Substrate processing apparatus and method

Patent metadata

Field	Value
Publication number	US-11024523-B2
Application number	US-201816128282-A
Country	US
Kind code	B2
Filing date	Sep 11, 2018
Priority date	Sep 11, 2018
Publication date	Jun 1, 2021
Grant date	Jun 1, 2021

Abstract

A substrate processing apparatus, comprising a substrate support (32) provided with a support surface (34) for supporting a substrate or a substrate carrier (24) thereon and a support heater (50) constructed and arranged to heat the support surface (34). The apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support (32) when no substrate or substrate carrier (24) is on the support surface.

First claim

The invention claimed is:

1. A method, comprising:
providing a substrate processing apparatus comprising:
a substrate support provided with a support surface for supporting a substrate or a substrate carrier thereon and a support heater, disposed below the support surface, that is constructed and arranged to heat the support surface, wherein the apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support when no substrate or substrate carrier is on the support surface, wherein the heat shield at least partially forms a chamber constructed and arranged to store the substrate support therein;

exchanging at least one substrate of the substrate carrier, while covering the substrate support with the heat shield while heating the support surface of the substrate support with the support heater;
moving the substrate support and the heat shield with respect to each other so as to support the substrate carrier on the support surface; and,
moving the substrate in the substrate carrier into a reactor.

2. The method according to claim 1 , wherein the heat shield is separately and independently moveable relative to the support surface of the substrate support.

3. The method according to claim 1 , wherein the apparatus comprises a recess which can be closed with the heat shield to form the chamber constructed and arranged to store the substrate support therein.

4. The method according to claim 1 , wherein the chamber is substantially airtight.

5. The method according to claim 1 , wherein the shield comprises thermally insulating material thermally insulating the substrate support.

6. The method according to 1 , wherein the shield comprises an upper shield and a cylindrical side shield, which shields are interconnected to define a generally cylindrical chamber to cover and shield the substrate support when no substrate or substrate carrier is on the support surface.

7. The method according to claim 1 , wherein the apparatus comprises an actuator constructed and arranged to move at least one of the heat shield and the substrate support with respect to each other so as to move the cover to shield the substrate support when no substrate or substrate carrier is on the support surface.

8. The method according to claim 7 , wherein the apparatus comprises an elevator constructed and arranged to move the substrate support in a vertical direction.

9. The method according to 1 , wherein the substrate support comprises an upper plate, a cylindrical side plate and a bottom plate, which plates are interconnected to define a generally cylindrical container,
wherein an outer surface of the upper plate defines the support surface of the substrate support, and
wherein the container defines a body that extends between the upper plate and the bottom plate, which body accommodates at least part of the support heater.

10. The method according to claim 9 , wherein the body of the cylindrical container further accommodates thermally insulating material and wherein a heat generating portion of the heater is disposed adjacent the upper plate, and wherein the thermally insulating material is disposed below the heat generating portion of the support heater.

11. The method according to claim 10 , wherein the heat generating portion rests on the thermally insulating material.

12. The method according claim 1 , further comprising a reaction chamber defining a reaction space and an opening via which the support assembly is at least partly receivable in said reaction chamber, such that a substrate or substrate carrier supported thereon is receivable in the reaction space.

13. The method according to claim 12 , wherein the apparatus is a vertical thermal furnace;
wherein the reaction chamber is at least partly formed by a bell jar-shaped reaction tube, and
wherein the substrate support is at least partly receivable in said reaction tube via the opening at the lower end thereof, such that the support assembly, in a received state, substantially closes off said opening of the reaction tube.

14. The method according to claim 1 , further comprising a substrate carrier connected to the support surface of the substrate support and that is configured to hold at least one substrate.

Assignees

• Asm Ip Holding Bv

Inventors

• Oosterlaken Theodorus

Classifications

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title