Neutralizing gas system for furnace

Patent metadata

Field	Value
Publication number	US-11072560-B2
Application number	US-201816100922-A
Country	US
Kind code	B2
Filing date	Aug 10, 2018
Priority date	Aug 29, 2017
Publication date	Jul 27, 2021
Grant date	Jul 27, 2021

Abstract

A method of preparing an optical preform, comprises the steps of: positioning an optical preform comprising silica within a cavity of a furnace; passing an etchant gas into the furnace and at least one of through an open channel defined in the optical preform and around the optical preform; and passing a neutralizing gas into the cavity of the furnace, the neutralizing gas configured to neutralize the etchant gas.

First claim

What is claimed is:

1. A method of preparing an optical preform, comprising the steps of:
positioning an optical preform comprising silica within a cavity of a furnace;
passing an etchant gas into the furnace and at least one of through an open channel defined in the optical preform and around the optical preform after the optical preform has been consolidated; and
passing a neutralizing gas into the cavity of the furnace when the etchant gas passes into the furnace, wherein the neutralizing gas is configured to neutralize the etchant gas, and wherein the neutralizing gas is passed at a flow rate such that a molar ratio of etchant gas entering the furnace to neutralizing gas entering the furnace is ≥1.1.

2. The method of claim 1 , further comprising the step of:
etching the open channel of the optical preform using the etchant gas.

3. The method of claim 1 , wherein the step of passing the etchant gas further comprises: passing the etchant gas through a centerline of the optical preform.

4. The method of claim 3 , further comprising the step of:
passing the neutralizing gas into the cavity of the furnace proximate an exit of the open channel of the optical preform.

5. The method of claim 1 , wherein the step of passing a neutralizing gas further comprises the step of:
passing the neutralizing gas at a flow rate such that a molar ratio of etchant gas entering the furnace to neutralizing gas entering the furnace is ≥1.1 and ≤2.0.

6. The method of claim 5 , wherein the step of passing a neutralizing gas further comprises the step of:
passing the neutralizing gas at a flow rate such that a molar ratio of etchant gas entering the furnace to neutralizing gas entering the furnace is >0.2 and ≤1, wherein the neutralizing gas comprises SiCl 4 and the etchant gas comprises SF 6 .

7. The method of claim 1 , further comprising the step of:
heating the furnace to about 1000° C. or greater.

8. The method of claim 1 , wherein the step of passing a neutralizing gas further comprises the step of:
passing the neutralizing gas at a flow rate such that a molar ratio of etchant gas entering the furnace to neutralizing gas entering the furnace is ≥4.

9. The method of claim 1 , wherein the step of passing a neutralizing gas further comprises the step of:
passing the neutralizing gas at a flow rate such that a molar ratio of etchant gas entering the furnace to neutralizing gas entering the furnace is ≥5.

10. A method of operating a furnace, comprising the steps of:
positioning an optical preform within a muffle of a furnace;
passing an etchant gas comprising fluorine at a first molar flow rate into the furnace and through a centerline channel of the optical preform after the optical preform has been consolidated; and
passing a neutralizing gas comprising silicon at a second molar flow rate into the cavity of the furnace when the etchant gas is passed into the furnace, wherein the neutralizing gas is configured to neutralize the etchant gas, and wherein a ratio of the first molar flow rate into the furnace to the second molar flow rate into the furnace is ≥1.1 and ≤2.

11. The method of claim 10 , further comprising the step of:
heating the furnace to a temperature from about 1000° C. to about 1600° C.

12. The method of claim 10 , wherein the step of positioning the optical preform within a muffle of the furnace further comprises the step of:
positioning the optical preform within a muffle comprising silicon.

Assignees

• Corning Inc

Inventors

• Bookbinder Dana Craig
• Fiacco Richard Michael
• Tandon Pushkar

Classifications

• C03B37/01228 Primary

  Removal of preform material (C03B37/01251 takes precedence) · CPC title

• C03B37/01466

  Means for changing or stabilising the diameter or form of tubes or rods (C03B37/01861 takes precedence) · CPC title

• C03B37/0146

  Furnaces therefor, e.g. muffle tubes, furnace linings · CPC title

• C03B37/01446

  Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering (C03B37/01853 takes precedence) · CPC title

• C03C25/68 Primary

  by etching · CPC title