Method for manufacturing piezoelectric resonator device

US8991022B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8991022-B2
Application numberUS-201013142877-A
CountryUS
Kind codeB2
Filing dateJan 7, 2010
Priority dateJan 7, 2009
Publication dateMar 31, 2015
Grant dateMar 31, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

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A method for manufacturing piezoelectric resonator devices according to the present invention includes the following steps: a wafer forming step of preparing a thick-walled wafer 30 integrally formed with multiple lower lid members 3 ; a bonding step of bonding crystal resonator plates 2 to one main surface 31 of the wafer 30 via a bonding material 5 and bonding upper lid members 4 on the crystal resonator plates via a bonding material 5 ; a thinning step of thinning the wafer 30 from the other main surface 37 of the wafer; an external terminal forming step of forming external terminals on the other main surface of the thinned wafer; and a dividing step of cutting the wafer between each adjacent pair of crystal resonators so that multiple crystal resonators are obtained.

First claim

Opening claim text (preview).

The invention claimed is: 1. A method for manufacturing a piezoelectric resonator device including a piezoelectric resonator plate having an excitation electrode formed thereon, and upper and lower lid members that hermetically seal the excitation electrode, the upper lid member and the lower lid member being bonded to each other via a bonding material, the manufacturing method comprising: a wafer forming step of preparing a thick-walled wafer that is integrally formed with a pl…

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What does patent US8991022B2 cover?
A method for manufacturing piezoelectric resonator devices according to the present invention includes the following steps: a wafer forming step of preparing a thick-walled wafer 30 integrally formed with multiple lower lid members 3 ; a bonding step of bonding crystal resonator plates 2 to one main surface 31 of the wafer 30 via a bonding material 5 and bonding upper lid members 4 …
Who is the assignee on this patent?
Satoh Syunsuke, Kohda Naoki, Daishinku Corp
What technology area does this patent fall under?
Primary CPC classification H03H9/1035. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 31 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).