Composition for rinsing or cleaning a surface with ceria particles adhered

Patent metadata

Field	Value
Publication number	US-11060051-B2
Application number	US-201916595594-A
Country	US
Kind code	B2
Filing date	Oct 8, 2019
Priority date	Oct 12, 2018
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

To provide a composition for rinsing or cleaning a surface to which ceria particles are attached and a surface treatment method for removing ceria particles from the surface using the same.The composition according to the present invention contains an anionic surfactant, an organic amine compound, and a protic organic acid molecule and has a pH of less than 6.

First claim

What is claimed is:

1. A composition comprising:
an anionic surfactant represented by the following Formula (I):
C m H 2m+1 —(OCH 2 CH 2 ) n -L-R  (I), wherein:

6≤m≤20;
n≥5;
L represents an —O—, —S—, —R 1 —, —S—R 1 — or —O—R 1 — bond (wherein R 1 represents C 1-4 alkylene); and
R represents at least one selected from the group consisting of a carboxy group and a salt thereof;

an organic amine compound; and
a protic organic acid molecule,
wherein the composition has a pH of less than 6.

2. The composition according to claim 1 , wherein:
the organic amine compound is at least one selected from the group consisting of 2-(diethylamino)ethanethiol, captamine, diethylethanolamine, methylcysteamine, 2-(tert-butylamino)ethanethiol, 2,2′-dimethoxy-1,1-dimethyl-dimethylamine, 3-amino-4-octanol, 3-butoxypropylamine, N-acetylcysteamine, homocysteamine, N,N-dimethylhydroxylamine, 2-(isopropylamino)ethanol, 2-(methylthioethyl)amine, 1-aminopropane-2-thiol, leucinol, cysteamine, and N,O-dimethylhydroxylamine; and
the protic organic acid molecule is at least one selected from the group consisting of glyphosin, N-(phosphonomethyl)iminodiacetic acid hydrate, hydroxyphosphonoacetic acid, citric acid, hydroxyethane-1,1-diphosphonic acid, and 2-phosphonobutane-1,2,4-tricarboxylic acid.

3. The composition according to claim 1 , wherein
the organic amine compound has a sum of electronegativity gradients (SENG) of greater than −1.0,
the protic organic acid molecule has at least one dissociated complexing functional group,
and a density of binding modes (DBM) for the functional group(s) of the molecule is 0.013 or more.

4. The composition according to claim 1 , wherein 5≤n≤12 in the Formula (I).

5. The composition according to claim 1 , wherein the anionic surfactant is at least one selected from the group consisting of capryleth-9 carboxylic acid or a salt thereof.

6. The composition according to claim 1 , wherein the organic amine compound is at least one selected from the group consisting of 3-amino-4-octanol, cysteamine, N,N-dimethylhydroxylamine, and N,O-dimethylhydroxylamine.

7. The composition according to claim 1 , wherein the protic organic acid molecule is at least one selected from the group consisting of hydroxyethane-1,1-diphosphonic acid and 2-phosphonobutane-1,2,4-tricarboxylic acid.

8. The composition according to claim 1 , which is used for cleaning or rinsing a surface to which ceria particles are attached.

9. A surface treatment method for removing ceria particles from a surface to which the ceria particles are attached, the surface treatment method comprising a step of bringing the surface into contact with the composition according to claim 1 .

Assignees

• Fujimi Inc

Inventors

• Grandstrom Jimmy Erik
• Takeda Hisashi

Classifications

• H10P70/237 Primary

  the processing being a planarisation of insulating layers · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title

• C11D3/361

  Phosphonates, phosphinates or phosphonites · CPC title

• C11D3/0047

  pH regulated compositions · CPC title

• C11D3/044

  Hydroxides or bases · CPC title