Face-on, gas-assisted etching for plan-view lamellae preparation

Patent metadata

Field	Value
Publication number	US-10546719-B2
Application number	US-201815987847-A
Country	US
Kind code	B2
Filing date	May 23, 2018
Priority date	Jun 2, 2017
Publication date	Jan 28, 2020
Grant date	Jan 28, 2020

Abstract

Method for preparing site-specific, plan-view lamellae from multilayered microelectronic devices. A focused ion beam that is directed, with an etch-assisting gas, toward an uppermost layer of a device removes at least that uppermost layer and thereby exposes an underlying layer over, or comprising, a target area from which the site-specific, plan-view lamella is to be prepared, wherein the focused ion beam is in a face-on orientation in removing the uppermost layer to expose the underlying layer. In a preferred embodiment, the etch-assisting gas comprises methyl nitroacetate. In alternative embodiments, the etch-assisting gas is methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, or methoxy acetylchloride.

First claim

We claim as follows:

1. A method of fabricating, from a sample extracted from a semiconductor work piece, a lamella including an electron-transparent portion including a region of interest, the semiconductor work piece having multiple layers parallel to its surface, the method comprising:
directing a focused ion beam toward the work piece to cut the sample from the work piece;
directing a focused ion beam oriented parallel to multiple layers toward the sample to thin the sample to form the lamella;
providing an etch-assisting gas at the surface of the lamella, the etch gas including methyl nitroacetate, methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, methoxy acetylchloride, or combinations thereof; and
directing a focused ion beam oriented perpendicularly to the multiple layers toward the lamella to thin in the presence of the etch-assisting gas a portion of the lamella to produce the electron-transparent portion including the region of interest.

2. The method of claim 1 in which directing a focused ion beam oriented perpendicularly to the multiple layers toward the lamella to thin in the presence of the etch-assisting gas a portion of the lamella comprises milling the portion of the lamella to produce an electron transparent region having a thickness of less than 100 nm, the electron transparent region essentially surrounded by a frame having a thickness at least 100 nm thicker than the thickness of the electron transparent region.

3. The method of claim 1 in which directing a focused ion beam oriented perpendicularly to the multiple layers toward the lamella to thin in the presence of the etch-assisting gas a portion of the lamella comprises planarizing the surface of the portion of lamella to remove curtaining and other artifacts.

4. The method of claim 1 , further comprising:
performing multiple repetitions of the steps of:
providing the etch-assisting gas at the surface of the lamella; and
directing a focused ion beam oriented perpendicularly to the multiple layers toward the lamella to thin in the presence of the etch-assisting gas a portion of the lamella;
forming an ion beam image of the lamella after at least one of the repetitions; and
determining from the ion beam image when to cease the repetitions.

5. The method of claim 4 in which determining from the ion beam image when to cease the repetitions comprises determining to cease the repetitions when the region of interest is visible in the ion beam image.

6. A plan-view lamella prepared by the method of claim 1 .

7. The lamella of claim 6 in which:
the electron transparent region has an area of greater than 50 μm 2 ;
the electron transparent region has a thickness of less than 100 nm;
the electron transparent region is essentially surrounded by a frame having a thickness at least 100 nm thicker than the thickness of the electron transparent region.

8. The lamella of claim 6 in which the electron transparent portion has an area larger than about 50 μm 2 .

9. The lamella of claim 6 in which the electron transparent portion has thickness less than about 50 nm.

10. A method of preparing a plan-view lamella from a multilayered microelectronic device, the method comprising:
(a) directing a focused ion beam towards a work piece to separate a sample from a work piece, the sample having a target area parallel to the surface of the work piece;
(b) bulk thinning the sample by directing the focused ion beam toward the sample approximately parallel to the target area to remove material above the target area;
(c) final thinning the sample to form a lamella including the target area by:
(c1) directing an etch-assisting gas toward an uppermost layer over the target area, the etch-assisting gas including one or more compounds selected from a group consisting essentially of methyl nitroacetate, methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, and methoxy acetylchloride;
(c2) directing a focused ion beam in a face-on orientation toward the uppermost layer over the target area, thereby removing the uppermost layer and exposing an underlying layer over, or comprising, the target area; and
repeating steps (c1) and (c2) until the exposed underlying layer is the one comprising the target area.

11. The method of claim 10 in which the focused ion beam originates from a plasma focused ion beam source.

12. The method of claim 10 in which directing a focused ion beam in a face-on orientation toward the uppermost layer over the target area comprises directing a focused ion beam in which the ions have landing energies of less than about 12 keV.

13. The method of claim 10 in which step (c) forms a square area having an electron transparency suitable for TEM analyses within the target area both is larger than at least about 5 μm by 5 μm and is within an overall area of electron transparency suitable for such TEM analyses that is larger than at least about 100 μm 2 .

14. The method of claim 13 in which the sample thickness within the square area is less than about 100 nm.

15. The method of claim 10 further comprising removing a backside layer underlying the target area by:
re-orienting the device so that the focused ion beam is directed face-on to the device's backside and, after the re-orienting, the backside layer is over the target area;
directing an etch-assisting gas toward the backside layer;
directing a focused ion beam toward the backside layer, thereby removing a backside layer;
in which:
the etch-assisting gas comprises one or more compounds selected from a group consisting of xenon difluoride, DE, methyl nitroacetate, methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, and methoxy acetylchloride; and
the focused ion beam mills away the exposed backside layer in a face-on orientation.

16. The method of claim 10 in which repeating steps (c1) and (c2) until the exposed underlying layer is the one comprising the target area further comprises determining when the exposed underlying layer is the one comprising the target area by:
acquiring an image of the exposed underlying layer; and
automatically evaluating the exposed underlying layer to determine whether the exposed underlying layer is one comprising the target area.

17. A method of claim 10 in which repeating steps (c1) and (c2) until the exposed underlying layer is the one comprising the target area further comprises determining when the exposed underlying layer is the one comprising the target area by:
acquiring an image an exposed underlying layer;
determining a number of additional layers to be removed to expose the target area; and
as additional layers are removed, counting the number of layers removed until the determined number of additional layers has been removed, leaving the target area exposed.

18. A method of curtain artifact removal from a target area of an exposed layer, the method comprising:
(a) defining a target area containing a curtain artifact on an exposed layer;
(b) directing an etch-assisting gas toward the target area; and
(c) directing a focused ion beam toward the target area, thereby removing the curtain artifact from the target area;
in which:
the etch-assisting gas comprises at least one chemical or more selected from a group consisting of methyl nitroacetate, methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroaceta

Assignees

• Fei Co

Inventors

• Franco Noel Thomas
• Mani Kenny
• Rue Chad
• Christian Joe
• Blackwood Jeffrey

Classifications

• H10P50/267

  using plasmas · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P50/20

  Dry etching; Plasma etching; Reactive-ion etching · CPC title

• G01N2001/2873

  Cutting or cleaving · CPC title