Method of removing liquid from seal of a substrate holder

Patent metadata

Field	Value
Publication number	US-11230789-B2
Application number	US-201916685038-A
Country	US
Kind code	B2
Filing date	Nov 15, 2019
Priority date	Dec 21, 2018
Publication date	Jan 25, 2022
Grant date	Jan 25, 2022

Abstract

A method capable of removing a liquid from a seal of a substrate holder so as to prevent contact between the liquid and an electrical contact of the substrate holder is provided. The method includes: immersing the substrate in a plating solution, with a seal and an electrical contact of the substrate holder in contact with the substrate; applying a voltage between the substrate and an anode in the presence of the plating solution to plate the substrate; pulling up the plated substrate from the plating solution; separating the seal from the plated substrate; and forming a flow of gas passing through a gap between the plated substrate and the seal, the flow of gas being directed from an inside to an outside of the substrate holder.

First claim

What is claimed is:

1. A method of plating a substrate with use of a substrate holder, comprising:
immersing the substrate in a plating solution, with a seal and an electrical contact of the substrate holder in contact with the substrate;
applying a voltage between the substrate and an anode in the plating solution to plate the substrate;
pulling up the plated substrate from the plating solution;
separating the seal from the plated substrate; and
forming a flow of gas passing through a gap between the plated substrate and the seal, the flow of gas being directed from an inside to an outside of the substrate holder.

2. The method according to claim 1 , wherein forming the flow of gas passing through the gap comprises forming the flow of gas passing through the gap while keeping the gap within a predetermined range.

3. The method according to claim 2 , wherein forming the flow of gas passing through the gap comprises forming the flow of gas passing through the gap while keeping the gap constant.

4. The method according to claim 1 , wherein separating the seal from the plated substrate comprises separating the seal from the plated substrate when an internal space of the substrate is filled with the gas having a pressure higher than an atmospheric pressure, the internal space being formed by the seal in contact with the plated substrate.

5. A method of plating a substrate with use of a substrate holder, comprising:
forming a flow of gas passing through a gap between the substrate to be plated and a seal of the substrate holder, the flow of gas being directed from an inside to an outside of the substrate holder;
immersing the substrate in a plating solution, with the seal and an electrical contact of the substrate holder in contact with the substrate; and
applying a voltage between the substrate and an anode in the plating solution to plate the substrate.

6. The method according to claim 5 , wherein forming the flow of gas passing through the gap comprises forming the flow of gas passing through the gap while keeping the gap within a predetermined range.

7. The method according to claim 6 , wherein forming the flow of gas passing through the gap comprises forming the flow of gas passing through the gap while keeping the gap constant.

8. The method according to claim 5 , further comprising:
bringing the seal into contact with the substrate to form an internal space in the substrate holder after the flow of gas through the gas is formed;
filling the internal space with a gas having a pressure higher than an atmospheric pressure; and
detecting that an amount of decrease in pressure of the gas in the internal space during a predetermined monitoring time is smaller than a predetermined threshold value.

Assignees

• Ebara Corp

Inventors

• Seki Masaya
• Takayanagi Hideki
• Suzuki Kiyoshi
• Satake Masayuki
• Fujikata Jumpei

Classifications

• C25D7/123

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• C25D17/004 Primary

  Sealing devices · CPC title

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D21/10

  Agitating of electrolytes; Moving of racks · CPC title

• C25D17/06 Primary

  Suspending or supporting devices for articles to be coated · CPC title