , wherein the thin film coating has a density of about 1 g/cm 3 to about 10 g/cm 3 .

7. The nanopowder of claim 1 , wherein the thin film coating has a thickness of about 1 nm to about 500 nm.

8. The nanopowder of claim 1 , wherein the size of the core particles is from about 5 nm to about 100 nm.

9. The nanopowder of claim 1 , wherein a weight ratio of the first material to the second material is about 1:100 to about 35:1.

10. The nanopowder of claim 1 , wherein the thin film coating comprises a density of about 1 g/cm 3 to about 20 g/cm 3 .

11. A nanopowder comprising a plurality of nanoparticles, wherein at least a portion of the plurality of nanoparticles comprises:
a core particle comprising a first material selected from a group consisting of erbium oxide (Er 2 O 3 ), a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride and combinations thereof; and
a thin film coating over the core particle, the thin film coating comprising a second material selected from a group consisting of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride and combinations thereof,
wherein the first material or the second material comprises Er 2 O 3 with the proviso that when the first material comprises Er 2 O 3 , the second material comprises the rare earth metal-containing fluoride, rare earth metal-containing oxyfluoride or a combination thereof, and
wherein the portion of the plurality of nanoparticles have a donut-shape comprising a spherical form with indentations on opposite sides.

Assignees

• Applied Materials Inc

Inventors

• Zhan Guodong
• Wu Xiaowei
• He Xiao Ming
• Sun Jennifer Y

Classifications

• C04B35/62815

  Rare earth metal oxides · CPC title

• C23C16/45525

  Atomic layer deposition [ALD] · CPC title

• C04B2235/3224

  Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide · CPC title

• C04B2235/96

  Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance · CPC title

• C04B2235/445

  Fluoride containing anions, e.g. fluosilicate · CPC title