High speed synchronization of plasma source/bias power delivery

Patent metadata

Field	Value
Publication number	US-11158488-B2
Application number	US-201916452716-A
Country	US
Kind code	B2
Filing date	Jun 26, 2019
Priority date	Jun 26, 2019
Publication date	Oct 26, 2021
Grant date	Oct 26, 2021

Abstract

A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

First claim

What is claimed is:

1. A radio frequency (RF) generator comprising:
a RF power source; and
a RF power controller coupled to the RF power source, the RF power controller generating a control signal to vary a first RF output from the RF power source to a load, the RF power controller configured to control at least one of the first RF output or a match network actuator in a first predetermined manner over a first predetermined segment of a second RF output from a source other than the RF power source applied to the load, the first predetermined segment of the second RF output being less than a full cycle of the second RF output,
wherein the first predetermined manner includes controlling at least one of a power of the first RF output, a frequency of the first RF output, or the match network actuator associated with the first RF output to increase power delivered to the load during the first predetermined segment.

2. The RF generator of claim 1 , wherein the first RF output applied to the load and the second RF output is a bias RF output signal applied to the load.

3. The RF generator of claim 1 , wherein the RF power controller receives a synchronization signal that varies in accordance with the second RF output and wherein the synchronization signal indicates the first predetermined segment of the second RF output.

4. The RF generator of claim 1 , wherein the first predetermined segment includes a negative voltage portion of the second RF output.

5. The RF generator of claim 1 , wherein the RF power controller increases the power of the first RF output during the first predetermined segment of the second RF output.

6. The RF generator of claim 1 , wherein the RF power controller turns off the RF power source during other than the first predetermined segment of the second RF output applied to the load.

7. The RF generator of claim 1 , wherein the RF power controller applies a power adjustment to the power of the first RF output in accordance with a timing that varies in accordance with a trigger signal, wherein the trigger signal indicates a relative position of the first predetermined segment.

8. The RF generator of claim 7 , wherein the power adjustment includes a plurality of power adjustments that the RF power controller applies to the first RF output in a predetermined order and timing in accordance with the trigger signal.

9. The RF generator of claim 7 , wherein the power adjustment varies in accordance with the power delivered by the RF power source.

10. The RF generator of claim 7 , wherein the RF power controller further comprises a playback module, the playback module configured to detect the trigger signal, the playback module initiating introduction of the power adjustment to RF output.

11. The RF generator of claim 10 , wherein the RF power controller further comprises a lookup table, the lookup table configured to store the power adjustment introduced by the playback module.

12. The RF generator of claim 11 , wherein the RF power controller further comprises an update module, the update module configured to update the power adjustment in accordance with an electrical characteristic of the RF output.

13. The RF generator of claim 12 wherein the electrical characteristic is power delivered to the RF generator by the RF power source.

14. The RF generator of claim 7 wherein the trigger signal is one of periodic, non-periodic, synchronous to a predetermined event, or asynchronous.

15. The RF generator of claim 1 , wherein the RF power controller controls the frequency by introducing a frequency offset to the first RF output in accordance with a timing that varies in accordance with a trigger signal, wherein the trigger signal indicates a relative position of the first predetermined segment.

16. The RF generator of claim 15 , wherein the frequency offset includes a plurality of frequencies that the RF power controller applies to the first RF output in a predetermined order and timing in accordance with the trigger signal.

17. The RF generator of claim 15 , wherein the frequency offset varies in accordance with an intermodulation distortion introduced by the second RF output.

18. A radio frequency (RF) generator comprising:
a first RF generator including a first power source generating a first RF signal applied to a load; and
a second RF generator including:
a second power source generating a second RF signal applied to the load; and
a power controller coupled to the second power source, the power controller configured to respond to a trigger signal and to generate a RF control signal and an actuator control signal, wherein the RF control signal adjusts an electrical parameter of the second RF signal and wherein the actuator control signal adjusts an actuator of a match network associated with the second RF signal to increase power delivered to the load during a first predetermined segment,
wherein the trigger signal indicates the first predetermined segment of the first RF signal and the first predetermined segment is less than a full cycle of the first RF signal, and
wherein the electrical parameter includes at least one of a power of the second RF signal or a frequency of the second RF signal.

19. The RF generator of claim 18 , wherein the second RF signal is a source signal applied to the load and the first RF signal is a bias signal applied to the load and wherein the load is a plasma chamber.

20. The RF generator of claim 18 , wherein the trigger signal varies in accordance with the first RF signal and wherein the power controller is configured to vary the RF control signal to control the electrical parameter at a positon of the second RF signal relative to the first RF signal.

21. The RF generator of claim 18 , wherein an adjustment to the electrical parameter includes a sequence of adjustments that the power controller applies to the second RF signal in accordance with the first predetermined segment.

22. The RF generator of claim 21 , wherein the power controller introduces the sequence of adjustments to the second RF signal with a fixed or variable interval between each one of the sequence of adjustments.

23. The RF generator of claim 18 , wherein the power controller updates adjustments in accordance with a property of the second RF signal.

24. The RF generator of claim 18 , wherein the power controller generates the trigger signal in accordance with an impedance of the load.

25. The RF generator of claim 18 , wherein the second RF generator further comprises a sensor for measuring an impedance at the load, the sensor generating a signal from which impedance fluctuations in the load are determined.

26. The RF generator of claim 18 , wherein the first predetermined segment includes a negative voltage portion of the first RF signal.

27. The RF generator of claim 26 wherein the RF control signal at least one of increases the power of the second RF signal during the first predetermined segment of the second RF signal or turns off the second power source during other than the first predetermined segment of the second RF signal applied to the load.

28. The RF generator of claim 18 , wherein the RF control signal introduces a frequency offset to the second RF signal in accordance with the first predetermined segment.

29. A method for generating a radio frequency (RF) signal comprising:
coupling a power controller to a RF power

Assignees

• Mks Instr Inc
• Lam Res Corp

Inventors

• Radomski Aaron T
• Gitlin Benjamin J
• Fisk Ii Larry J
• Oldziej Mariusz
• Burry Aaron M
• Smyka Jonathan W
• Marakhtanov Alexei
• Ji Bing
• Kozakevich Felix Leib
• Holland John
• Bhowmick Ranadeep

Classifications

• H01J37/32165

  Plural frequencies · CPC title

• H01J37/32146

  Amplitude modulation, includes pulsing · CPC title

• H01J37/32174 Primary

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01J2237/334

  Etching · CPC title

• H01J37/32183 Primary

  Matching circuits · CPC title