Linear optical phase modulators
US-10216016-B2 · Feb 26, 2019 · US
US11079654B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11079654-B2 |
| Application number | US-201916361152-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 21, 2019 |
| Priority date | Apr 28, 2016 |
| Publication date | Aug 3, 2021 |
| Grant date | Aug 3, 2021 |
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An optical phase shifter may include a waveguide core that has a top surface, and a semiconductor contact that is laterally displaced relative to the waveguide core and is electrically connected to the waveguide core. A top surface of the semiconductor contact is above the top surface of the waveguide core. The waveguide core may include a p-type core region and an n-type core region. A p-type semiconductor region may be in physical contact with the n-type core region of the waveguide core, and an n-type semiconductor region may be in physical contact with the p-type core region of the waveguide core. A phase shifter region and a light-emitting region may be disposed at different depth levels, and the light-emitting region may emit light from a phase shifter region that is in a position adjacent to the light-emitting region.
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What is claimed is: 1. An integrated optical device comprising: a waveguide cladding volume; a waveguide layer within the waveguide cladding volume, wherein the waveguide layer comprises at least one waveguide core that is elongated in a longitudinal direction, wherein the waveguide core and a portion of the waveguide cladding volume form a waveguide; and a perturbation layer within the waveguide cladding volume separated from the waveguide layer in a depth direction perpendicular to the longitudinal direction, wherein the perturbation layer comprises: a first emitter layer comprising a first plurality of emitters separated from the waveguide core in the depth direction by a first separation distance that is greater than at least half of a thickness of the first emitter layer in the depth direction, wherein the first plurality of emitters overlap with the waveguide core along at least the emission length; and a second emitter layer comprising a second plurality of emitters, wherein the second plurality of emitters are separated from the first plurality of emitters in the depth direction by a second separation distance that is greater than at least half of a thickness of the first emitter layer or the second emitter layer in the depth direction; wherein a sum of the first separation distance, the thickness of the first emitter layer, the second separation distance, and the thickness of the second emitter layer is less than 2 times a single wavelength of light that the waveguide is configured to guide; and wherein the first and second separation distances and the thicknesses of the first and second emitter layers are configured such that the perturbation layer comprises an antenna from which light in the waveguide core is perturbed and emitted from the integrated optical device over an emission length in the longitudinal direction. 2. The integrated optical device of claim 1 , wherein the first separation distance is less than a single wavelength of the light that the waveguide is configured to guide. 3. The integrated optical device of claim 1 , wherein a rate at which light is emitted from the integrated optical device over the emission length is selected based at least in part on the first separation distance, and a direction from at which light is emitted from the integrated optical device is selected based at least in part on the second separation distance. 4. The integrated optical device of claim 1 , wherein the second plurality of emitters is offset by an offset distance in the longitudinal direction relative to the first plurality of emitters. 5. The integrated optical device of claim 4 , wherein the offset distance and the second separation distance are configured to emit light from the integrated optical device in a single direction. 6. The integrated optical device of claim 5 , wherein the offset distance is approximately ±λ eff /4+mλ eff /2, wherein λ eff is an effective wavelength of light guided by the waveguide and m is an integer. 7. The integrated optical device of claim 5 , wherein the second separation distance is approximately λ c /4+nλ c /2, wherein n is an integer and λ c is an effective wavelength of light in the cladding volume. 8. The integrated optical device of claim 1 , wherein: each of the first plurality of emitters has a first length in the longitudinal direction; and each of the second plurality of emitters has a second length in the longitudinal direction, wherein the second length is different from the first length. 9. The integrated optical device of claim 1 , wherein the thickness of the first emitter layer is less than the thickness of the second emitter layer, wherein the first thickness and the second thickness are in the depth direction. 10. The integrated optical device of claim 1 , wherein the first plurality of emitters are formed from a first material and the second plurality of emitters are formed from a second material that is different from the first material. 11. The integrated optical device of claim 10 , wherein a dielectric constant of the second material is greater than a dielectric constant of the first material. 12. A method of forming an integrated optical device, the method comprising: forming a waveguide cladding volume; forming a waveguide layer within the waveguide cladding volume, wherein the waveguide layer comprises at least one waveguide core that is elongated in a longitudinal direction, wherein the waveguide core and a portion of the waveguide cladding volume form a waveguide; and forming a perturbation layer within the waveguide cladding volume separated from the waveguide layer in a depth direction perpendicular to the longitudinal direction, wherein the perturbation layer comprises: a first emitter layer comprising a first plurality of emitters separated from the waveguide core in the depth direction by a first separation distance that is greater than at least half of a thickness of the first emitter layer in the depth direction, wherein the first plurality of emitters overlap with the waveguide core along at least the emission length; and a second emitter layer comprising a second plurality of emitters, wherein the second plurality of emitters are separated from the first plurality of emitters in the depth direction by a second separation distance that is greater than at least half of a thickness of the first emitter layer or the second emitter layer in the depth direction; wherein a sum of the first separation distance, the thickness of the first emitter layer, the second separation distance, and the thickness of the second emitter layer is less than 2 times a single wavelength of light that the waveguide is configured to guide; and wherein the first and second separation distances and the thicknesses of the first and second emitter layers are configured such that the perturbation layer comprises an antenna from which light in the waveguide core is perturbed and emitted from the integrated optical device over an emission length in the longitudinal direction.
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