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Structure and method of forming metamorphic heteroepi materials and III-V channel structures on si
US9159554B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9159554-B2 |
| Application number | US-201414262400-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 25, 2014 |
| Priority date | May 1, 2013 |
| Publication date | Oct 13, 2015 |
| Grant date | Oct 13, 2015 |
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Abstract
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Embodiments described herein generally relate to a method of fabrication of a device structure comprising Group III-V elements on a substrate. A <111> surface may be formed on a substrate and a Group III-V material may be grown from the <111> surface to form a Group III-V device structure in a trench isolated between a dielectric layer. A final critical dimension of the device structure may be trimmed to achieve a suitably sized node structure.
First claim
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The invention claimed is: 1. A method of forming a device structure, comprising: providing a substrate having a surface oriented in a <111> direction; forming a trench having a first region and a second region, wherein a width of the first region corresponds to a width of the surface oriented in a <111> direction, the trench comprising sidewalls, wherein the sidewalls contact the substrate below the surface oriented in a <111> direction; depositing a first layer on the surface…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9159554B2 cover?
- Embodiments described herein generally relate to a method of fabrication of a device structure comprising Group III-V elements on a substrate. A <111> surface may be formed on a substrate and a Group III-V material may be grown from the <111> surface to form a Group III-V device structure in a trench isolated between a dielectric layer. A final critical dimension of the device structure may be …
- Who is the assignee on this patent?
- Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P14/3421. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).