Mechanically-driven oscillating flow agitation

Patent metadata

Field	Value
Publication number	US-11230793-B2
Application number	US-202017064785-A
Country	US
Kind code	B2
Filing date	Oct 7, 2020
Priority date	Oct 8, 2019
Publication date	Jan 25, 2022
Grant date	Jan 25, 2022

Abstract

Systems and methods for electroplating are described. The electroplating system may include a vessel configured to hold a first portion of a liquid electrolyte. The system may also include a substrate holder configured for holding a substrate in the vessel. The system may further include a first reservoir in fluid communication with the vessel. In addition, the system may include a second reservoir in fluid communication with the vessel. Furthermore, the system may include a first mechanism configured to expel a second portion of the liquid electrolyte from the first reservoir into the vessel. The system may also include a second mechanism configured to take in a third potion of the liquid electrolyte from the vessel into the second reservoir when the second portion of the liquid electrolyte is expelled from the first reservoir. Methods may include oscillating flow of the electrolyte within the vessel.

First claim

What is claimed is:

1. An electroplating system, the electroplating system comprising:
a vessel configured to hold a first portion of a liquid electrolyte;
a substrate holder configured for holding a substrate in the vessel;
a first reservoir in fluid communication with the vessel;
a second reservoir in fluid communication with the vessel;
a first mechanism configured to expel a second portion of the liquid electrolyte from the first reservoir into the vessel; and
a second mechanism configured to take in a third portion of the liquid electrolyte from the vessel into the second reservoir when the second portion of the liquid electrolyte is expelled from the first reservoir.

2. The electroplating system of claim 1 , wherein:
the second mechanism is configured to expel the third portion of the liquid electrolyte from the second reservoir into the vessel, and
the first mechanism is further configured to take in a fourth portion of the liquid electrolyte from the vessel into the first reservoir when the third portion of the liquid electrolyte is expelled from the second reservoir.

3. The electroplating system of claim 2 , wherein:
the first mechanism is configured to oscillate between expelling and taking in liquid electrolyte from the first reservoir, and
the second mechanism is configured to oscillate between expelling and taking in liquid electrolyte from the second reservoir.

4. The electroplating system of claim 1 , wherein:
the first mechanism comprises a first sliding element,
the first sliding element is configured to move within the first reservoir,
the second mechanism comprises a second sliding element, and
the second sliding element is configured to move within the second reservoir.

5. The electroplating system of claim 4 , wherein:
a cross-sectional area of the first sliding element is equal to the cross-sectional area of a first space defined by the first reservoir, and
a cross-sectional area of the second sliding element is equal to the cross-sectional area of a second space defined by the second reservoir.

6. The electroplating system of claim 1 , wherein no mechanisms configured to agitate the liquid electrolyte are disposed within the vessel.

7. The electroplating system of claim 1 , wherein when the first mechanism expels the second portion of the liquid electrolyte from the first reservoir into the vessel, no portion of the liquid electrolyte exits the vessel other than to the second reservoir.

8. The electroplating system of claim 1 , wherein:
the first mechanism is configured to expel the second portion of the liquid electrolyte in a direction,
the first mechanism is configured to move in the direction to expel the second portion of the liquid electrolyte, and
the second mechanism is configured to move in the direction to take in the third portion of the liquid electrolyte.

9. The electroplating system of claim 1 , wherein:
the first reservoir is characterized by a first cross-sectional area orthogonal to a plane comprising the substrate when the substrate is in the substrate holder,
the second reservoir is characterized by a second cross-sectional area orthogonal to the plane,
the vessel is characterized by a third cross-sectional area orthogonal to the plane,
the third cross-sectional area is less than the first cross-sectional area, and
the third cross-sectional area is less than the second cross-sectional area.

10. The electroplating system of claim 1 , wherein:
the vessel comprises a seal configured to contact an outer edge of the substrate in the substrate holder,
a first section of the vessel comprises the seal and is between the substrate holder and the first reservoir,
a second section of the vessel comprises the seal and is between the substrate holder and the second reservoir,
a third section of the vessel comprises a floor opposite the substrate holder, the floor being flat in the third section, the third section of the vessel being between the first section and the second section,
the first section of the vessel comprises a first channel, the first channel configured such that a cross-sectional area of the first channel orthogonal to flow through the first channel varies no more than 5%, and
the second section of the vessel comprises a second channel, the second channel configured such that a cross-sectional area of the second channel orthogonal to flow through the second channel varies no more than 5%.

Assignees

• Applied Materials Inc

Inventors

• Mchugh Paul R
• Wilson Gregory J

Classifications

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D7/12

  Semiconductors · CPC title

• C25D21/10 Primary

  Agitating of electrolytes; Moving of racks · CPC title

• C25D5/20

  Electroplating using ultrasonic waves · CPC title

• C25D5/08

  Electroplating with moving electrolyte e.g. jet electroplating {(using locally applied jets of electrolyte C25D5/026)} · CPC title