Apparatus and method for packaging, handling or testing of sensors

Patent metadata

Field	Value
Publication number	US-10935569-B2
Application number	US-201916251421-A
Country	US
Kind code	B2
Filing date	Jan 18, 2019
Priority date	Apr 17, 2017
Publication date	Mar 2, 2021
Grant date	Mar 2, 2021

Abstract

A method of testing sensors includes providing a test sheet that includes a plurality of sensor assemblies, a plurality of test pads, and traces extending from the sensor assemblies to the plurality of test pads. A sensor is positioned on each sensor assembly. Each sensor is connected to the sensor assembly with wire bonds. An enclosure is formed over the plurality of sensor assemblies. An electrical signal is detected from each of the plurality of sensor assemblies at the test pads.

First claim

The invention claimed is:

1. A sensor assembly die comprising:
a sensor assembly, the sensor assembly comprising:
a flexible circuit that includes a flexible substrate that forms a body portion of the sensor assembly and pads positioned on the flexible circuit;
a sensor positioned on the flexible circuit; and
wire bonds connecting the sensor to the pads on the flexible circuit;

a frame surrounding the sensor assembly; and
a plurality of tabs connecting the sensor assembly to the frame, wherein each of the plurality of tabs is configured to be cut to allow the sensor assembly to be removed from the frame;
wherein the frame and the plurality of tabs are integrally formed with the flexible circuit.

2. The sensor assembly die of claim 1 , wherein the pads on the flexible circuit each include an input pad, an output pad, and a trace connecting the input pad to the output pad, wherein the sensor includes sensors pads, and wherein the wire bonds connect the sensor pads on the sensor to the input pads on the flexible circuit.

3. The sensor assembly die of claim 1 , wherein the sensor is a MEMS device.

4. The sensor assembly die of claim 1 , and further comprising:
encapsulation formed over the wire bonds.

5. The sensor assembly die of claim 1 , wherein the flexible circuit is made out of a polyimide film.

6. A test sheet comprising:
an array of sensor assembly dies, wherein each sensor assembly die comprises:
a sensor assembly;
a frame surrounding the sensor assembly; and
a plurality of tabs connecting the sensor assembly to the frame, wherein each of the plurality of tabs is configured to be cut to allow the sensor assembly to be removed from the frame;
wherein the frame and the plurality of tabs are integrally formed with the array of sensor assembly dies;

a plurality of test pads; and
a plurality of electrical traces, wherein each electrical trace connects the sensor assembly to one test pad.

7. The test sheet of claim 6 , wherein the array of sensor assembly dies is formed as an integral piece made out of a flexible substrate.

8. The test sheet of claim 6 , wherein the sensor assembly comprises:
a flexible circuit that includes a flexible substrate that forms a body portion of the sensor assembly and pads positioned on the flexible circuit;
a sensor positioned on the flexible circuit; and
wire bonds connecting the sensor to the pads on the flexible circuit.

9. The test sheet of claim 8 , wherein the sensor is a MEMS device.

10. The test sheet of claim 8 , wherein the flexible substrate of the sensor assembly and the frame and the plurality of tabs of the sensor assembly die are formed out of a polyimide film.

Assignees

• Rosemount Aerospace Inc

Inventors

• Golden Jim
• Potasek David P
• Childress Marcus Allen

Classifications

• G01R31/2808

  Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards (probe, multiprobe, probe manipulator or probe fixture G01R1/067) · CPC title

• G01R31/2829

  Testing of circuits in sensor or actuator systems (testing of apparatus for measuring electric or magnetic variables G01R35/00; testing of indicating or recording apparatus G01D; in airbag systems B60R21/0173; checking gas analysers G01N33/007; monitoring or fail-safe circuits for electromagnets H01F7/1844) · CPC title

• G01R1/0416 Primary

  Connectors, terminals (G01R1/0425 and G01R1/0433 take precedence; with measurement function for battery poles G01R31/364) · CPC title

• B81C99/004

  during manufacturing · CPC title

• B81C99/005

  Test apparatus · CPC title