Cassette supply system to store and handle cassettes and processing apparatus equipped therewith

Patent metadata

Field	Value
Publication number	US-11049751-B2
Application number	US-201816132142-A
Country	US
Kind code	B2
Filing date	Sep 14, 2018
Priority date	Sep 14, 2018
Publication date	Jun 29, 2021
Grant date	Jun 29, 2021

Abstract

The invention relates to a cassette supply system to store and handle cassettes for substrates and a processing apparatus for processing substrates equipped with said system. The system having a cassette storage provided with base plate constructed and arranged to support cassettes. Also a cassette handler with an end effector with at least one protrusion to support and position the cassette on the end effector is provided to transfer cassettes to and from the base plate. The base plate may be provided with a substantially flat surface to support the cassettes.

First claim

What is claimed is:

1. A cassette supply system to store and handle cassettes for substrates, said system comprising:
a cassette storage provided with a base plate constructed and arranged to support cassettes; and
a cassette handler to transfer cassettes to and from the base plate and provided with an end effector provided with at least one protrusion to support and position the cassette on the end effector;
wherein the base plate defines a cut out and wherein the base plate is provided with a plurality of pads disposed around the cut out, wherein each pad is formed from a flexible material and comprises a flat upper surface, wherein the flat upper surface of the pads engage a cassette when positioned on the base plate to support the cassette and the pads are disposed in an arrangement on the base plate to dispose the cassette in a predetermined position on the base plate;
wherein the base plate is constructed and arranged so that the flat upper surface of each pad is the only contact area with a cassette supported by the base plate, wherein the flat upper surface is configured to match with and engage respective rims of elongated grooves defined in a bottom surface of the cassette; and
wherein the pads are configured to allow positioning of the cassette on the base plate with some play in a horizontal plane.

2. The system according to claim 1 , wherein the pads absorb a shock when the cassette is transferred to the base plate.

3. The system according to claim 1 , wherein the flexible material has a high friction to keep the cassette in its position on the base plate when the base plate is moved.

4. The system according to claim 1 , wherein the flexible material comprises rubber.

5. The system according to claim 1 , wherein the flat upper surface of each of the pads is the portion of each pad that is spaced furthest from the base plate.

6. The system according to claim 1 , wherein the plurality of pads comprises three pads to support the cassettes.

7. The system according to claim 1 , wherein the pads have a thickness between 1 and 10 mm, preferably between 2 and 5 mm.

8. The system according to claim 1 , wherein the base plate is provided with visual markings for the position of the cassette on the base plate.

9. The system according to claim 1 , wherein the system comprises an input/output station for receiving cassettes and the cassette handler is constructed and arranged to transfer cassettes from the input/output station to the base plate and vice versa, wherein the base plate is movable.

10. The system according to claim 1 , wherein the system comprises a substrate load/unload station for receiving cassettes and the cassette handler is constructed and arranged to transfer cassettes from the load/unload station to the base plate and vice versa.

11. The system according to claim 1 , wherein the pads each further comprise a flat lower surface that engages the base plate, and wherein an entirety of each pad is disposed between its corresponding upper surface and its corresponding lower surface.

12. The system according to claim 1 , wherein the base plate has a horizontal plane to receive the cassettes and the system is constructed and arranged with the base plate rotatable around a vertical axis.

13. The system according to claim 1 , wherein the system is provided with a sensor to detect at least one of the presence and the correct orientation of the cassettes on the base plate.

14. The system according to claim 13 , wherein the system is provided with a computer operable connected with the sensor and provided with a processor and a memory, wherein the memory is provided with machine vision software for detecting at least one of the presence and the correct orientation of the cassettes on the base plate.

15. The system of claim 1 , wherein the plurality of pads comprise a triangular form.

16. The system of claim 15 , wherein the triangular form comprises an isosceles shape having at least two edges with a same length.

Assignees

• Asm Ip Holding Bv

Inventors

• De Ridder Chris

Classifications

• H10P72/3408 Primary

  Docking arrangements · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/1918 Primary

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title