Acoustic filter using acoustic coupling

Patent metadata

Field	Value
Publication number	US-11050412-B2
Application number	US-201715697658-A
Country	US
Kind code	B2
Filing date	Sep 7, 2017
Priority date	Sep 9, 2016
Publication date	Jun 29, 2021
Grant date	Jun 29, 2021

Abstract

A filter circuit includes a first input node and a second input node for receiving an input signal, and a first output node and a second output node for providing an output signal. A first series acoustic resonator is coupled in series between the first input node and the first output node. At least one coupled resonator filter (CRF) includes first and second transducers, which may be acoustically coupled to one another. The first transducer has a first electrode coupled to the first input node, a second electrode coupled to the second input node, and a first piezoelectric layer between the first electrode and the second electrode. A second transducer has a third electrode coupled to the first output node, a fourth electrode coupled to the second output node, and a second piezoelectric layer between the third electrode and the fourth electrode.

First claim

What is claimed is:

1. A filter circuit comprising:
a first input node and a second input node for receiving an input signal;
a first output node and a second output node for providing an output signal;
a first series acoustic resonator coupled in series between the first input node and the first output node; and
at least one coupled resonator filter (CRF) comprising:
a first transducer having a first electrode coupled to the first input node, a second electrode coupled to the second input node, and a first piezoelectric layer between the first electrode and the second electrode; and
a second transducer having a third electrode coupled to the first output node, a fourth electrode coupled to the second output node, and a second piezoelectric layer between the third electrode and the fourth electrode.

2. The filter circuit of claim 1 wherein the at least one CRF comprises a first CRF that comprises the first transducer, the second transducer, and a first coupling structure between the first transducer and the second transducer, wherein the first transducer and the second transducer are vertically aligned such that the first coupling structure vertically acoustically couples the first transducer and the second transducer.

3. The filter circuit of claim 2 wherein a series resonance frequency of the first transducer is about the same as a series resonance frequency of the second transducer.

4. The filter circuit of claim 3 wherein a series resonance frequency of the first series acoustic resonator is different than the series resonance frequency of the first transducer and the series resonance frequency of the second transducer.

5. The filter circuit of claim 2 wherein a series resonance frequency of the first transducer is different from a series resonance frequency of the second transducer.

6. The filter circuit of claim 5 wherein a series resonance frequency of the first series acoustic resonator is different than the series resonance frequency of the first transducer and the series resonance frequency of the second transducer.

7. The filter circuit of claim 2 wherein the at least one CRF further comprises a second CRF that comprises:
a third transducer having a fifth electrode coupled to the first input node, a sixth electrode coupled to the second input node, and a third piezoelectric layer between the fifth electrode and the sixth electrode;
a fourth transducer having a seventh electrode coupled to the first output node, an eighth electrode coupled to the second output node, and a fourth piezoelectric layer between the seventh electrode and the eighth electrode; and
a second coupling structure between the third transducer and the fourth transducer, wherein the third transducer and the fourth transducer are vertically aligned such that the second coupling structure vertically acoustically couples the third transducer and the fourth transducer.

8. The filter circuit of claim 7 wherein the first electrode is coupled to the fifth electrode, the second electrode is coupled to the sixth electrode, the third electrode is coupled to the seventh electrode, and the fourth electrode is coupled to the eighth electrode.

9. The filter circuit of claim 8 wherein a series resonance frequency of the first transducer is about the same as a series resonance frequency of the second transducer, and a series resonance frequency of the third transducer is about the same as a series resonance frequency of the fourth transducer.

10. The filter circuit of claim 9 wherein a series resonance frequency of the first series acoustic resonator is different than the series resonance frequency of the first transducer and the series resonance frequency of the third transducer.

11. The filter circuit of claim 8 wherein the first transducer, the second transducer, the third transducer, and the fourth transducer have about the same series resonance frequency.

12. The filter circuit of claim 11 wherein a series resonance frequency of the first series acoustic resonator is different than the series resonance frequency of the first transducer and the series resonance frequency of the third transducer.

13. The filter circuit of claim 8 wherein the first transducer, the second transducer, the third transducer, and the fourth transducer have different series resonance frequencies.

14. The filter circuit of claim 13 wherein a series resonance frequency of the first series acoustic resonator is different than the series resonance frequency of the first transducer and the series resonance frequency of the second transducer.

15. The filter circuit of claim 7 wherein a series resonance frequency of the first series acoustic resonator is different than a series resonance frequency of the first transducer and a series resonance frequency of the second transducer.

16. The filter circuit of claim 7 wherein a series resonance frequency of the first transducer is about the same as a series resonance frequency of the second transducer, and a series resonance frequency of the third transducer is about the same as a series resonance frequency of the fourth transducer.

17. The filter circuit of claim 1 wherein the at least one CRF comprises a plurality of CRFs that provides a path between at least one of the first and second input nodes and at least one of the first and second output nodes, such that at least a portion of the path includes a portion that is vertically acoustically coupled within one or more of the plurality of CRFs.

18. The filter circuit of claim 1 wherein:
the at least one CRF comprises a first CRF that comprises the first transducer and a second CRF that comprises the second transducer; and
the first CRF is coupled to the second CRF.

19. The filter circuit of claim 18 wherein:
the first CRF comprises the first transducer, a third transducer, and a first coupling structure between the first transducer and the third transducer, such that the first transducer and the third transducer are vertically aligned such that the first coupling structure vertically acoustically couples the first transducer and the third transducer;
the second CRF comprises the second transducer, a fourth transducer, and a second coupling structure between the second transducer and the fourth transducer, such that the second transducer and the fourth transducer are vertically aligned such that the second coupling structure vertically acoustically couples the second transducer and the fourth transducer;
the third transducer has a fifth electrode, a sixth electrode, and a first portion of a third piezoelectric layer between the fifth electrode and the sixth electrode; and
the fourth transducer has a seventh electrode, an eighth electrode, and a second portion of the third piezoelectric layer, which is transversally acoustically coupled to the first portion of the third piezoelectric layer.

20. The filter circuit of claim 19 wherein the fifth electrode is coupled to the seventh electrode and the sixth electrode is coupled to the eighth electrode.

21. The filter circuit of claim 20 wherein in the first CRF, the fifth electrode is over the sixth electrode, and in the second CRF, the seventh electrode is over the eighth electrode.

22. The filter circuit of claim 21 wherein the fourth electrode is over the third electrode.

23. The filter circuit of claim 19 wherein in the first CRF, the fifth electrode is over the sixth electrode, and in the second CRF, the eighth electrode is over the seventh electr

Assignees

• Qorvo Us Inc

Inventors

• Khlat Nadim
• Aigner Robert

Classifications

• H03H9/13

  for networks consisting of piezoelectric or electrostrictive materials (for networks using surface acoustic waves H03H9/145) · CPC title

• H03H9/60 Primary

  Electric coupling means therefor {(H03H9/0095 takes precedence)} · CPC title

• H03H9/584 Primary

  Coupled Resonator Filters [CFR] · CPC title

• H03H9/0095

  using bulk acoustic wave devices · CPC title