Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device
US-9917004-B2 · Mar 13, 2018 · US
US11031167B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11031167-B2 |
| Application number | US-201816193929-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 16, 2018 |
| Priority date | Nov 21, 2017 |
| Publication date | Jun 8, 2021 |
| Grant date | Jun 8, 2021 |
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A giant perpendicular magnetic anisotropy (PMA) material comprises a III-V nitride substrate, and a layer of nitrogen disposed upon a surface of the III-V nitride substrate. The layer of nitrogen forms an N-terminated surface. The PMA material further comprises an iron film disposed upon the N-terminated surface. The III-V nitride substrate may be gallium nitride (GaN). A memory device using the PMA material may further comprise an input/output interface configured to communicate an address signal, a read/write signal and a data signal. The memory device may further comprise a controller configured to coordinate reading data from and writing data to the memory element.
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What is claimed is: 1. A giant perpendicular magnetic anisotropy (PMA) material, comprising: a III-V nitride substrate; a layer of nitrogen disposed upon a (000 1 ) surface of the III-V nitride substrate, the layer of nitrogen forming a (000 1 ) nitrogen terminated (N-terminated) surface; and an iron film disposed upon the (000 1 ) N-terminated surface. 2. The giant PMA material of claim 1 , wherein the III-V nitride is gallium nitride (GaN). 3. The giant PMA material of claim 1 , wherein the layer of nitrogen is a wurtzite GaN (000 1 ) N-terminated surface. 4. The giant PMA material of claim 1 , wherein the layer of nitrogen is a monolayer of nitrogen atoms. 5. The giant PMA material of claim 1 , wherein the iron film is less than or equal to three monolayers of iron atoms. 6. A method of fabricating a giant PMA material, comprising: exposing a (000 1 ) surface of a III-V nitride substrate to an atmosphere configured to provide a source of nitrogen, to dispose a layer of nitrogen on the (000 1 ) surface of the III-V nitride substrate, the layer of nitrogen forming an (000 1 ) N-terminated surface; disposing an iron film upon the (000 1 ) N-terminated surface. 7. The method of claim 6 , wherein the atmosphere is configured to provide a source of nitrogen comprises an atmosphere of nitrogen. 8. The method of claim 6 , wherein the atmosphere is configured to provide a source of nitrogen comprising an atmosphere of excessive NH 3 . 9. The method of claim 8 , further comprising sample annealing the III-V nitride substrate in the atmosphere of excessive NH 3 . 10. The method of claim 6 , further comprising heating III-V nitride substrate to a temperature of 1000° C., while exposing the III-V nitride substrate to a nitrogen plasma. 11. The method of claim 10 , further comprising reducing the III-V nitride substrate to a temperature of 685° C., thereby initiating growth of the N-terminated surface. 12. The method of claim 6 , wherein the III-V nitride is gallium nitride (GaN). 13. The method of claim 6 , wherein the layer of nitrogen is a wurtzite GaN (000 1 ) N-terminated surface. 14. The method of claim 6 , wherein the layer of nitrogen is a monolayer of nitrogen atoms. 15. The method of claim 6 , wherein the iron film is less than or equal to three monolayers of iron atoms. 16. A memory device, comprising: a memory element comprising: a III-V nitride substrate; a layer of nitrogen disposed upon a (000 1 ) surface of the III-V nitride substrate, the layer of nitrogen forming an (000 1 ) N-terminated surface; and an iron film disposed upon the (000 1 ) N-terminated surface; an input/output interface configured to communicate an address signal, a read/write signal and a data signal; and a controller configured to coordinate reading data from and writing data to the memory element. 17. The memory device of claim 16 , wherein the III-V nitride is gallium nitride (GaN). 18. The memory device of claim 16 , wherein the layer of nitrogen is a wurtzite GaN (000 1 ) N-terminated surface. 19. The memory device of claim 16 , wherein the layer of nitrogen is a monolayer of nitrogen atoms. 20. The memory device of claim 16 , wherein the iron film is less than or equal to three monolayers of iron atoms.
Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title
containing iron or nickel ({H01F10/126} , H01F10/13, H01F10/16 take precedence) · CPC title
Materials of the active region · CPC title
Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B) · CPC title
characterised by the composition of the substrate · CPC title
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