Method of determining correction function

Patent metadata

Field	Value
Publication number	US-11209515-B2
Application number	US-202016848510-A
Country	US
Kind code	B2
Filing date	Apr 14, 2020
Priority date	Apr 23, 2019
Publication date	Dec 28, 2021
Grant date	Dec 28, 2021

Abstract

A method includes setting a setting duty ratio of a pulse to a predefined first setting duty ratio, detecting a measured value of power of a microwave, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level, calculating a correction value for the power for each setting power level on the basis of the error, and determining a first function indicating a relationship between the setting power level and the correction value by logarithmically approximating the relationship between the setting power level and the correction value, and determining the correction function indicating a relationship among the setting duty ratio, the setting power level, and the correction value by approximating the correction value defined by the first function, and the predefined correction value at a setting duty ratio of 100%, with a linear function.

First claim

What is claimed is:

1. A method of determining a correction function for correcting an error in a wave detector in a microwave output device measuring, by using the wave detector, power of a microwave which is output from a microwave generator and is pulse-modulated and controlling the microwave generator such that a measurement result matches setting power, the method comprising:
setting a setting duty ratio of a pulse to a predefined first setting duty ratio, detecting a measured value of the power of the microwave output from the microwave generator by using a calibration measuring device for each setting power level with regard to at least two setting power levels, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level;
calculating a correction value for the power for each setting power level on the basis of the error, and determining a first function indicating a relationship between the setting power level and the correction value at the first setting duty ratio by logarithmically approximating the relationship between the setting power level and the correction value; and
determining the correction function indicating a relationship among the setting duty ratio, the setting power level, and the correction value by approximating the correction value at the first setting duty ratio, defined by the first function, and the correction value which is predefined at a setting duty ratio of 100%, with a linear function.

2. The method of determining a correction function according to claim 1 ,
wherein the predefined correction value at the setting duty ratio of 100% is 0.

3. The method of determining a correction function according to claim 1 ,
wherein the correction function is a function for determining a correction value at a duty ratio equal to or higher than the first setting duty ratio, and
wherein, in the determining, a correction function at the first setting duty ratio or less is separately determined.

4. The method of determining a correction function according to claim 2 ,
wherein the correction function is a function for determining a correction value at a duty ratio equal to or higher than the first setting duty ratio, and
wherein, in the determining, a correction function at the first setting duty ratio or less is separately determined.

5. The method of determining a correction function according to claim 1 ,
wherein the microwave has a single frequency peak.

6. The method of determining a correction function according to claim 2 ,
wherein the microwave has a single frequency peak.

7. The method of determining a correction function according to claim 3 ,
wherein the microwave has a single frequency peak.

8. The method of determining a correction function according to claim 1 ,
wherein the correction function applied to a microwave having a single frequency peak is determined by executing the measuring, the calculating, and the determining by using the microwave having the single frequency peak, and
wherein the method further comprises
setting a setting duty ratio of a pulse to a predefined second setting duty ratio, detecting a measured value of the power of the microwave having a bandwidth, output from the microwave generator by using the calibration measuring device for each setting power level with regard to at least two setting power levels, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level;
calculating a difference between the error applied to the microwave having the single frequency peak and the error applied to the microwave having the bandwidth for each setting power level;
calculating a revision value with respect to the correction value for the power of the microwave having the single frequency peak for each setting power level on the basis of the difference, and determining a second function indicating a relationship between the setting power level and the revision value at the first setting duty ratio by logarithmically approximating the relationship between the setting power level and the revision value;
determining a revision term indicating a relationship among the setting duty ratio, the setting power level, and the revision value by approximating the revision value at the second setting duty ratio, defined by the second function, and the revision value which is predefined at the setting duty ratio of 100%, with a linear function; and
determining the correction function applied to the microwave having the bandwidth on the basis of the revision term and the correction function applied to the microwave having the single frequency peak.

9. The method of determining a correction function according to claim 2 ,
wherein the correction function applied to a microwave having a single frequency peak is determined by executing the measuring, the calculating, and the determining by using the microwave having the single frequency peak, and
wherein the method further comprises
setting a setting duty ratio of a pulse to a predefined second setting duty ratio, detecting a measured value of the power of the microwave having a bandwidth, output from the microwave generator by using the calibration measuring device for each setting power level with regard to at least two setting power levels, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level;
calculating a difference between the error applied to the microwave having the single frequency peak and the error applied to the microwave having the bandwidth for each setting power level;
calculating a revision value with respect to the correction value for the power of the microwave having the single frequency peak for each setting power level on the basis of the difference, and determining a second function indicating a relationship between the setting power level and the revision value at the first setting duty ratio by logarithmically approximating the relationship between the setting power level and the revision value;
determining a revision term indicating a relationship among the setting duty ratio, the setting power level, and the revision value by approximating the revision value at the second setting duty ratio, defined by the second function, and the revision value which is predefined at the setting duty ratio of 100%, with a linear function; and
determining the correction function applied to the microwave having the bandwidth on the basis of the revision term and the correction function applied to the microwave having the single frequency peak.

10. The method of determining a correction function according to claim 3 ,
wherein the correction function applied to a microwave having a single frequency peak is determined by executing the measuring, the calculating, and the determining by using the microwave having the single frequency peak, and
wherein the method further comprises
setting a setting duty ratio of a pulse to a predefined second setting duty ratio, detecting a measured value of the power of the microwave having a bandwidth, output from the microwave generator by using the calibration measuring device for each setting power level with regard to at least two setting power levels, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level;
calculating a difference between the error applied to the microwave having the single frequency peak and the error applied to the microwave having the bandwidth for each setting power level;
calculating a revision value with respect to the correction value for the power of the micr

Assignees

• Tokyo Electron Ltd

Inventors

• Kaneko Kazushi
• Ishida Yohei

Classifications

• G01R27/2605

  Measuring capacitance (capacitive sensors G01D5/24) · CPC title

• G01R35/00

  Testing or calibrating of apparatus covered by the other groups of this subclass · CPC title

• G01R27/02

  Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant (by measuring phase angle only G01R25/00) · CPC title

• G01R29/08

  Measuring electromagnetic field characteristics · CPC title

• G01R27/28

  Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response (in line transmission systems H04B3/46) · CPC title