Vacuum pump, and connector and control device applied to vacuum pump

Patent metadata

Field	Value
Publication number	US-11081845-B2
Application number	US-201716469794-A
Country	US
Kind code	B2
Filing date	Dec 8, 2017
Priority date	Dec 28, 2016
Publication date	Aug 3, 2021
Grant date	Aug 3, 2021

Abstract

A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.

First claim

What is claimed is:

1. A vacuum pump, comprising:
a connector that is disposed on a side portion of a base portion of a pump body and has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body,
wherein a surface of the connector through which the plurality of pins extend in a radial direction is longer in a lateral direction than in an axial direction of the pump body, and
wherein the lateral direction and the radial direction are perpendicular to the axial direction,

a substrate for electrical connection is fixed to atmosphere-side end portions of the plurality of pins, and
the substrate is formed by a wiring pattern having a multilayer structure in a thickness direction.

2. The vacuum pump according to claim 1 , wherein the plurality of pins of the connector are arranged in such a manner that the number of rows of pins in the lateral direction of the pump body is greater than the number of rows of pins in the axial direction.

3. The vacuum pump according to claim 1 , wherein, of the plurality of pins, large-diameter pins are disposed at a central part of the connector, and
small-diameter pins are disposed around the large-diameter pins.

4. The vacuum pump according to claim 3 , wherein, of the plurality of electrical cables, large-diameter electrical cables are connected to end portions of the large-diameter pins on the inside of the pump body.

5. The vacuum pump according to claim 1 , comprising a control device for controlling the pump body attachably and detachably with respect to the base portion, wherein
the substrate being provided with a terminal and the substrate being electrically connected to the control device via a second electrical cable connected to the terminal.

6. A connector which is installed in the vacuum pump described in claim 1 .

7. A control device which is applied to the vacuum pump described claim 1 and configured to be attachable and detachable by moving in the radial direction with respect to the pump body.

Assignees

• Edwards Japan Ltd

Inventors

• Sun Yanbin
• SAEGUSA Kengo
• Sakaguchi Yoshiyuki
• Omori Hideki

Classifications

• F04D25/068

  Mechanical details of the pump control unit (pump control details F04D27/00) · CPC title

• F04D29/40

  Casings; Connections of working fluid {(bleed or by-pass valves F04D15/0011, F04D27/0215)} · CPC title

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title

• H01R9/16

  Fastening of connecting parts to base or case; Insulating connecting parts from base or case · CPC title

• H01R12/75

  connecting to cables except for flat or ribbon cables · CPC title