Ring modulators with low-loss and large free spectral range (fsr) on a silicon-on-insulator (soi) platform
US-2024369864-A1 · Nov 7, 2024 · US
US9110348B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9110348-B2 |
| Application number | US-201414260883-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 24, 2014 |
| Priority date | Oct 26, 2011 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Provided is an optical element including an optical waveguide including a core formed from: a rib part; and a first and second slab parts sandwiching the rib part. The first slab part includes a P-type region, the second slab part includes an N-type region, the rib part includes a P-type region which is in contact with the P-type region provided in the first slab part, and an N-type region which is in contact with the N-type region provided in the second slab part. The rib part includes a top portion which is located above the first and second slab parts and includes an undoped region formed from at least one of an intrinsic region and a low-concentration doping region which is doped at a dopant concentration 1/10 or less of a dopant concentration in at least one of the adjacent P-type region and the adjacent N-type region.
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What is claimed is: 1. An optical element comprising an optical waveguide comprising a core formed from: a rib part; and a first and second slab parts which are located on both sides of the rib part so as to sandwich the rib part and thinner than the rib part, wherein the rib part and the first and second slab parts of the core are integrally formed by a semiconductor single crystal, the first slab part comprises a P-type region which is doped to be P type, the second slab par…
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