Optical device

Patent metadata

Field	Value
Publication number	US-11079653-B2
Application number	US-201916361142-A
Country	US
Kind code	B2
Filing date	Mar 21, 2019
Priority date	Apr 28, 2016
Publication date	Aug 3, 2021
Grant date	Aug 3, 2021

Abstract

An optical phase shifter may include a waveguide core that has a top surface, and a semiconductor contact that is laterally displaced relative to the waveguide core and is electrically connected to the waveguide core. A top surface of the semiconductor contact is above the top surface of the waveguide core. The waveguide core may include a p-type core region and an n-type core region. A p-type semiconductor region may be in physical contact with the n-type core region of the waveguide core, and an n-type semiconductor region may be in physical contact with the p-type core region of the waveguide core. A phase shifter region and a light-emitting region may be disposed at different depth levels, and the light-emitting region may emit light from a phase shifter region that is in a position adjacent to the light-emitting region.

First claim

What is claimed is:

1. An integrated optical device, comprising:
a plurality of waveguide cores disposed in an array oriented perpendicular to a longitudinal direction, wherein each waveguide core of the plurality of waveguide cores is elongated in the longitudinal direction;
a plurality of diode signal contacts disposed in a first signal contact array oriented in a transverse direction that is perpendicular to the longitudinal direction, wherein a respective waveguide core of the plurality of waveguide cores separates each diode signal contact of the plurality of diode signal contacts;
a plurality of diode ground contacts disposed in a first ground contact array oriented in the transverse direction, wherein a respective waveguide core of the plurality of waveguide cores separates each diode ground contact of the plurality of diode ground contacts; and
a plurality of diodes disposed in an array perpendicular to the longitudinal direction, wherein at least two diodes of the plurality of diodes each having an n-p-n-p junction structure that comprises:
a corresponding portion of a waveguide core of the plurality of waveguide cores that comprises a p-type core region and an n-type core region;
a p-type semiconductor region in direct physical contact with the n-type core region of the corresponding portion of the waveguide core;
an n-type semiconductor region in direct physical contact with the p-type core region of the corresponding portion of the waveguide core;
a corresponding diode ground contact of the plurality of diode ground contacts; and
a corresponding diode signal contact of the plurality of diode signal contacts.

2. The integrated optical device of claim 1 , wherein, for a given diode:
the corresponding diode ground contact is at a first position in the transverse direction and is at a first location along the longitudinal direction; and
the corresponding diode signal contact is staggered at a second position in the transverse direction adjacent to the first position and at a second location along the longitudinal direction adjacent to the first location.

3. The integrated optical device of claim 1 , further comprising:
a plurality of signal contact arrays comprising the first signal contact array; and
a plurality of ground contact arrays comprising the first ground contact array;
wherein the plurality of diodes comprises a plurality of arrays of diodes, with each diode being: aligned with at least one neighboring diode along the longitudinal direction in an adjacent array of diodes, and aligned with at least one neighboring diode along the transverse direction in the same array of diodes.

4. The integrated optical device of claim 3 , wherein each signal contact array of the plurality of signal contact arrays is configured to be independently controlled by isolating neighboring diodes in the arrays of diodes with electrical isolation material.

5. The integrated optical device of claim 1 , wherein each diode signal contact of the plurality of diode signal contacts is electrically isolated from the other diode signal contacts of the plurality of diode signal contacts.

6. The integrated optical device of claim 1 , wherein a length of each diode signal contact of the plurality of diode signal contacts in the longitudinal direction is different from a length of each diode ground contact of the plurality of diode ground contacts in the longitudinal direction.

7. The integrated optical device of claim 1 , wherein the plurality of diode signal contacts and the plurality of diode ground contacts are epitaxially grown.

8. The integrated optical device of claim 4 , wherein the electrical isolation material is the same material as the waveguide cores.

9. The integrated optical device of claim 1 , wherein a pitch of the plurality of waveguide cores in the transverse direction is substantially the same as a pitch of a plurality of positions of longitudinally-aligned columns of alternating diode signal contacts and diode ground contacts at the same position in the transverse direction.

10. A method of fabricating an integrated optical device, comprising:
forming a plurality of waveguide cores disposed in an array oriented perpendicular to a longitudinal direction, wherein each waveguide core of the plurality of waveguide cores is elongated in the longitudinal direction;
forming a plurality of diode signal contacts disposed in a first signal contact array oriented in a transverse direction that is perpendicular to the longitudinal direction, wherein a respective waveguide core of the plurality of waveguide cores separates each diode signal contact of the plurality of diode signal contacts;
forming a plurality of diode ground contacts disposed in a first ground contact array oriented in the transverse direction, wherein a respective waveguide core of the plurality of waveguide cores separates each diode ground contact of the plurality of diode ground contacts; and
forming a plurality of diodes disposed in an array perpendicular to the longitudinal direction, wherein at least some diodes of the plurality of diodes each having an n-p-n-p junction structure that comprises:
a corresponding portion of a waveguide core of the plurality of waveguide cores that comprises a p-type core region and an n-type core region;
a p-type semiconductor region in direct physical contact with the n-type core region of the corresponding portion of the waveguide core;
an n-type semiconductor region in direct physical contact with the p-type core region of the corresponding portion of the waveguide core;
a corresponding diode ground contact of the plurality of diode ground contacts; and
a corresponding diode signal contact of the plurality of diode signal contacts.

11. The method of claim 10 , wherein each of two or more of the diode ground contacts in the first ground contact array is substantially aligned along the longitudinal direction with a respective diode signal contact in the first signal contact array at substantially the same position in the transverse direction.

12. The integrated optical device of claim 1 , wherein each of two or more of the diode ground contacts in the first ground contact array is substantially aligned along the longitudinal direction with a respective diode signal contact in the first signal contact array at substantially the same position in the transverse direction.

Assignees

• Analog Photonics LLC

Inventors

• Watts Michael
• Hosseini Ehsan
• Poulton Christopher
• Timurdogan Erman

Classifications

• G02F1/292

  by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31) · CPC title

• G02F2203/10

  plasmon · CPC title

• G02F2203/20

  Intrinsic phase difference, i.e. optical bias, of an optical modulator; Methods for the pre-set thereof · CPC title

• G02F2203/50

  Phase-only modulation · CPC title

• G02B6/29331

  operating by evanescent wave coupling · CPC title