ESD protection composite structure, ESD protection device, and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11044798-B2
Application number	US-201816152425-A
Country	US
Kind code	B2
Filing date	Oct 5, 2018
Priority date	May 25, 2018
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

An ESD protection composite structure includes a link layer, a progressive layer, and a composite layer. The link layer is used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer includes a metal material. The progressive layer is disposed on the link layer, wherein the material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. The composite layer is disposed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×107 Ω/sq to 1×108 Ω/sq.

First claim

What is claimed is:

1. An ESD protection composite structure, comprising:
a link layer used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer comprises a metal material;
a progressive layer disposed on the link layer, wherein a material of the progressive layer comprises a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer; and
a composite layer disposed on the progressive layer, wherein the composite layer comprises a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×10 7 Ω/sq to 1×10 8 Ω/sq.

2. The ESD protection composite structure of claim 1 , wherein metals in the metal material, the stoichiometric metal oxide material, and the non-stoichiometric metal oxide material are the same.

3. The ESD protection composite structure of claim 1 , wherein a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer is 0.005:1 to 0.01:1.

4. The ESD protection composite structure of claim 1 , wherein the metal material comprises Ti, Al, Cu, Ni, Cr, Ta, or V, the non-stoichiometric metal oxide material comprises TiOx, AlOx, CuOx, NiOx, CrOx, TaOx, or VOx, and 0<x<a stoichiometry of a metal oxide, and the stoichiometric metal oxide material comprises TiO 2 , Al 2 O 3 , CuO, NiO, Cr 2 O 3 , Ta 2 O 5 , or V 2 O 5 .

5. The ESD protection composite structure of claim 1 , wherein the metal material is Ti, the non-stoichiometric metal oxide material is TiOx, the stoichiometric metal oxide material is TiO 2 , and x in TiOx in the progressive layer is 0<x<1.5 and x in TiOx in the composite layer is 1.5<x<2.

6. The ESD protection composite structure of claim 1 , wherein a thickness of the ESD protection composite structure is 105 nm to 3000 nm.

7. The ESD protection composite structure of claim 1 , wherein the ESD protection composite structure has a hardness of 8 GPa to 12 GPa, a pencil hardness of 5 to 7, an adhesion of 8 N to 12 N, and a temperature resistance of a room temperature to 500° C.

8. An ESD protection device, comprising:
a substrate; and
the ESD protection composite structure of claim 1 disposed on the substrate via a link layer.

9. The ESD protection device of claim 8 , wherein a material of the substrate comprises a metal material, a ceramic material, a resin material, or a combination of the materials.

10. The ESD protection device of claim 9 , wherein the metal material comprises stainless steel or aluminum, the ceramic material comprises TiO 2 , Al 2 O 3 , CuO, NiO, Cr 2 O 3 , Ta 2 O 5 , or V 2 O 5 , and the resin material comprises polycarbonate, epoxy resin, polyvinyl chloride, polypropylene, or polyethylene terephthalate.

11. The ESD protection device of claim 8 , wherein a surface of the substrate has a surface treatment layer, and the link layer is formed on the surface treatment layer.

12. The ESD protection device of claim 8 , wherein metals in the metal material, the stoichiometric metal oxide material, and the non-stoichiometric metal oxide material are the same.

13. The ESD protection device of claim 8 , wherein a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer is 0.005:1 to 0.01:1.

14. The ESD protection device of claim 8 , wherein the metal material comprises Ti, Al, Cu, Ni, Cr, Ta, or V, the non-stoichiometric metal oxide material comprises TiOx, AlOx, CuOx, NiOx, CrOx, TaOx, or VOx, and 0<x<a stoichiometry of a metal oxide, and the stoichiometric metal oxide material comprises TiO 2 , Al 2 O 3 , CuO, NiO, Cr 2 O 3 , Ta 2 O 5 , or V 2 O 5 .

15. The ESD protection device of claim 8 , wherein a material of the substrate is aluminum or stainless steel, the metal material is Ti, the non-stoichiometric metal oxide material is TiOx, the stoichiometric metal oxide material is TiO 2 , and x in TiOx in the progressive layer is 0<x<1.5 and x in TiOx in the composite layer is 1.5<x<2.

16. The ESD protection device of claim 8 , wherein a thickness of the ESD protection composite structure is 105 nm to 3000 nm.

17. The ESD protection device of claim 8 , wherein the ESD protection composite structure has a hardness of 8 GPa to 12 GPa, a pencil hardness of 5 to 7, an adhesion of 8 N to 12 N, and a temperature resistance of a room temperature to 500° C.

Assignees

• Ind Tech Res Inst

Inventors

• Wang Ding-Shiang
• Chang Jia-Jen
• Leu Ming-Sheng
• Chen Tai-Sheng
• Shih Chin-Te

Classifications

• H10P72/1928

  characterised by the presence of antistatic elements · CPC title

• H10P72/1911

  characterised by materials, roughness, coatings or the like · CPC title

• H10P72/1902 Primary

  specially adapted for a single substrate · CPC title

• H10P72/155

  characterised by a material, a roughness, a coating or the like · CPC title

• H10P72/145

  characterised by a material, a roughness, a coating or the like · CPC title