Laser processing apparatus

Patent metadata

Field	Value
Publication number	US-2016172182-A1
Application number	US-201514957854-A
Country	US
Kind code	A1
Filing date	Dec 3, 2015
Priority date	Dec 12, 2014
Publication date	Jun 16, 2016
Grant date	—

Abstract

A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator which oscillates a laser beam, an output power adjustment unit which adjusts output power of the laser beam, a condenser which converges the laser beam and irradiates the converged laser beam upon a workpiece held on a chuck table, and a rocking unit which is disposed between the laser oscillator and the condenser and rocks the laser beam oscillated by the laser oscillator in an X-axis direction and a Y-axis direction. A controller has a memory in which a processing controlling program for carrying out processing for the workpiece held on the chuck table and a marking controlling program for carrying out marking for the workpiece are stored. The processing controlling program and the marking controlling program are selected by a program selection signal from an inputting unit.

First claim

What is claimed is:

1 . A laser processing apparatus, comprising:
a chuck table having a holding face defined by an X axis and a Y axis for holding a workpiece thereon; laser beam irradiation means for irradiating a laser beam upon the workpiece held on the chuck table; X-axis moving means for moving the chuck table and the laser beam irradiation means relative to each other in the X-axis direction; Y-axis moving means for moving the chuck table and the laser beam irradiation means relative to each other in the Y-axis direction; and control means for controlling the laser beam irradiation means, the X-axis moving means and the Y-axis moving means; the laser beam irradiation means including
laser beam oscillation means for oscillating a laser beam,
output power adjustment means for adjusting output power of the laser beam oscillated by the laser beam oscillation means,
a condenser configured to converge the laser beam oscillated by the laser beam oscillation means and irradiate the converged laser beam upon the workpiece held on the chuck table, and
rocking means disposed between the laser beam oscillation means and the condenser for rocking the laser beam oscillated by the laser beam oscillation means in the X-axis direction and the Y-axis direction;
the control means including a memory in which a processing controlling program for carrying out processing for the workpiece held on the chuck table and a marking controlling program for applying a marking to the workpiece are stored; the processing controlling program and the marking controlling program being selected by a program selection signal from inputting means.

2 . The laser processing apparatus according to claim 1 , wherein the laser beam irradiation means includes a wavelength conversion mechanism configured to convert a wavelength of the laser beam oscillated by the laser beam oscillation means.

Assignees

• Disco Corp

Inventors

• Morikazu Hiroshi
• Murazawa Naoki
• Takeda Noboru

Classifications

• H10W46/401

  for identification or tracking · CPC title

• H10W46/103

  alphanumeric information, e.g. words, letters or serial numbers · CPC title

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/7402

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title