III-N to rare earth transition in a semiconductor structure

Patent metadata

Field	Value
Publication number	US-11063114-B2
Application number	US-201916688162-A
Country	US
Kind code	B2
Filing date	Nov 19, 2019
Priority date	Nov 20, 2018
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

In view of the high-temperature issues in III-N layer growth process, embodiments described herein use layered structure including a rare earth oxide (REO) or rare earth nitride (REN) buffer layer and a polymorphic III-N-RE transition layer to transit from a REO layer to a III-N layer. In some embodiments, the piezoelectric coefficient of III-N layer is increased by introduction of additional strain in the layered structure. The polymorphism of RE-III-N nitrides can then be used for lattice matching with the III-N layer.

First claim

What is claimed is:

1. A layered structure, comprising:
a substrate;
a rare earth containing buffer layer disposed over the substrate; and
a III-N rare earth transition layer disposed over the rare earth containing buffer layer,
wherein the III-N rare earth transition layer comprises:
a plurality of sublayers, each sublayer having an in-plane lattice constant,
wherein a first sublayer of the plurality of sublayers has a first in-plane lattice constant at an upper surface of the III-N rare earth transition layer,
wherein a second sublayer of the plurality of sublayers has a second in-plane lattice constant at a lower surface of the III-N rare earth transition layer, the lower surface coupled to the rare earth containing buffer layer and opposite the upper surface, and
wherein the first in-plane lattice constant is less than the second in-plane lattice constant.

2. The layered structure of claim 1 , wherein the rare earth containing buffer layer is selected from a group consisting of a rare earth oxide or a rare earth nitride.

3. The layered structure of claim 2 , wherein:
the rare earth containing buffer layer has a first in-plane lattice constant at an upper surface of the rare earth containing buffer layer, the upper surface coupled to the III-N rare earth transition layer,
the rare earth containing buffer layer has a second in-plane lattice constant at a lower surface of the rare earth containing buffer layer, the lower surface coupled to the substrate, and
the first in-plane lattice constant is less than the second in-plane lattice constant.

4. The layered structure of claim 1 , wherein the III-N rare earth transition layer comprises at least three sublayers of ScAlN and ScGaN.

5. The layered structure of claim 4 , wherein each of the multiple sublayers has one of a cubic structure, a simple hexagonal structure, or a wurtzite hexagonal structure.

6. The layered structure of claim 1 , further comprising a second III-N rare earth transition layer disposed over the III-N rare earth transition layer, wherein the second III-N rare earth transition layer comprises an AlN grown with Sc as surfactant.

7. The layered structure of claim 4 , wherein:
a first sublayer at a lower end of the III-N rare earth transition layer has a first in-plane lattice constant,
a second sublayer disposed over the first sublayer at a middle of the III-N rare earth transition layer has a second in-plane lattice constant,
a third sublayer disposed over the second sublayer at an upper end of the III-N rare earth transition layer has a third in-plane lattice constant
the first in-plane lattice constant is less than the second in-plane lattice constant and
the second in-plane lattice constant is less than the third in-plane lattice constant.

8. The layered structure of claim 1 , wherein the III-N rare earth transition layer comprises multiple sublayers of ScAlN, and a crystal structure of ScAlN is different at the upper surface of the III-N rare earth transition layer and at the lower surface of the III-N rare earth transition layer.

9. The layered structure of claim 6 , wherein the second III-N rare earth transition layer is doped with rare earth (RE) to control surface mobilities and lattice dynamics.

10. The layered structure of claim 1 , wherein the III-N rare earth transition layer comprises:
a first sublayer of h-Sc a Ga (1-a) N,
a second sublayer of h-Sc h Al (i-n) N, and
a third sublayer of w-Sc n Al (1-n) N,
wherein the sublayers are stacked on top of each other in a sequential order,
wherein a coefficient h of the second sublayer is greater than coefficient n of the third sublayer,
wherein an in-plane lattice constant of the first sublayer is greater than an in-plane lattice constant of the second layer, and
wherein the in-plane lattice constant of the second layer is greater than an in-plane constant of the third layer.

11. The layered structure of claim 1 , wherein the III-N rare earth transition layer is a piezoelectric layer.

12. The layered structure of claim 1 , wherein the III-N rare earth transition layer is under compressive stress to increase a piezoelectric coefficient.

13. The layered structure of claim 1 , wherein the III-N rare earth transition layer is under tensile stress to increase a piezoelectric coefficient.

14. The layered structure of claim 1 , wherein the III-N rare earth transition layer comprises a sublayer A of Sc z Al (1-2) N and a sublayer B of Sc h Al (i-h) N, wherein a coefficient z of sublayer A and a coefficient h of sublayer B are chosen such that the sublayers satisfy the following:
(i) sublayer A is under tensile stress; and
(ii) sublayer B is under compressive stress.

15. The layered structure of claim 14 , wherein the coefficients can be set as z in a range of 0.08-0.20 and h in a range of 0.06-0.18.

16. The layered structure of claim 1 , wherein the III-N rare earth transition layer comprises a sublayer A of Y z Al (i-z) N and a sublayer B of Sc h Al (i-h) N, wherein coefficients z and h are chosen such that the sublayers satisfy the following:
(i) sublayer A is under compressive stress; and
(ii) the resulting lattice constants of each of the sublayers satisfy A>B.

17. The layered structure of claim 1 , wherein the III-N rare earth transition layer comprises:
a first sublayer disposed over the rare earth containing buffer layer
a second sublayer disposed over the first sublayer and having an in-plane lattice constant higher than the in-plane lattice constant of the second first sublayer;
a third sublayer disposed over the second sublayer and having an in-plane lattice constant less than the in-plane lattice constant of the second sublayer; and
a fourth sublayer disposed over the third sublayer and having an in-plane lattice constant greater than the in-plane lattice constant of the third sublayer,
wherein the first sublayer, second sublayer, third sublayer, and fourth sublayer have an alternating in-plane lattice constant, and
wherein the alternating in-plane lattice constant increases the piezoelectric coefficient.

18. The layered structure of claim 1 , further comprising:
a source electrode and a drain electrode disposed over the rare earth containing buffer layer;
a channel layer disposed over the rare earth containing buffer layer and disposed between the source and drain electrodes; and
a gate electrode disposed over the channel layer,
wherein each sublayer of the plurality of sublayers of the III-N rare earth transition layer is disposed over the source electrode, the drain electrode, or both.

19. A method of growing a layered structure, the method comprising:
configuring a substrate;
epitaxially growing a rare earth containing buffer layer over the substrate; and
epitaxially growing a rare earth transition layer over the rare earth containing buffer layer with an in-plane lattice constant al,
wherein the rare earth containing buffer layer has a first in-plane lattice constant at an upper surface of the rare earth containing buffer layer, the upper surface coupled to the rare earth transition layer,
wherein the rare earth containing buffer layer has a second in-plane lattice constant at a lower surface of the rare earth containing buffer layer, the lower surface coupled to the substrate, and
wherein the first in-plane lattice constant is less than the second in-plane lattice constant.

20. A layered structure, comprising:
a substrate;
a rare earth containing buffer layer disposed over the substrate; and
a rare earth transitio

Assignees

• Iqe Plc

Inventors

• Dargis Rytis
• Clark Andrew
• Pelzel Rodney
• Lebby Michael
• Yanka Robert

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3248

  consisting of two layers · CPC title

• H10P14/2926

  Crystal orientations · CPC title

• H10P14/2905 Primary

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3238

  being insulating materials · CPC title