Face-on, gas-assisted etching for plan-view lamellae preparation

Patent metadata

Field	Value
Publication number	US-11062879-B2
Application number	US-201916719766-A
Country	US
Kind code	B2
Filing date	Dec 18, 2019
Priority date	Jun 2, 2017
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

Method for preparing site-specific, plan-view lamellae from multilayered microelectronic devices. A focused ion beam that is directed, with an etch-assisting gas, toward an uppermost layer of a device removes at least that uppermost layer and thereby exposes an underlying layer over, or comprising, a target area from which the site-specific, plan-view lamella is to be prepared, wherein the focused ion beam is in a face-on orientation in removing the uppermost layer to expose the underlying layer. In a preferred embodiment, the etch-assisting gas comprises methyl nitroacetate. In alternative embodiments, the etch-assisting gas is methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, or methoxy acetylchloride.

First claim

We claim as follows:

1. A method comprising:
removing a sample from a workpiece, the sample including multiple layers of different thicknesses;
thinning, by a focused ion beam, the sample parallel to the multiple layers to remove thick layers; and
in the presence of an etch-assisting gas, delayering, by the focused ion beam interacting with the etch-assisting gas, the sample in a direction parallel to the multiple layers, wherein the delayering removes one or more layers of the multiple layers, the one or more layers of the multiple layers being thin layers.

2. The method of claim 1 , wherein the etch-assisting gas planarizes the one or more layers of the multiple layers during delayering.

3. The method of claim 1 , wherein the etch-assisting gas is one of methyl nitroacetate, methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, methoxy acetylchloride, or combinations thereof.

4. The method of claim 1 , further including:
defining an image-based criterion that specifies a target layer to end at in the one or more layers of the multiple layers;
acquiring an image of an exposed surface after removal of a layer of the one or more layers;
evaluating the image to determine if the image-based criterion is satisfied; and
ceasing delayering once the image-based criterion is satisfied.

5. The method of claim 1 , further including:
establishing a number of layers to be removed of the one or more multiple layers;
repeating the delaying step and an image acquisition step after each delayering;
determining when to cease the repeating based on the established number of layers having been removed.

6. The method of claim 1 , wherein the workpiece is a semiconductor wafer.

7. The method of claim 6 , wherein the semiconductor wafer includes 3D NAND memory devices.

8. The method of claim 1 , wherein the ion beam is a plasma-based ion bean comprising ion species of one of Xe + , Ar + , Kr + , O + , O2 + , N + , N2 + , NO + , and NO2 + .

9. The method of claim 1 , wherein the sample is a plan-view lamella.

10. An apparatus comprising:
a stage capable of moving in X, Y, and Z directions and rotation around at least one axis;
a focused ion beam column coupled to provide an ion beam;
a gas source coupled to provide an etch-assisting gas; and
a controller coupled to at least control the ion beam column, the gas source and the stage, the controller configured to:
thinning, by a focused ion beam, a sample parallel to the multiple layers to remove thick layers;
provide the etch-assisting gas to surface of the sample; and
in the presence of an etch-assisting gas, delayering, by the focused ion beam interacting with the etch-assisting gas, the sample in a direction parallel to the multiple layers, wherein the delayering removes one or more layers of the multiple layers, the one or more layers of the multiple layers being thin layers.

11. The apparatus of claim 10 , wherein the etch-assisting gas planarizes the one or more layers of the multiple layers during delayering.

12. The apparatus of claim 10 , wherein the etch-assisting gas is one of methyl nitroacetate, methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, methoxy acetylchloride, or combinations thereof.

13. The apparatus of claim 10 , wherein the controller is further configured to:
define an image-based criterion that specifies a target layer to end at in the one or more layers of the multiple layers;
acquire an image of an exposed surface after removal of a layer of the one or more layers;
evaluate the image to determine if the image-based criterion is satisfied; and
cease delayering once the image-based criterion is satisfied.

14. The apparatus of claim 10 , wherein the controller is further configured to:
establish a number of layers to be removed of the one or more multiple layers;
repeat the delaying step and an image acquisition step after each delayering;
determine when to cease the repeating based on the established number of layers having been removed.

15. The apparatus of claim 10 , wherein the workpiece is a semiconductor wafer.

16. The apparatus of claim 15 , wherein the semiconductor wafer includes 3D NAND memory devices.

17. The apparatus of claim 10 , wherein the focused ion beam column is a plasma-based ion bean comprising ion species of one of Xe + , Ar + , Kr + , O + , O2 + , N + , N2 + , NO + , and NO2 + .

18. The apparatus of claim 10 , wherein the focused ion beam column includes a liquid metal ion source and the ion beam is a gallium ion beam.

19. The apparatus of claim 10 , further including an electron column coupled to provide a beam of electrons.

20. The apparatus of claim 10 , wherein the ion beam is provided at an energy in a range from 1 keV to 30 keV.

Assignees

• Fei Co

Inventors

• Franco Noel Thomas
• Mani Kenny
• Rue Chad
• Christian Joe
• Blackwood Jeffrey

Classifications

• H10P50/267

  using plasmas · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P50/20

  Dry etching; Plasma etching; Reactive-ion etching · CPC title

• G01N1/286 Primary

  involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising (microtomes G01N1/06; pulverising in general B02C; mixing in general B01F) · CPC title