Method for GaN vertical microcavity surface emitting laser (VCSEL)

Patent metadata

Field	Value
Publication number	US-11043792-B2
Application number	US-201515515302-A
Country	US
Kind code	B2
Filing date	Sep 30, 2015
Priority date	Sep 30, 2014
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

Structures and methods for forming highly uniform and high-porosity gallium-nitride layers with sub-100-nm pore sizes are described. Electrochemical etching of heavily-doped gallium nitride at low bias voltages in concentrated nitric acid is used to form the porous gallium nitride. The porous layers may be used in reflective structures for integrated optical devices such as VCSELs and LEDs.

First claim

What is claimed is:

1. A porous gallium-nitride layer having a majority of its pores with a maximum transverse width less than approximately 100 nm and having a volumetric porosity greater than 10%, wherein an n-type doping density of the porous gallium-nitride layer is between approximately 5×10 19 cm −3 and approximately 2×10 20 cm −3 ,
wherein the pores comprise lateral pores arranged in at least two adjacent, vertically-spaced rows of lateral pores.

2. The porous gallium-nitride layer of claim 1 , wherein over half of the pores of the gallium-nitride layer have a maximum transverse width between approximately 30 nm and approximately 90 nm.

3. The porous gallium-nitride layer of claim 1 , wherein the pores have walls with a root-mean-square surface roughness less than approximately 10 nm.

4. The porous gallium-nitride layer of claim 1 , wherein the volumetric porosity is greater than 60%.

5. The porous gallium-nitride layer of claim 1 included in an electrode.

6. A semiconductor light emitting device comprising:
at least one buried porous gallium-nitride layer wherein a majority of the pores of the at least one buried porous gallium-nitride layer have a maximum transverse width less than approximately 100 nm and the at least one buried porous gallium-nitride layer has a volumetric porosity greater than 10%, wherein the at least one buried porous gallium-nitride layer has an n-type doping density between approximately 5×10 19 cm −3 and approximately 2×10 20 cm −3 ,
wherein the pores comprise lateral pores arranged in at least two adjacent, vertically-spaced rows of lateral pores.

7. The semiconductor light emitting device of claim 6 , wherein over 70% of the pores of the at least one buried porous gallium-nitride layer have a maximum transverse width between approximately 30 nm and approximately 90 nm.

8. The semiconductor light emitting device of claim 6 , wherein the at least one buried porous gallium-nitride layer comprises a plurality of porous gallium-nitride layers separated by non-porous gallium-nitride layers arranged in a first distributed Bragg reflector (DBR).

9. The semiconductor light emitting device of claim 8 , wherein the plurality of porous gallium-nitride layers include non-porous regions located centrally within the DBR that form a pillar of non-porous gallium nitride.

10. The semiconductor light emitting device of claim 8 , wherein the first DBR is arranged as an n-side reflector for a vertical-cavity surface-emitting laser (VCSEL).

11. The semiconductor light emitting device of claim 10 , wherein the first DBR has a reflectance greater than 99% for a lasing wavelength of the VCSEL.

12. The semiconductor light emitting device of claim 11 , wherein the first DBR has reflectance values greater than 98% over a bandwidth greater than approximately 20 nm.

13. The semiconductor light emitting device of claim 8 , further comprising a current-spreading layer having a doping density greater than 1×10 18 cm −3 located adjacent to the distributed Bragg reflector.

14. The semiconductor light emitting device of claim 6 , wherein the pores of the at least one buried porous gallium-nitride layer have walls with a root-mean-square surface roughness less than approximately 10 nm.

15. The semiconductor light emitting device of claim 8 , wherein a dopant for the n-type doping in the at least one buried porous gallium-nitride layer is germanium.

16. A method for forming porous gallium nitride, the method comprising:
exposing heavily-doped gallium nitride to an etchant, wherein the heavily-doped gallium nitride has an n-type doping density between approximately 5×10 19 cm −3 and approximately 2×10 20 cm −3 ;
applying an electrical bias between the etchant and the heavily-doped gallium nitride, wherein the electrical bias has a value between approximately 1.3 volts and 3 volts; and
electrochemically etching the heavily-doped gallium nitride to produce porous gallium nitride having a volumetric porosity greater than approximately 10% and a majority of pores with a maximum transverse width less than approximately 100 nm.

17. The method of claim 16 , wherein a dopant for the heavily-doped gallium nitride is germanium.

18. The method of claim 16 , wherein the etchant is nitric acid having a concentration between 60% and approximately 80% by weight.

19. The method of claim 16 , wherein the electrochemical etching comprises forming a distributed Bragg reflector (DBR), the method further comprising spreading etching current during the electrochemical etching with a current-spreading layer of doped gallium nitride located adjacent to the DBR.

20. The method of claim 16 , wherein the heavily-doped gallium nitride is arranged in a plurality of layers that are separated by undoped or moderately-doped gallium-nitride layers, the method further comprising etching vias into the plurality of layers and the undoped or moderately-doped gallium-nitride layers to expose edges of the plurality of layers, wherein the electrochemical etching comprises lateral etching of the plurality of layers.

21. The method of claim 16 , wherein the pores comprise lateral pores.

22. The method of claim 16 , wherein the pores comprise lateral pores arranged in at least two adjacent, vertically-spaced rows of lateral pores.

Assignees

• Univ Yale

Inventors

• Han Jung
• Zhang Cheng

Classifications

• H10P50/617

  of Group III-V materials · CPC title

• H10H20/817

  characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous · CPC title

• H10H20/814

  having reflecting means, e.g. semiconductor Bragg reflectors · CPC title

• H10H20/825 Primary

  containing nitrogen, e.g. GaN · CPC title

• H01S5/305

  characterised by the doping materials used in the laser structure · CPC title