X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles

Patent metadata

Field	Value
Publication number	US-11217357-B2
Application number	US-202117169159-A
Country	US
Kind code	B2
Filing date	Feb 5, 2021
Priority date	Feb 10, 2020
Publication date	Jan 4, 2022
Grant date	Jan 4, 2022

Abstract

An x-ray mirror optic includes a plurality of surface segments with quadric cross-sections having differing quadric parameters. The quadric cross-sections of the surface segments share a common axis and are configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray.

First claim

What is claimed is:

1. An x-ray mirror optic comprising:
a plurality of surface segments with quadric cross-sections having differing quadric parameters, the quadric cross-sections of the plurality of surface segments sharing a common axis, and configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray, the plurality of surface segments comprising:
a first surface segment having a first hyperbolic or hyperboloidal cross-sectional shape and a first asymptotic slope, the first surface segment having a first focus and a second focus, the first focus configured to be substantially coincident with an x-ray source; and
a second surface segment having a second hyperbolic or hyperboloidal cross-sectional shape and a second asymptotic slope smaller than the first asymptotic slope, the second surface segment having a third focus and a fourth focus, the third focus substantially coincident with the second focus of the first surface segment.

2. The x-ray mirror optic of claim 1 , wherein the differing quadric parameters comprise hyperbolic or hyperboloidal parameters.

3. The x-ray mirror optic of claim 1 , wherein the plurality of surface segments are curved in one dimension.

4. The x-ray mirror optic of claim 1 , wherein the plurality of surface segments are curved in two dimensions.

5. The x-ray mirror optic of claim 1 , wherein the first hyperbolic or hyperboloidal cross-sectional shape is axially symmetric to a first axis, and the second hyperbolic or hyperboloidal cross-sectional shape is axially symmetric to the first axis.

6. The x-ray mirror optic of claim 5 , wherein the first surface segment is configured to reflect x-rays emitted from the x-ray source, and the second surface segment is configured to reflect x-rays reflected by the first surface segment.

7. The x-ray mirror optic of claim 5 , wherein the plurality of surface segments further comprises a third surface segment having a third hyperbolic or hyperboloidal cross-sectional shape that is axially symmetric to the first axis and has a third asymptotic slope smaller than the second asymptotic slope, the third surface segment having a fifth focus and a sixth focus, the fifth focus substantially coincident with the fourth focus of the second surface segment.

8. The x-ray mirror optic of claim 7 , wherein the third surface segment is configured to reflect x-rays reflected by the second surface segment.

9. The x-ray mirror optic of claim 5 , wherein the plurality of surface segments further comprises a paraboloidal surface segment having a paraboloidal shape, a focus of the paraboloidal shape substantially coincident with the fourth focus of the second surface segment.

10. The x-ray mirror optic of claim 9 , wherein the paraboloidal surface segment is configured to collimate the x-rays emitted by the x-ray source, reflected by the first surface segment, and then reflected by the second surface segment.

11. An x-ray mirror optic comprising:
a first plurality of non-axially symmetric mirror sections; and
a second plurality of non-axially symmetric mirror sections,
wherein the first plurality of non-axially symmetric mirror sections and/or the second plurality of non-axially symmetric mirror sections comprises:
a first mirror segment having a first hyperbolic or hyperboloidal shape having a first asymptotic slope, the first mirror segment having a first focus and a second focus, the first focus configured to be substantially coincident with an x-ray source; and
a second mirror segment having a second hyperbolic or hyperboloidal shape having a second asymptotic slope smaller than the first asymptotic slope, the second mirror segment having a third focus and a fourth focus, the third focus substantially coincident with the second focus of the first mirror segment.

12. The x-ray mirror optic of claim 11 , wherein the first plurality of non-axially symmetric mirror sections and/or the second plurality of non-axially symmetric mirror sections comprises pairs of mirror sections, each pair of the pairs of mirror sections comprising two mirror sections that have substantially a same quadric surface shape and quadric surface parameters as one another, and are on opposite sides of an optical axis of the x-ray mirror optic.

13. The x-ray mirror optic of claim 11 , wherein the first plurality of non-axially symmetric mirror sections is configured to provide focusing along a first direction, and the second plurality of non-axially symmetric mirror sections is configured to provide focusing along a second direction substantially perpendicular to the first direction.

14. The x-ray mirror optic of claim 11 , wherein the first plurality of non-axially symmetric mirror sections are nested with one another and/or the second plurality of non-axially symmetric mirror sections are nested with one another.

15. The x-ray mirror optic of claim 11 , wherein the first plurality of non-axially symmetric mirror sections are substantially parallel with one another and/or the second plurality of mirror sections are substantially parallel with one another.

16. The x-ray mirror optic of claim 15 , wherein the second plurality of non-axially symmetric mirror sections are oriented substantially perpendicularly to the first plurality of non-axially symmetric mirror sections.

17. The x-ray mirror optic of claim 11 , wherein the first plurality of non-axially symmetric mirror sections and the second plurality of non-axially symmetric mirror sections are interweaved with one another.

18. A method of fabricating an x-ray mirror optic, the method comprising:
etching a first plurality of non-axially symmetric mirror sections and/or a second plurality of non-axially symmetric mirror sections into a substrate, wherein the first plurality of non-axially symmetric mirror sections and/or the second plurality of non-axially symmetric mirror sections comprises:
a first mirror segment having a first hyperbolic or hyperboloidal shape having a first asymptotic slope, the first mirror segment having a first focus and a second focus, the first focus configured to be substantially coincident with an x-ray source; and
a second mirror segment having a second hyperbolic or hyperboloidal shape having a second asymptotic slope smaller than the first asymptotic slope, the second mirror segment having a third focus and a fourth focus, the third focus substantially coincident with the second focus of the first mirror segment.

Assignees

• Sigray Inc

Inventors

• Yun Wenbing
• Lewis Sylvia Jia Yun
• Kirz Janos

Classifications

• G21K1/06 Primary

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• G01N23/205

  using diffraction cameras · CPC title

• G01N23/20008

  Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor (monochromators for X- rays using crystals G21K1/06) · CPC title

• G21K1/067

  using surface reflection, e.g. grazing incidence mirrors, gratings (multilayer mirrors G21K1/062) · CPC title

• G21K2201/064

  having a curved surface · CPC title