Nitrogen doped and vacancy dominated silicon ingot and thermally treated wafer formed therefrom having radially uniformly distributed oxygen precipitation density and size

Patent metadata

Field	Value
Publication number	US-10988859-B2
Application number	US-201815983455-A
Country	US
Kind code	B2
Filing date	May 18, 2018
Priority date	Jul 31, 2014
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

Nitrogen-doped CZ silicon crystal ingots and wafers sliced therefrom are disclosed that provide for post epitaxial thermally treated wafers having oxygen precipitate density and size that are substantially uniformly distributed radially and exhibit the lack of a significant edge effect. Methods for producing such CZ silicon crystal ingots are also provided by controlling the pull rate from molten silicon, the temperature gradient and the nitrogen concentration. Methods for simulating the radial bulk micro defect size distribution, radial bulk micro defect density distribution and oxygen precipitation density distribution of post epitaxial thermally treated wafers sliced from nitrogen-doped CZ silicon crystals are also provided.

First claim

What is claimed is:

1. A method of controlling an edge band of oxygen precipitates in wafers sliced from a nitrogen-doped silicon crystal ingot grown by the Czochralski process and thermally treated at 780° C. for 3 hours and then at 1000° C. for 16 hours wherein the method is implemented by a computing device including a processor coupled to a memory, the method comprising:
determining, by the computing device, by simulation, a combination of (i) nitrogen-doped silicon crystal ingot diameter, (ii) nitrogen-doped silicon crystal ingot pull rate or nitrogen-doped silicon crystal ingot pull rate range, (iii) nitrogen-doped silicon crystal ingot nitrogen concentration or nitrogen-doped silicon crystal ingot nitrogen concentration range, and (iv) nitrogen-doped silicon crystal ingot surface temperature gradient or nitrogen-doped silicon crystal ingot surface temperature range that enables the preparation of a nitrogen-doped CZ silicon crystal ingot from molten silicon by the Czochralski process wherein a thermally treated wafer sliced therefrom having an edge band in a region extending from about 1000 μm to the edge of said wafer and to the edge of said wafer and is characterized by oxygen precipitates having an average diameter of from about 80 nm to about 90 nm and an oxygen precipitate density of from about 1*10 8 atoms per cm 3 to about 1*10 10 atoms per cm 3 ,
wherein the simulation comprises at least one iteration of a simulation scheme comprising:
(1) receiving, by the computing device, values for at least (i) a nitrogen-doped silicon crystal ingot diameter, (ii) a nitrogen-doped silicon crystal ingot pull rate or a nitrogen-doped silicon crystal ingot pull rate range, (iii) a nitrogen-doped silicon crystal ingot nitrogen concentration or a nitrogen-doped silicon crystal ingot nitrogen concentration range and (iv) a nitrogen-doped silicon crystal ingot surface temperature gradient or a nitrogen-doped silicon crystal surface ingot temperature gradient range, and simulating, by the computing device, a thermally treated wafer radial bulk micro defect size distribution in a region extending from the center of said wafer to the edge of said wafer based on the received values;
(2) receiving, by the computing device, values for at least (i) the nitrogen-doped silicon crystal ingot diameter, (ii) the nitrogen-doped silicon crystal ingot pull rate or the nitrogen-doped silicon crystal ingot pull rate range and (iii) the nitrogen-doped silicon crystal ingot nitrogen concentration or the nitrogen-doped silicon crystal ingot nitrogen concentration range, and simulating, by the computing device, a thermally treated wafer radial bulk micro defect density distribution in a region extending from the center of said wafer to the edge of said wafer based on the received values;
(3) receiving, by the computing device, values for at least (i) the nitrogen-doped silicon crystal ingot diameter, (ii) the nitrogen-doped silicon crystal ingot pull rate or the nitrogen-doped silicon crystal ingot pull rate range, (iii) the nitrogen-doped silicon crystal ingot nitrogen concentration or the nitrogen-doped silicon crystal ingot nitrogen concentration range and (iv) the nitrogen-doped silicon crystal ingot surface temperature gradient or the nitrogen-doped silicon crystal ingot surface temperature gradient range and simulating, by the computing device, a thermally treated wafer oxygen precipitation density distribution in a region extending from the center of said wafer to the edge of said wafer; and
(4) simulating, by the computing device, the average size of the thermally treated wafer edge band oxygen precipitates based on the simulated values for (i) the thermally treated wafer radial bulk micro defect size distribution from the center of said wafer to the edge of said wafer, (ii) the thermally treated wafer radial bulk micro defect density distribution from the center of said wafer to the edge of said wafer, and (iii) the thermally treated wafer oxygen precipitation density distribution in a region extending from the center of said wafer to the edge of said wafer, wherein the computing device predicts the thermally treated wafer edge band by simulation to comprise oxygen precipitates having an average diameter of from about 80 nm to about 90 nm and an oxygen precipitate density of from about 1*10 8 atoms per cm 3 to about 1*10 10 atoms per cm 3 , and
wherein the process of producing the nitrogen-doped silicon crystal ingot by the Czochralski process comprises:
forming the molten silicon in a crucible within a growth chamber;
doping the silicon melt with nitrogen by flowing nitrogen gas into the growth chamber, adding nitrogen to the silicon melt, or a combination of flowing nitrogen gas into the growth chamber and adding nitrogen to the silicon melt;
dipping a single crystal silicon seed crystal into the melt;
pulling the single crystal seed crystal to thereby form a conical neck of increasing diameter by decreasing the pull rate of the crystal;
pulling the nitrogen-doped silicon crystal ingot from the molten silicon at a pull rate range between about 0.78 mm per minute to 1.0 mm per minute, a temperature gradient between about 30° K per cm to about 50° K per cm, and at an average crystal ingot surface temperature range of from about 1300° C. to about 1415° C. to produce a substantially constant diameter region of the nitrogen-doped CZ silicon crystal ingot from which the treated wafers are produced, wherein (i) the substantially constant diameter region of the nitrogen-doped silicon crystal ingot has a diameter between about 150 mm to about 450 mm, (ii) the nitrogen concentration in the substantially constant diameter region of the nitrogen-doped silicon crystal ingot is from 1*10 14 atoms per cm 3 to about 1*10 15 atoms per cm 3 , and (iii) a portion of the substantially constant diameter region of the nitrogen-doped silicon crystal ingot comprises vacancies as the predominant intrinsic point defect; and
cooling the substantially constant diameter region of the nitrogen-doped silicon crystal ingot;
wherein the thermally treated wafer sliced from the nitrogen-doped silicon crystal ingot has an edge band in a region extending from about 1000 μm to the edge of said wafer and to the edge of said wafer and is characterized by oxygen precipitates having an average diameter of from about 80 nm to about 90 nm and an oxygen precipitate density of from about 1*10 8 atoms per cm 3 to about 1*10 10 atoms per cm 3 .

