Crystal resonator, and production method therefor
US-9853627-B2 · Dec 26, 2017 · US
US8991022B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8991022-B2 |
| Application number | US-201013142877-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 7, 2010 |
| Priority date | Jan 7, 2009 |
| Publication date | Mar 31, 2015 |
| Grant date | Mar 31, 2015 |
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A method for manufacturing piezoelectric resonator devices according to the present invention includes the following steps: a wafer forming step of preparing a thick-walled wafer 30 integrally formed with multiple lower lid members 3 ; a bonding step of bonding crystal resonator plates 2 to one main surface 31 of the wafer 30 via a bonding material 5 and bonding upper lid members 4 on the crystal resonator plates via a bonding material 5 ; a thinning step of thinning the wafer 30 from the other main surface 37 of the wafer; an external terminal forming step of forming external terminals on the other main surface of the thinned wafer; and a dividing step of cutting the wafer between each adjacent pair of crystal resonators so that multiple crystal resonators are obtained.
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The invention claimed is: 1. A method for manufacturing a piezoelectric resonator device including a piezoelectric resonator plate having an excitation electrode formed thereon, and upper and lower lid members that hermetically seal the excitation electrode, the upper lid member and the lower lid member being bonded to each other via a bonding material, the manufacturing method comprising: a wafer forming step of preparing a thick-walled wafer that is integrally formed with a pl…
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Cross-Sectional Technologies · mapped topic
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