X-ray apparatus, method of using the same and X-ray irradiation method

Patent metadata

Field	Value
Publication number	US-9336917-B2
Application number	US-201013142787-A
Country	US
Kind code	B2
Filing date	Jun 30, 2010
Priority date	Jul 1, 2009
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

An X-ray apparatus that creates a virtual source having a narrow energy bandwidth and enables a high-resolution X-ray diffraction measurement; a method of using the same; and an X-ray irradiation method are provided. An X-ray apparatus 100 includes a monochromator 105 that focuses a divergent X-ray beam while dispersing it and a selection part 107 that is installed in a condensing position of the condensed X-ray beam for selecting an X-ray beam having a wavelength in a specific range, allowing it to pass through, and creating a virtual source. With this arrangement, it is possible to create a virtual source having a narrow energy bandwidth at a focal point 110 and by means of the virtual source a high-resolution X-ray diffraction measurement is available. By using the X-ray apparatus 100 , it is possible to sufficiently separate an X-ray beam having such an extremely narrow energy bandwidth as, for example, Kα1 ray from Kα2 ray. In addition, it is also possible to cut out part of continuous X-ray beams to create a virtual source.

First claim

The invention claimed is:

1. An X-ray apparatus comprising:
a monochromator that takes a divergent X-ray beam and focuses the X-ray beam while monochromating;
a selection part installed at a focused position of said monochromated X-ray beam, for selecting a specific wavelength in a narrow range, and creating a virtual source; and
one or more reflectors coordinating the selected specific wavelength having passed through said selection part.

2. The X-ray apparatus according to claim 1 , wherein
said one or more reflectors coordinate the selected specific wavelength having passed through said selection part and forms parallel beams.

3. The X-ray apparatus according to claim 1 , wherein
said one or more reflectors coordinate the selected specific wavelength having passed through said selection part and forms a focused beam.

4. The X-ray apparatus according to claim 1 , wherein:
said monochromator is fixed; and
said reflectors can be exchanged between one that coordinates an incident specific wavelength into a focused beam and one that coordinates an incident specific wavelength into parallel beams.

5. The X-ray apparatus according to claim 1 , further comprising a switching mechanism enabling switching of paths between a path that coordinates an X-ray beam emitted from said virtual source into a focused beam and a path that coordinates an X-ray beam emitted from said virtual source into parallel beams.

6. The X-ray apparatus according to claim 5 , comprising a reflector that coordinates an X-ray beam having passed through said selection part and forms parallel beams and a reflector that coordinates an X-ray beam having passed through said selection part and forms a focused beam, as said one or more reflectors, wherein
said switching mechanism enables switching of paths among a path that forms parallel beams via said reflector, a path that forms a focused beam via said reflector, and a path that forms a focused beam without the intervention of said reflector.

7. The X-ray apparatus according to claim 1 , wherein
said reflector is a multilayer mirror.

8. The X-ray apparatus according to claim 1 , further comprising an X-ray source generating a characteristic X-ray beam as said divergent X-ray beam.

9. The X-ray apparatus according to claim 1 , wherein
said monochromator is a Johann type monochromator or Johansson type monochromator.

10. The X-ray apparatus according to claim 1 , further comprising a detector detecting an X-ray beam that has been focused by said reflector and has passed through a specimen or has been reflected from the specimen, wherein
said detector has elongated unit detection regions arranged in parallel and is capable of discriminating an X-ray beam having energy between an upper limit value and a lower limit value from other beams by converting the X-ray beams received in said unit detection region into electric signals and detecting said electric signals.

11. A method of using an X-ray apparatus, wherein
said selection part passes a specific wavelength and prevents other wavelengths from passing in the X-ray apparatus according to claim 7 .

12. An X-ray irradiation method, wherein:
a monochromator takes a divergent X-ray beam and focuses the X-ray beam while monochromating; and
a specific wavelength in a narrow range is selected at a focused position of said monochromated X-ray beam, and used to create a virtual source; and
coordinating the selected specific wavelength by one or more reflectors.

Assignees

• Ozawa Tetsuya
• Matsuo Ryuji
• Jiang Licai
• Verman Boris
• Omote Kazuhiko
• Rigaku Denki Co Ltd

Inventors

• Ozawa Tetsuya
• Matsuo Ryuji
• Jiang Licai
• Verman Boris
• Omote Kazuhiko

Classifications

• G01J3/12

  Generating the spectrum; Monochromators · CPC title

• G21K1/062

  Devices having a multilayer structure · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• G21K2201/064

  having a curved surface · CPC title

• G21K1/06 Primary

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title