Testing system

Patent metadata

Field	Value
Publication number	US-11137358-B2
Application number	US-202016748258-A
Country	US
Kind code	B2
Filing date	Jan 21, 2020
Priority date	Jan 25, 2019
Publication date	Oct 5, 2021
Grant date	Oct 5, 2021

Abstract

A testing system for testing a workpiece for a characteristic by irradiating microwaves to the workpiece and also irradiating a laser beam at an irradiation position of the microwaves, receiving microwaves reflected at the irradiation position where the workpiece has a reflectivity increased by carriers generated through photoexcitation, and measuring a lifetime of the carriers. The testing system includes a chuck table that holds the workpiece, a microwave irradiation unit that irradiates the microwaves to the workpiece held on the chuck table, a microwave reception unit that receives microwaves reflected by the workpiece, and a laser beam irradiation unit that irradiates the laser beam onto the irradiation position to which the microwaves have been irradiated.

First claim

What is claimed is:

1. A testing system for testing a workpiece for a characteristic, the testing system comprising:
a chuck table that holds the workpiece;
microwave generator that generates and transmits microwaves to the workpiece held on the chuck table;
microwave receiver that receives microwaves reflected from the workpiece; and
a laser beam irradiation unit that irradiates a laser beam onto the workpiece at an irradiation position thereof where the microwaves have been irradiated,
wherein the laser beam irradiation unit includes a wavelength selection section capable of selecting a wavelength for the laser beam to be irradiated, and
the workpiece is tested for the characteristic by irradiating the microwaves from the microwave generator to the workpiece and also irradiating the laser beam from the laser beam irradiation unit onto the workpiece at the irradiation position, receiving, by the microwave receiver, microwaves reflected at the irradiation position where the workpiece has a reflectivity increased by carriers generated through photoexcitation, and measuring a lifetime of the carriers.

2. The testing system according to claim 1 , wherein the laser beam irradiation unit includes a white light source as a light source and a plurality of kinds of bandpass filters as the wavelength selection section, and the bandpass filters are configured to selectively extract and irradiate light of a plurality of wavelengths out of light from the white light source.

3. The testing system according to claim 2 , wherein the white light source is selected from a group consisting of a super luminescent diode light source, an amplified spontaneous emission light source, a supercontinuum light source, a light emitting diode light source, a halogen light source, a xenon light source, a mercury light source, and a metal halide light source.

4. The testing system according to claim 1 , wherein the laser beam irradiation unit includes variable-wavelength laser generation means.

5. The testing system according to claim 1 , further comprising a bandpass filter plate including the bandpass filters and a pulse motor connected to the bandpass filter plate that rotates the bandpass filter plate.

Assignees

• Disco Corp

Inventors

• Nomaru Keiji
• Sawabe Taiki

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• G01F23/802

  Particular electronic circuits for digital processing equipment · CPC title

• G01N22/00 Primary

  Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more (G01N3/00 - G01N17/00, G01N24/00 take precedence) · CPC title

• G01N21/3581

  using far infrared light; using Terahertz radiation · CPC title

• G01N22/02 Primary

  Investigating the presence of flaws · CPC title