Solid inspection apparatus and method of use
US-2019195799-A1 · Jun 27, 2019 · US
US11243390B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11243390-B2 |
| Application number | US-202017110406-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 3, 2020 |
| Priority date | Dec 6, 2019 |
| Publication date | Feb 8, 2022 |
| Grant date | Feb 8, 2022 |
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A method is used to generate a report presenting parameter values corresponding to a structured illumination microscopy (SIM) optical system. The parameter values are based at least in part on the performed modulation calculation corresponding to an image set captured with the SIM optical system. A minimum FWHM slice is identified, based at least in part on an average FWHM value across the images in the first image set. Parameter estimation is performed on the identified minimum FWHM slice. Best in-focus parameters are identified based at least in part on the performed estimation. A phase estimate is performed for each image in the set. A modulation calculation is performed based at least in part on the identified best in-focus parameters. The report is based at least in part on the performed modulation calculation.
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What is claimed is: 1. A method including: receiving a plurality of image sets, each image set of the plurality of image sets including images captured using structured illumination microscopy (SIM) in an optical system at a distance from a subject that differs from the distance from the subject at which images are captured in the other image sets of the plurality of image sets, each image of the plurality of image sets having an associated channel and an associated grating angle; isolating a first image set from the plurality of image sets based at least in part on the distance corresponding to the first image set; measuring a full width at half maximum (FWHM) value corresponding to each image in the first image set; identifying a minimum FWHM slice based at least in part on an average FWHM value across the images in the first image set; performing parameter estimation on the identified minimum FWHM slice corresponding to the first image set; identifying best in-focus parameters based at least in part on the performed parameter estimation corresponding to the first image set; storing the identified best in-focus parameters based at least in part on the performed parameter estimation corresponding to the first image set; performing a phase estimate for each image within the first image set; performing a modulation calculation based at least in part on the identified best in-focus parameters corresponding to the first image set; and generating a report presenting parameter values corresponding to the optical system, based at least in part on the performed modulation calculation corresponding to the first image set. 2. The method of claim 1 , further comprising: isolating a second image set from the plurality of image sets based at least in part on the distance corresponding to the second image set; measuring a full width at half maximum (FWHM) value corresponding to each image in the second image set; identifying a minimum FWHM slice based at least in part on an average FWHM value across the images in the second image set; performing parameter estimation in the identified minimum FWHM slice corresponding to the second image set; identifying best in-focus parameters based at least in part on the performed parameter estimation corresponding to the second image set; storing the identified best in-focus parameters based at least in part on the performed parameter estimation corresponding to the second image set; performing a phase estimate for each image within the second image set; and performing a modulation calculation based at least in part on the identified best in-focus parameters corresponding to the second image set; the generated report being based at least in part on a combination of the performed modulation calculation corresponding to the first image set and the performed modulation calculation corresponding to the second image set. 3. The method of claim 1 , the measuring the FWHM value corresponding to each image in the first image set being performed on a center estimation window of each image in the first image set. 4. The method of claim 1 , the performing parameter estimation in the identified minimum FWHM slice corresponding to the first image set being performed on a center estimation window of the identified minimum FWHM slice. 5. The method of claim 1 , further comprising: comprising comparing parameters in the report against a predefined set of parameter specifications determining that a parameter in the report deviates from the predefined set of parameter specifications; and adjusting one or more features in the optical system based at least in part on the determination that a parameter in the report deviates from the predefined set of parameter specifications. 6. The method of claim 1 , the generated report including parameter values selected from the group consisting of distances between an objective lens in the optical system and the subject, the channel corresponding to each image of the plurality of images, angle index, modulation, FWHM values, grating spacing, and grating angles. 7. The method of claim 1 , further comprising computing phase shift between pairs of images of the first image set, each pair of images of the pairs of images sharing a channel and grating angle, the generated report including the computed phase shifts. 8. The method of claim 7 , further comprising: comparing the computed phase shifts against a predetermined range of phase shifts; determining that at least one of the computed phase shifts is outside the predetermined range of phase shifts; and in response to determining that at least one of the computed phase shifts is outside the predetermined range of phase shifts, calculating gain values to correct the phase shifts that are outside the predetermined range of phase shifts. 9. The method of claim 8 , further comprising: establishing new phase shifting voltages based at least in part on the calculated gain values; applying the new phase shifting voltages to a piezoelectric element, the piezoelectric element to provide phase shifts within the optical system; and capturing a new image set with the new phase shifting voltages being applied to the piezoelectric element. 10. A processor-readable medium including contents that are configured to cause a computing system to process data by performing the method of claim 1 . 11. An apparatus comprising: a first optical assembly to emit structured illumination toward a target, the first optical assembly including: a light emitting assembly, a first phase mask to impart a first pattern to light emitted by the light emitting assembly, a second phase mask to impart a second pattern to light emitted by the light emitting assembly, and a phase adjustment assembly to adjust a phase of light structured by the first phase mask and the second phase mask; a second optical assembly, the second optical assembly including an image sensor to capture images of the target as illuminated by the first optical assembly; and a processor, the processor to perform the following: receive a plurality of image sets, each image set of the plurality of image sets including images captured using the second optical assembly at a distance from a subject that differs from the distance from the subject at which images are captured in the other image sets of the plurality of image sets, each image of the plurality of images having an associated channel and an associated grating angle, isolate a first image set from the plurality of image sets based at least in part on the distance corresponding to the first image set, measure a full width at half maximum (FWHM) value corresponding to each image in the first image set, identify a minimum FWHM slice based at least in part on an average FWHM value across the images in the first image set, perform parameter estimation on the identified minimum FWHM slice corresponding to the first image set, identify best in-focus parameters based at least in part on the performed parameter estimation corresponding to the first image set, store the identified best in-focus parameters based at least in part on the performed parameter estimation corresponding to the first image set, perform a phase estimate for each image within the first image set, perform a modulation calculation based at least in part on the identified best in-focus parameters corresponding to the first image set, and generate a report presenting parameter values corresponding to the optical system, based at least in part on the performed modulation calculation corresponding to the first image set. 12. The apparatus of claim 11 , the target including a sampl
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