Multiple step edge fabrication

Patent metadata

Field	Value
Publication number	US-11145802-B2
Application number	US-201917262981-A
Country	US
Kind code	B2
Filing date	Oct 18, 2019
Priority date	Oct 19, 2018
Publication date	Oct 12, 2021
Grant date	Oct 12, 2021

Abstract

This disclosure relates to fabrication of step edges to fabricate Josephson junctions. A method comprises forming a layer of resist over the surface. The layer of resist comprises openings to expose a selected area of the surface, thereby forming two walls in the layer of resist on a perimeter of the selected area. The resist and the substrate are exposed to an ion beam, thereby etching the resist and the exposed areas of the surface. While exposing the resist and the substrate to the ion beam, the substrate is gradually rotated about an axis normal to the surface to thereby form two step edges at the respective two walls. Further, superconducting material is deposited onto the substrate in a meandering shape to form a path that crosses the two step edges multiple times and to form a Josephson junction each time the path crosses the step edges.

First claim

The invention claimed is:

1. A method of forming multiple step edges in a surface of a crystalline substrate, the method comprising:
forming a layer of resist over the surface, the layer of resist comprising openings to expose a selected area of the surface, thereby forming a first wall and a second wall in the layer of resist on a perimeter of the selected area; and
exposing the resist and the substrate to an ion beam, thereby etching the resist and the exposed areas of the surface to thereby create an upper level outside the selected area and a lower level within the selected area of the surface;
while exposing the resist and the substrate to the ion beam, gradually rotating the substrate about an axis normal to the surface to thereby form a first step edge at the first wall and a second step edge at the second wall; and
depositing superconducting material onto the substrate in a meandering shape to form a path that crosses the first and second step edges multiple times,
to form multiple Josephson junctions comprising at least one Josephson junction each time the path crosses one of the first and second step edges,
wherein the path comprises multiple connections on the lower level, each connection connecting one of the multiple Josephson junctions on the first step edge to one of the multiple Josephson junction on the second step edge to thereby form the meandering shape.

2. The method of claim 1 , wherein at least four junctions are formed and the four junctions are connected in series by the path.

3. The method of claim 2 , wherein at least eight junctions are formed.

4. The method of claim 1 , wherein the two walls are substantially parallel and opposing each other.

5. The method of claim 1 , wherein each of the multiple step edges defines an upper level and a lower level and the superconducting material is deposited to form
a first path section that crosses one of the two step edges from the upper level to the lower level;
a second path section that crosses the same one of the two step edges from the lower level to the upper level; and
a first connection on the lower level that connects the first path section to the second path section without reaching the upper level.

6. The method of claim 5 , wherein the first connection is parallel to the one of the two step edges.

7. The method of claim 5 , wherein the first path section, the second path section and the first connection form a first loop and material is deposited to form a second connection to connect the first loop to a second loop deposited on a different one of the two step edges.

8. The method of claim 1 , wherein the superconducting material is deposited onto the substrate to form a loop comprising two Josephson junctions each time the path crosses one of the two step edges.

9. The method of claim 1 , wherein the superconducting material is deposited onto the substrate to form an array comprising more than two Josephson junctions each time the path crosses one of the two step edges.

10. The method of claim 1 , wherein gradually rotating the substrate comprises continuously rotating the substrate.

11. The method of claim 10 , wherein continuously rotating the substrate comprises rotating the substrate at a constant rotation rate.

12. The method of claim 11 , wherein the rotation rate is greater than one rotation during exposing the resist and the substrate to the ion beam.

13. The method of claim 12 , wherein the rotation rate is more than 1 rotation per minute.

14. The method of claim 13 , wherein the rotation rate is more than 10 rotations per minute.

15. The method of claim 1 , wherein the two walls are opposing each other on either side of the exposed area and a distance between the two opposing walls is less than 20 μm.

16. The method of claim 1 , wherein junction parameters of the Josephson junctions are identical within manufacturing variations.

17. The method of claim 1 , wherein the selected area comprises multiple shapes each having two walls forming two respective step edges and the path crosses the two step edges of each shape multiple times.

18. The method of claim 17 , wherein the shapes are rectangular and arranged side by side such that the path crosses the two walls of all of the shapes in a straight line.

19. A device comprising:
a first wall and a second wall in a surface of a crystalline substrate on a perimeter of an etched area;
a first step edge at the first wall and a second step edge at the second wall;
a meandering path of superconducting material deposited onto the substrate, the path crossing the first and second step edges multiple times; and
multiple Josephson junctions comprising at least one Josephson junction formed within the path each time the path crosses one of the first and second step edges;
wherein the path comprises multiple connections on the lower level, each connection connecting one of the multiple Josephson junctions on the first step edge to one of the multiple Josephson junction on the second step edge to thereby form the meandering shape.

20. The device of claim 19 , wherein the device comprises at least four Josephson junctions connected in series formed within the path.

21. The device of claim 20 , wherein the device comprises at least eight Josephson junctions.

22. The device of claim 19 , wherein a distance between the two step edges is less than 20 μm.

Assignees

• Commw Scient Ind Res Org

Inventors

• Lazar Jeina
• Purches Wendy
• Mitchell Emma
• Lewis Chris

Classifications

• G01R33/0354 Primary

  SQUIDS · CPC title

• H01L27/18

  Electricity · mapped topic

• H01L39/2493 Primary

  Electricity · mapped topic

• H01L39/223

  Electricity · mapped topic

• H01L39/249

  Electricity · mapped topic