High brightness X-ray absorption spectroscopy system

Patent metadata

Field	Value
Publication number	US-9448190-B2
Application number	US-201514636994-A
Country	US
Kind code	B2
Filing date	Mar 3, 2015
Priority date	Jun 6, 2014
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

This disclosure presents systems for x-ray absorption fine structure (XAFS) measurements that have x-ray flux and flux density several orders of magnitude greater than existing compact systems. These are useful for laboratory or field applications of x-ray absorption near-edge spectroscopy (XANES) or extended x-ray fine absorption structure (EXFAS) spectroscopy. The higher brightness is achieved by using designs for x-ray targets that comprise a number of aligned microstructures of x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment with higher electron density and/or higher energy electrons, leading to greater x-ray brightness and high flux. The high brightness x-ray source is then coupled to an x-ray reflecting optical system to collimate the x-rays, and a monochromator, which selects the exposure energy. Absorption spectra of samples using the high flux monochromatic x-rays can be made using standard detection techniques.

First claim

We claim:

1. An x-ray absorption measurement system, comprising:
an x-ray source comprising:
a vacuum chamber;
a window transparent to x-rays attached to the wall of the vacuum chamber;
and, within the vacuum chamber:
at least one electron beam emitter, and
an anode target comprising:
a substrate comprising a first selected material, and
a planar first surface, from which thickness is measured in a direction perpendicular to the first planar surface, and
two orthogonal lateral dimensions are measured parallel to the first planar surface; and

a plurality of discrete structures embedded into the first planar surface of the substrate such that each of the plurality of discrete structures is in thermal contact with the substrate, the plurality of discrete structures comprising:
one or more materials selected for its x-ray generation properties;

in which at least two of the plurality of discrete structures are arranged on an axis;
in which the axis is parallel to the first planar surface of the substrate;
in which the axis passes through the first window;
in which each of the discrete structures has a thickness of less than 20 microns, and
in which each of the plurality of discrete structures has a lateral dimension in the direction of the axis of less than 50 microns; and

a means of directing electrons emitted by the at least one electron beam emitter onto the at least two arranged discrete structures such that x-rays are generated from each of the at least two arranged discrete structures;
in which at least a portion of the generated x-rays propagating on the axis from each of the two arranged discrete structures is transmitted through the window; and
said system further comprising:
an optical train having an optical axis positioned to correspond to the axis on which the at least two discrete structures are arranged;
in which the optical train is further positioned to collect x-rays generated by the anode target and produce an x-ray beam with predetermined beam properties;
a monochromator to select x-rays of a predetermined energy and bandwidth from the x-ray beam,
and additionally having the capability of scanning the selected x-rays over a predetermined energy range;
a mount to hold an object to be investigated positioned such that the x-rays emerging from the monochromator will be incident on the object; and
a detector to measure x-rays transmitted through the object.

2. The system of claim 1 , additionally comprising:
a detector to measure the intensity of the x-rays incident on the object.

3. The system of claim 1 , additionally comprising:
a detector to measure the intensity of x-ray fluorescence emitted by the object when exposed to the x-rays of a predetermined energy and bandwidth.

4. The system of claim 1 , in which
the mount has controls to adjust the position and rotation of the object to be investigated; and
additionally comprising:
a control system to coordinate one or more settings of the monochromator as well as the position and rotation of the object.

5. The system of claim 1 , in which
the plurality of discrete structures are arranged in a linear array along said axis; and
the optical train is also aligned along said axis.

6. The system of claim 1 , in which
the first selected material is selected from the group consisting of:
beryllium, diamond, graphite, silicon, boron nitride, silicon carbide, sapphire, and diamond-like carbon.

7. The system of claim 1 , in which
the one or more materials selected for its x-ray generation properties is selected from the group consisting of:
aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, gallium, zinc, yttrium, zirconium, molybdenum, niobium, ruthenium, rhodium, palladium, silver, tin, iridium, tantalum, tungsten, indium, cesium, barium, gold, platinum, lead, and combinations and alloys thereof.

8. The system of claim 1 , comprising:
one or more additional discrete structures embedded into the first planar surface of the substrate comprising an additional material selected for its x-ray generation properties.

9. The system of claim 8 , in which
the additional material is selected from the group consisting of:
aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, gallium, zinc, yttrium, zirconium, molybdenum, niobium, ruthenium, rhodium, palladium, silver, tin, iridium, tantalum, tungsten, indium, cesium, barium, gold, platinum, lead, and combinations and alloys thereof.

10. The system of claim 1 , in which
the plurality of discrete structures are arranged such that x-rays generated by a predetermined number of the plurality of discrete structures when exposed to an electron beam from the electron beam emitter are transmitted through a predetermined one of the discrete structures selected from the plurality of discrete structures.

11. The system of claim 1 , in which
the optical train comprises an x-ray reflector with a surface corresponding to a quadric surface.

12. The system of claim 11 , in which
the quadric surface is selected from the group consisting of:
a spheroid, an ellipsoid, a paraboloid, a hyperboloid, an elliptic cylinder, a circular cylinder, an elliptic cone, and a circular cone.

13. The system of claim 1 , in which
the optical train comprises a type I Wolter x-ray optic.

14. The system of claim 1 , in which
the x-rays emerging from the monochromator have a predetermined energy bandwidth that is less than 10 eV.

15. The system of claim 14 , in which
the predetermined energy bandwidth is less than 1 eV.

16. The system of claim 1 , in which
the monochromator comprises a channel cut crystal comprising a material selected from the group consisting of:
silicon, germanium, lithium fluoride, and indium antimonide.

17. The system of claim 1 , in which
the monochromator comprises a double crystal monochromator.

18. The system of claim 1 , in which
the plurality of discrete structures comprises three or more structures.

19. The system of claim 1 , in which
the optical train comprises one or more x-ray optical components that are axially symmetric.

20. The system of claim 1 , additionally comprising:
an x-ray focusing optical element positioned between the monochromator and the mount.

21. An x-ray absorption measurement system, comprising:
a plurality of electron emitters and a plurality of anode targets, in which each anode target comprises a material selected for its x-ray generation properties;
said emitters and targets positioned such that each electron emitter is aligned to provide an electron beam to bombard a corresponding anode target to generate x-rays, and
the anode targets are aligned such that the positions at which x-rays are generated are aligned along a predetermined axis; and
at least one x-ray imaging optic, in which said x-ray imaging optic is positioned between an adjacent pair of the anode targets such that the x-ray imaging optic collects x-rays radiated from one of the targets of the pair and focuses the collected x-rays onto the other target of the pair;
said system further comprising:
an optical train, in which a portion of the optical train is also aligned along said predetermined axis, and is configured to collect x-rays generated by the anode target and produce an x-ray beam with predetermined beam properties;
a monochromator to select x-rays of a predetermined energy and bandwidth from the x-ray beam, and
additionally having the capability of

Assignees

• Sigray Inc

Inventors

• Yun Wenbing
• Lewis Sylvia Jia Yun
• Kirz Janos

Classifications

• H01J35/14

  Arrangements for concentrating, focusing, or directing the cathode ray · CPC title

• G21K2201/061

  characterised by a multilayer structure · CPC title

• G01N23/2076 Primary

  for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS · CPC title

• H01J35/08

  Anodes; Anti cathodes · CPC title

• G21K2201/064

  having a curved surface · CPC title