Charged particle beam apparatus

Patent metadata

Field	Value
Publication number	US-11211224-B2
Application number	US-201817049353-A
Country	US
Kind code	B2
Filing date	Apr 26, 2018
Priority date	Apr 26, 2018
Publication date	Dec 28, 2021
Grant date	Dec 28, 2021

Abstract

To improve detection efficiency of secondary particles without increasing a size of a charged particle beam apparatus, a charged particle beam apparatus according to the invention includes: a charged particle beam source configured to irradiate a sample with a primary particle beam; a scanning deflector configured to scan and deflect the primary particle beam to a desired position of the sample; and a detector configured to detect secondary particles emitted from the desired position. The charged particle beam apparatus further includes: a focusing lens electrode arranged coaxially with the primary particle beam and configured to generate a focusing electric field that is an electric field that focuses a trajectory of the secondary particles; and a mesh electrode configured to reduce leakage of the focusing electric field on a trajectory of the primary particle beam.

First claim

The invention claimed is:

1. A charged particle beam apparatus, comprising:
a charged particle beam source configured to irradiate a sample with a primary particle beam;
a scanning deflector configured to scan and deflect the primary particle beam to a desired position of the sample; and
a detector configured to detect secondary particles emitted from the desired position;
wherein the charged particle beam apparatus further comprises:
a focusing lens electrode arranged coaxially with the primary particle beam and configured to generate a focusing electric field that is an electric field that focuses a trajectory of the secondary particles; and
a mesh electrode configured to reduce leakage of the focusing electric field on a trajectory of the primary particle beam.

2. The charged particle beam apparatus according to claim 1 , wherein
the focusing lens electrode and the mesh electrode are arranged between the scanning deflector and the detector.

3. The charged particle beam apparatus according to claim 2 , wherein
the mesh electrode is arranged at least one of between the focusing lens electrode and the detector, and between the focusing lens electrode and the scanning deflector.

4. The charged particle beam apparatus according to claim 3 , wherein
the mesh electrode has a curved surface shape.

5. The charged particle beam apparatus according to claim 1 , wherein
the focusing lens electrode and the mesh electrode are arranged between the scanning deflector and the sample.

6. The charged particle beam apparatus according to claim 5 , wherein
the mesh electrode has a cylindrical shape or a truncated cone shape that forms a hole through which the primary particle beam passes.

7. The charged particle beam apparatus according to claim 6 , wherein
the mesh electrode includes a surface arranged between the focusing lens electrode and the sample, and a surface arranged between the focusing lens electrode and the scanning deflector.

8. The charged particle beam apparatus according to claim 5 , wherein
the focusing lens electrode and the mesh electrode are further arranged between the scanning deflector and the detector.

9. The charged particle beam apparatus according to claim 1 , wherein
the focusing lens electrode has a cylindrical shape.

10. The charged particle beam apparatus according to claim 9 , wherein
the focusing lens electrode is divided into a plurality along a circumferential direction.

11. The charged particle beam apparatus according to claim 1 , wherein
the focusing lens electrode and the mesh electrode are electrically insulated from each other, and a voltage is independently applied to each of the focusing lens electrode and the mesh electrode.

12. The charged particle beam apparatus according to claim 1 , wherein
the detector includes an upper detector that detects secondary particles passing through a hole of a diaphragm, and a lower detector that detects secondary particles colliding with the diaphragm, and
the charged particle beam apparatus further comprises a display device on which a GUI including an adjustment unit that adjusts an amount of the secondary particles detected by the upper detector and a display unit that displays an image formed based on detection by the upper detector and the lower detector is displayed.

Assignees

• Hitachi High Tech Corp

Inventors

• Okai Nobuhiro
• Bizen Daisuke
• Shojo Tomoyasu
• Suzuki Naomasa
• Fukuda Muneyuki

Classifications

• H01J2237/2449

  Detector devices with moving charges in electric or magnetic fields · CPC title

• H01J37/12

  electrostatic · CPC title

• H01J37/1474

  Scanning means · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J2237/281

  Bottom of trenches or holes · CPC title