X-ray inspection device

Patent metadata

Field	Value
Publication number	US-11079345-B2
Application number	US-201816958556-A
Country	US
Kind code	B2
Filing date	Sep 5, 2018
Priority date	Dec 28, 2017
Publication date	Aug 3, 2021
Grant date	Aug 3, 2021

Abstract

An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.

First claim

The invention claimed is:

1. An X-ray inspection device comprising:
a sample placement unit for placing a sample as an inspection target;
a sample placement unit positioning mechanism for moving the sample placement unit;
a goniometer including first and second rotation members that rotate independently of each other;
an X-ray irradiation unit that is installed on the first rotation member and irradiates X-rays focusing onto a preset measurement point; and
a two-dimensional X-ray detector installed on the second rotation member,
wherein the goniometer includes a θs rotation mechanism for rotating the first rotation member around a θs-axis that passes through the measurement point and extends in a horizontal direction to set an incident angle of X-rays from the X-ray irradiation unit to the sample placed in the sample placement unit, and a θd rotation mechanism for rotating the second rotation member around a θd-axis coincident with the θs-axis to set a scanning angle of the X-ray detector,
wherein the sample placement unit positioning mechanism includes a ϕ rotation mechanism for rotating the sample placement unit around a ϕ-axis orthogonal to a surface of the sample placed in the sample placement unit, an X movement mechanism for linearly moving the sample placement unit and the ϕ-axis in an X direction intersecting perpendicularly to the θs-axis and the θd-axis, a Y movement mechanism for linearly moving the sample placement unit and the ϕ-axis in a Y direction intersecting perpendicularly to the X direction, a Z movement mechanism for moving the sample placement unit in a Z direction orthogonal to the surface of the sample placed in the sample placement unit, a χ rotation mechanism for rotating the sample placement unit and the ϕ-axis around a χ-axis that is orthogonal to the θs-axis and the θd-axis at the measurement point and extends in the horizontal direction, and a χω rotation mechanism that rotates the sample placement unit and the ϕ-axis around a χω-axis that is orthogonal to the χ-axis at the measurement point and extends in parallel to the surface of the sample placed in the sample placement unit, and is rotated around the χ-axis by the χ rotation mechanism, and
wherein the X-ray irradiation unit is configured to focus X-rays in a lateral direction that intersects perpendicularly to an optical axis of the X-rays and is parallel to the θs-axis, and also focus X-rays in a longitudinal direction that intersects perpendicularly to an optical axis of the X-rays and intersects perpendicularly to the θs-axis.

2. The X-ray inspection device according to claim 1 , wherein the X-ray irradiation unit is configured to focus X-rays within 100 μm or less, to full width at half maximum of the peak, in each of the lateral direction and the longitudinal direction at the measurement point.

3. The X-ray inspection device according to claim 1 , wherein the Y movement mechanism is configured so that a direction (Y direction) in which the sample placement unit is moved in a state where the sample placement unit is horizontally arranged by the χ rotation mechanism is parallel to the θs-axis and the θd-axis, and functions as a sample exchange mechanism for arranging the sample placement unit at a preset sample exchange position by moving the sample placement unit in the Y direction.

4. The X-ray inspection device according to claim 1 , further comprising a controller having a control function of controlling the sample placement unit positioning mechanism, the goniometer including the first and second rotation members, and the X-ray irradiation unit to perform a rocking curve measurement of in-plane diffraction, wherein the controller has a control function of driving the χ rotation mechanism to vertically orient the surface of the sample placed in the sample placement unit, driving the Z movement mechanism to align an inspection target site of the sample placed in the sample placement unit with a height of the measurement point, driving ϕ the rotation mechanism, the X movement mechanism and the Y movement mechanism to position the inspection target site of the sample at the measurement point in a preset direction, further driving the θs rotation mechanism and the χω rotation mechanism to irradiate X-rays from the X-ray irradiation unit in a direction that is nearly parallel to the surface of the sample, driving the θd rotation mechanism interlockingly with the θs rotation mechanism to arrange the two-dimensional X-ray detector at a position where diffracted X-rays appearing from the sample according to Bragg's law are detected, and driving the θs rotation mechanism to change an incident angle of X-rays to the sample and perform a rocking curve measurement of in-plane diffraction.

5. The X-ray inspection device according to claim 1 , further comprising a controller having a control function of controlling the sample placement unit positioning mechanism, the goniometer including the first and second rotation members, and the X-ray irradiation unit to perform a rocking curve measurement of in-plane diffraction, wherein the controller has a control function of driving the χ rotation mechanism to vertically orient the surface of the sample placed in the sample placement unit, driving the Z movement mechanism to align an inspection target site of the sample placed in the sample placement unit with a height of the measurement point, driving ϕ the rotation mechanism, the X movement mechanism and the Y movement mechanism to position the inspection target site of the sample at the measurement point in a preset direction, further driving the θs rotation mechanism to irradiate X-rays from the X-ray irradiation unit in a direction that is nearly parallel to the surface of the sample, driving the θd rotation mechanism interlockingly with the θs rotation mechanism to arrange the two-dimensional X-ray detector at a position where diffracted X-rays appearing from the sample according to Bragg's law are detected, and driving the ϕ rotation mechanism and interlocking the X movement mechanism and the Y movement mechanism the driving of the ϕ rotation mechanism to change an incident angle of X-rays to the sample while holding an inspection target site of the sample at the measurement point, thereby performing a rocking curve measurement of in-plane diffraction.

6. The X-ray inspection device according to claim 1 , further comprising a controller having a control function of controlling the sample placement unit positioning mechanism, the goniometer including the first and second rotation members, and the X-ray irradiation unit to perform a rocking curve measurement of in-plane diffraction, wherein the controller has a control function of driving the χ rotation mechanism to vertically orient the surface of the sample placed in the sample placement unit, driving the Z movement mechanism to align an inspection target site of the sample placed in the sample placement unit with a height of the measurement point, driving the ϕ rotation mechanism, the X movement mechanism and the Y movement mechanism to position the inspection target site of the sample at the measurement point in a preset direction, further driving the θ rotation mechanism and the χω rotation mechanism to irradiate X-rays from the X-ray irradiation unit in a direction that is nearly parallel to the surface of the sample, driving the θd rotation mechanism interlockingly with the θs rotation mechanism to arrange the two-dimensional X-ray detector at a position where diffracted X-rays appearing from the sample according to Bragg's law are detected, and performing a rocking curve measurement of in-plane diffraction within a range of a focusing angle of X-rays that are focused and incident from the X-ray irradiation unit to the sample.

7. The X-ray inspection device accord

Assignees

• Rigaku Denki Co Ltd

Inventors

• Matsushima Naoki
• Ogata Kiyoshi
• Omote Kazuhiko
• YOSHIHARA Sei
• Ito Yoshiyasu
• Motono Hiroshi
• Takahashi Hideaki
• HIGUCHI Akifusa
• Umegaki Shiro
• Asano Shigematsu
• YAMAGUCHI Ryotaro
• HORADA Katsutaka

Classifications

• G01N23/20016 Primary

  Goniometers · CPC title

• G01N2223/331

  rocking curve analysis · CPC title

• G01N2223/50

  Detectors · CPC title

• G01N23/207

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title

• G01N2223/056

  diffraction · CPC title