Atomic layer etch process using plasma in conjunction with a rapid thermal activation process

Patent metadata

Field	Value
Publication number	US-11062912-B2
Application number	US-202016804572-A
Country	US
Kind code	B2
Filing date	Feb 28, 2020
Priority date	Dec 14, 2016
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

A process for etching a film layer on a semiconductor wafer is disclosed. The process is particularly well suited to etching carbon containing layers, such as hardmask layers, photoresist layers, and other low dielectric films. In accordance with the present disclosure, a reactive species generated from a plasma is contacted with a surface of the film layer. Simultaneously, the substrate or semiconductor wafer is subjected to rapid thermal heating cycles that increase the temperature past the activation temperature of the reaction in a controlled manner.

First claim

What is claimed is:

1. A plasma reactor for processing one or more semiconductor wafers, the plasma reactor comprising:
a processing chamber;
a plasma chamber, the plasma chamber comprising a dielectric sidewall and a ceiling, the plasma chamber disposed on a first side of the processing chamber,
an induction coil disposed adjacent to the dielectric sidewall of the plasma chamber;
an RF power generator coupled the induction coil through a matching network, the RF power generator operable to energize the induction coil with RF power to generate a substantially inductive plasma in the plasma chamber;
a gas supply operable to provide a gas into the plasma chamber;
a substrate holder disposed within the processing chamber;
a plurality of lamps configured on a second and opposite side of the first side of the processing chamber;
a window disposed between the plurality of lamps and the substrate holder; and
a controller configured to control the plurality of lamps to implement a plurality of thermal heating cycles to heat a film layer on a wafer above an activation temperature, wherein the plurality of thermal heating cycles produces an overall nonlinear etch rate such that each of the plurality of thermal heating cycles increases an etch amount on the film layer in a curvilinear manner.

2. The plasma reactor of claim 1 , comprising a separation grid separating the processing chamber from the plasma chamber, the separation grid operable to filter charged species generated in the substantially inductive plasma.

3. The plasma reactor of claim 1 , further comprising a Faraday shield disposed between the induction coil and the dielectric sidewall.

4. The plasma reactor of claim 1 , wherein the substrate holder is operable to rotate the wafer.

5. The plasma reactor of claim 1 , wherein the dielectric sidewall comprises quartz.

6. The plasma reactor of claim 1 , wherein the window comprises a spectral filter.

7. The plasma reactor of claim 1 , wherein the plurality of lamps comprises a plurality of linear lamps.

8. The plasma reactor of claim 1 , further comprising a gas injection insert disposed in the plasma chamber.

9. The plasma reactor of claim 1 , wherein the controller is configured to control the plurality of lamps to implement the plurality of thermal heating cycles during an etch process.

10. The plasma reactor of claim 9 , wherein the controller is configured to control the plurality of lamps to incrementally increase a temperature of the film layer on the wafer to control the etch rate during the etch process.

11. The plasma reactor of claim 9 , wherein the controller is configured to adjust an amount of light provided by the plurality of lamps based at least in part on one or more temperature measurements of the wafer.

12. The plasma reactor of claim 9 , wherein each of the plurality of thermal heating cycles is less than about 1 second.

13. The plasma reactor of claim 10 , wherein the etch rate is an increasing and nonlinear etch rate during the etch process.

14. The plasma reactor of claim 10 , wherein the film layer is a doped amorphous carbon layer.

15. The plasma reactor of claim 14 , wherein the doped amorphous carbon layer is doped with boron.

16. A plasma reactor for processing one or more semiconductor wafers, the plasma reactor comprising:
a processing chamber;
a plasma chamber, the plasma chamber comprising a dielectric sidewall and a ceiling, the plasma chamber disposed on a first side of the processing chamber,
an induction coil disposed adjacent to the dielectric sidewall of the plasma chamber;
a Faraday shield disposed between the induction coil and the dielectric sidewall;
an RF power generator coupled the induction coil through a matching network, the RE power generator operable to energize the induction coil with RF power to generate a substantially inductive plasma in the plasma chamber;
a gas supply operable to provide a gas into the plasma chamber;
a separation grid separating the plasma chamber from the processing chamber;
a substrate holder disposed within the processing chamber;
a plurality of lamps configured on a second and opposite side of the first side of the processing chamber;
a window disposed between the plurality of lamps and the substrate holder; and
a controller configured to control the plurality of lamps to implement a plurality of thermal heating cycles to heat a film layer on a wafer above an activation temperature during an etch process, wherein the plurality of thermal heating cycles produces an overall nonlinear etch rate such that each of the plurality of thermal heating cycles increases an etch amount of the film layer in a curvilinear manner.

17. The plasma reactor of claim 16 , wherein the controller is configured to control the plurality of lamps to incrementally increase a temperature of the film layer on the wafer to control the etch rate during the etch process.

18. The plasma reactor of claim 16 , wherein the controller is configured to adjust an amount of light provided by the plurality of lamps based at least in part on one or more temperature measurements of the wafer.

19. The plasma reactor of claim 16 , wherein each of the plurality of thermal heating cycles is less than about 1 second.

20. The plasma reactor of claim 17 , wherein the etch rate is an increasing and nonlinear etch rate during the etch process.

Assignees

• Mattson Tech Inc
• Beijing E Town Semiconductor Tech Co Ltd

Inventors

• Ma Shawming

Classifications

• H10P95/08

  Planarisation of organic insulating materials · CPC title

• H10P50/287 Primary

  by chemical means · CPC title

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title

• H01J37/32449

  Gas control, e.g. control of the gas flow · CPC title

• H01J37/32724

  Temperature · CPC title