External inverter system for variable substrate thickness and method for rotating a substrate
US-9662675-B2 · May 30, 2017 · US
US10933483B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10933483-B2 |
| Application number | US-201916357854-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 19, 2019 |
| Priority date | Dec 5, 2017 |
| Publication date | Mar 2, 2021 |
| Grant date | Mar 2, 2021 |
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A dispensing system includes an optional pre-heat station configured to receive an electronic substrate, a dispense station configured to dispense material on the electronic substrate received from the optional pre-heat station, an optional post-heat station configured to receive the electronic substrate from the dispense station, and a non-contact sensor positioned above the electronic substrate on at least one of the optional pre-heat station, the dispense station, and the optional post-heat station.
Opening claim text (preview).
What is claimed is: 1. A dispensing system comprising: a frame; a dispense station coupled to the frame, the dispense station including a dispensing unit gantry configured to move in x-axis and y-axis directions and at least one dispensing unit coupled to the dispensing unit gantry by a carriage configured to move the at least one dispensing unit in a z-axis direction, the at least one dispensing unit being configured to dispense material on the electronic substrate positioned on a substrate support; a first non-contact sensor positioned above the electronic substrate on the dispense station, the non-contact sensor being mounted on the carriage and directed toward the substrate; and a second non-contact sensor positioned above the electronic substrate on a pre-heat station positioned upstream from the dispense station to ensure that the electronic substrate is at a proper temperature before moving the electronic substrate to the dispense station. 2. The dispensing system of claim 1 , wherein the second non-contact sensor is mounted on a first adjustable mechanism that moves towards and away from a target of the temperature measurement. 3. The dispensing system of claim 2 , further comprising a third non-contact sensor positioned above the electronic substrate on a post-heat station positioned downstream from the dispense station to ensure that the electronic substrate is at a proper temperature at the post-heat station. 4. The dispensing system of claim 3 , wherein the third non-contact sensor is mounted on a second adjustable mechanism that moves towards and away from a target of the temperature measurement. 5. The dispensing system of claim 1 , wherein each of the first non-contact sensor and the second non-contact sensor is an infrared temperature sensor. 6. The dispensing system of claim 1 , further comprising a conveyor configured to move electronic substrates through the dispensing system.
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