Systems and methods for lithography

Patent metadata

Field	Value
Publication number	US-10948830-B1
Application number	US-201916724925-A
Country	US
Kind code	B1
Filing date	Dec 23, 2019
Priority date	Dec 23, 2019
Publication date	Mar 16, 2021
Grant date	Mar 16, 2021

Abstract

The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.

First claim

What is claimed is:

1. An exposure unit comprising:
a container configured to contain a fluid material;
a substrate disposed within the container, wherein the substrate has a first surface and a second surface, wherein the substrate comprises a photoresist material on at least the first surface;
a photomask disposed within the container, wherein the photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material; and
an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.

2. The exposure unit of claim 1 , further comprising an inflation device configured to controllably inflate the inflatable balloon.

3. The exposure unit of claim 2 , further comprising a controller having at least one processor and a memory, wherein the at least one processor executes program instructions stored in the memory so as to carry out operations, the operations comprising:
controlling the inflation device to inflate the inflatable balloon so as to achieve a desired gap between the photomask and the photoresist material.

4. The exposure unit of claim 1 , further comprising:
a light source configured to produce illumination light, wherein the light source is optically coupled to the container, wherein the light source is a collimated ultraviolet (UV) lamp.

5. The exposure unit of claim 4 , wherein the container comprises an optically-transparent opening, wherein the illumination light illuminates the photoresist material by way of the optically-transparent opening.

6. The exposure unit of claim 4 , further comprising an optical component configured to direct the illumination light from the light source to illuminate the photoresist material at a desired angle and to expose at least an angled structure in the photoresist material, wherein the optical component comprises at least one mirror arranged to reflect at least a portion of the illumination light to illuminate the photoresist material at the desired angle.

7. The exposure unit of claim 6 , wherein the desired angle is substantially 45 degrees with respect to a surface of the substrate.

8. The exposure unit of claim 6 , further comprising an aperture mask disposed between the light source and the substrate, wherein the aperture mask comprises one or more openings, each opening corresponding to a respective desired structure in the photoresist material.

9. The exposure unit of claim 8 , wherein the respective desired structure is one of: an angled structure and a vertical structure.

10. The exposure unit of claim 9 , wherein a first portion of the illumination light is directed towards the at least one mirror by passing through a first opening that corresponds to the angled structure.

11. The exposure unit of claim 10 , wherein a second portion of the illumination light is directed towards the substrate by passing through a second opening that corresponds to a desired vertical structure in the photoresist material, and wherein the second portion of the illumination light illuminates the photoresist material at a substantially normal angle to expose the desired vertical structure in the photoresist material.

12. The exposure unit of claim 1 , wherein the fluid material comprises at least one of: water, glycol, and glycerol.

13. A photolithography method comprising:
controllably inflating an inflatable balloon so as to control a gap between a photomask and a photoresist material disposed on a first surface of a substrate, wherein the gap comprises a fluid material, wherein controllably inflating the inflatable balloon comprises applying a desired force to a second surface of the substrate.

14. The method of claim 13 further comprising:
attaching an inflation assembly to the second surface of the substrate by way of a plurality of vacuum suction cups, wherein the inflation assembly comprises:
the inflatable balloon;
a control valve; and
an inflation device, wherein the inflation device is coupled to the inflatable balloon by way of the control valve.

15. The method of claim 13 , wherein controllably inflating the inflatable balloon comprises controlling at least one of: a pressure of an inflating fluid of the balloon, an inflating fluid flow rate, or an applied force duration.

16. The method of claim 15 , further comprising determining the applied force duration according to the Stefan adhesion equation, and wherein controllably inflating the inflatable balloon comprises inflating the inflatable balloon during the determined applied force duration.

Assignees

• Waymo Llc

Inventors

• Shi Hongqin
• Tung Yeh-Jiun
• Dunphy James
• Gensoli Cesar

Classifications

• G03F7/70341 Primary

  Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041) · CPC title

• G03F7/70925

  Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning · CPC title

• G03F7/7035

  Proximity or contact printers · CPC title