2. The method of claim 1 wherein the treated wafer (i) has a radial bulk micro defect size distribution characterized by an increase in bulk micro defect size in a region extending from the center of said wafer to the edge of said wafer of less than 20% and (ii) has an increase in radial bulk micro defect density from the center of said wafer to the edge of said wafer of less than 200%.

3. The method of claim 1 wherein the thermally treated wafer is characterized by an increase in radial bulk micro defect size in a region extending from about 10 mm to the edge of said wafer to the edge of said wafer of less than 15%.

4. The method of claim 1 wherein the thermally treated wafer is characterized by an increase in radial bulk micro defect density in a region extending from about 10 mm to the edge of said wafer to the edge of said wafer of less than 100%.

5. The method of claim 1 further comprising receiving a nitrogen-doped silicon crystal ingot annealing temperature, said annealing temperature being from about 1000° C. to about 1100° C., and
(1) simulating the thermally treated wafer radial bulk micro defect size distribution in a region extending from the center of said wafer to the edge of said wafer on the basis of the combination of (i) the nitrogen-doped silicon crystal ingot diameter, (ii) the nitrogen-doped silicon crystal

Assignees

• Sunedison Semiconductor Ltd Uen201334164H
• Globalwafers Co Ltd

Inventors

• Lu Zheng
• Samanta Gaurab
• Lu Tse-Wei
• Tsai Feng-Chien

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C30B15/206

  the thermal history of growing the ingot · CPC title